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US09087839B2 Semiconductor structures with metal lines 有权
具有金属线的半导体结构

Semiconductor structures with metal lines
Abstract:
Disclosed are semiconductor structures with metal lines and methods of manufacture which reduce or eliminate extrusion formation. The method includes forming a metal wiring comprising a layered structure of metal materials with an upper constraining layer. The method further includes forming a film on the metal wiring which prevents metal extrusion during an annealing process.
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