发明授权
- 专利标题: Method of manufacturing switching filters and design structures
- 专利标题(中): 开关滤波器和设计结构的制造方法
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申请号: US13358172申请日: 2012-01-25
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公开(公告)号: US09099982B2公开(公告)日: 2015-08-04
- 发明人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony Canale
- 主分类号: H03H3/08
- IPC分类号: H03H3/08 ; H01L41/08 ; H03H9/64 ; H03H3/007 ; H03H9/02
摘要:
Switchable and/or tunable filters, methods of manufacture and design structures are provided herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.
公开/授权文献
- US20130187729A1 SWITCHABLE FILTERS AND DESIGN STRUCTURES 公开/授权日:2013-07-25
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