Invention Grant
- Patent Title: Systems and methods for reverse pulsing
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Application No.: US14863331Application Date: 2015-09-23
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Publication No.: US09761459B2Publication Date: 2017-09-12
- Inventor: Maolin Long , Zhongkui Tan , Ying Wu , Qian Fu , Alex Paterson , John Drewery
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L21/3065
- IPC: H01L21/3065 ; H01L21/67 ; G01R31/00
Abstract:
Systems and methods for reverse pulsing are described. One of the methods includes receiving a digital signal having a first state and a second state. The method further includes generating a transformer coupled plasma (TCP) radio frequency (RF) pulsed signal having a high state when the digital signal is in the first state and having a low state when the digital signal is in the second state. The method includes providing the TCP RF pulsed signal to one or more coils of a plasma chamber, generating a bias RF pulsed signal having a low state when the digital signal is in the first state and having a high state when the digital signal is in the second state, and providing the bias RF pulsed signal to a chuck of the plasma chamber.
Public/Granted literature
- US20170040174A1 Systems And Methods For Reverse Pulsing Public/Granted day:2017-02-09
Information query
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