Invention Grant
- Patent Title: Method and apparatus of growing a thin film
- Patent Title (中): 生长薄膜的方法和装置
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Application No.: US13845621Application Date: 2013-03-18
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Publication No.: US09221071B2Publication Date: 2015-12-29
- Inventor: Jau-Chyn Huang , Kong-Wei Cheng , Wen-Sheng Chang , Tai-Chou Lee , Ching-Chen Wu
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Priority: TW95148509A 20061222
- Main IPC: B05C3/05
- IPC: B05C3/05 ; C23C18/14 ; H01L21/02 ; H01L31/18
Abstract:
A method and apparatus of growing a thin film are provided. The method comprises at least (a) providing a number of substrates; (b) cleaning the substrates; and (c) placing the substrates into a reaction liquid; (d) vibrating the reaction liquid by ultrasonic waves such that a thin film is grown on the substrates evenly.
Public/Granted literature
- US20130247823A1 METHOD AND APPARATUS OF GROWING A THIN FILM Public/Granted day:2013-09-26
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