发明授权
US08910355B2 Method of manufacturing a film bulk acoustic resonator with a loading element
有权
制造具有加载元件的薄膜体声波谐振器的方法
- 专利标题： Method of manufacturing a film bulk acoustic resonator with a loading element
- 专利标题（中）： 制造具有加载元件的薄膜体声波谐振器的方法
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申请号： US13323285申请日： 2011-12-12
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公开(公告)号： US08910355B2公开(公告)日： 2014-12-16
- 发明人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人： James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony Canale
- 主分类号： H03H3/04
- IPC分类号： H03H3/04 ; H03H9/15 ; H03H9/10 ; H03H3/02 ; H03H3/007 ; C23C16/40
摘要：
Manufacturing a semiconductor structure including modifying a frequency of a Film Bulk Acoustic Resonator (FBAR) device though a vent hole of a sealing layer surrounding the FBAR device.
公开/授权文献
- US20130147319A1 LOADING ELEMENT OF A FILM BULK ACOUSTIC RESONATOR 公开/授权日：2013-06-13
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