Invention Grant
- Patent Title: Semiconductor structures with metal lines
- Patent Title (中): 具有金属线的半导体结构
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Application No.: US13853301Application Date: 2013-03-29
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Publication No.: US09087839B2Publication Date: 2015-07-21
- Inventor: Shawn A. Adderly , Daniel A. Delibac , Zhong-Xiang He , Matthew D. Moon , Anthony C. Speranza , Timothy D. Sullivan , David C. Thomas , Eric J. White
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent David Cain
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L23/522 ; H01L49/02 ; H01L23/532

Abstract:
Disclosed are semiconductor structures with metal lines and methods of manufacture which reduce or eliminate extrusion formation. The method includes forming a metal wiring comprising a layered structure of metal materials with an upper constraining layer. The method further includes forming a film on the metal wiring which prevents metal extrusion during an annealing process.
Public/Granted literature
- US20140291802A1 SEMICONDUCTOR STRUCTURES WITH METAL LINES Public/Granted day:2014-10-02
Information query
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