Invention Grant
- Patent Title: Nanodevice and method for fabricating the same
- Patent Title (中): 纳米器件及其制造方法
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Application No.: US14381868Application Date: 2013-02-27
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Publication No.: US09240561B2Publication Date: 2016-01-19
- Inventor: Yutaka Majima , Toshiharu Teranishi , Kazuhiko Matsumoto , Kenzo Maehashi , Yasuo Azuma , Yasuhide Ohno , Kosuke Maeda , Guillaume Hackenberger
- Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Applicant Address: JP Kawaguchi-shi
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee Address: JP Kawaguchi-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2012-042588 20120228
- International Application: PCT/JP2013/055261 WO 20130227
- International Announcement: WO2013/129535 WO 20130906
- Main IPC: H01L51/05
- IPC: H01L51/05 ; H01L27/088 ; H01L27/06 ; B82Y10/00 ; H01L27/04 ; H01L29/66 ; H01L21/822 ; H01L49/00 ; H01L51/10

Abstract:
This invention is to provide a nanodevice, which is combined with an electronic device such as a diode, tunnel device and MOS transistor, integrated circuit and manufacturing method of the nanodevice. A nanodevice includes: a first insulating layer 2; one electrode 5A and the other electrode 5B provided to have a nanogap on the first insulating layer 2; a metal nanoparticle or a functional molecule provided between the one electrode 5A and the other electrode 5B; a second insulating layer 8 provided on the first insulating layer 2, and on the one electrode 5A and the other electrode 5B to embed the metal nanoparticle or the functional molecule. The second insulating layer works as a passivating layer.
Public/Granted literature
- US20150014624A1 NANODEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2015-01-15
Information query
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