- 专利标题: Techniques for forming spin-transfer torque memory having a dot-contacted free magnetic layer
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申请号: US15117605申请日: 2014-03-28
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公开(公告)号: US09882121B2公开(公告)日: 2018-01-30
- 发明人: Charles C. Kuo , Kaan Oguz , Brian S. Doyle , Mark L. Doczy , David L. Kencke , Satyarth Suri , Robert S. Chau
- 申请人: INTEL CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Finch & Maloney PLLC
- 国际申请: PCT/US2014/032138 WO 20140328
- 国际公布: WO2015/147855 WO 20151001
- 主分类号: H01L29/82
- IPC分类号: H01L29/82 ; H01L43/08 ; H01L43/02 ; G11C11/16 ; H01L43/12
摘要:
Techniques are disclosed for fabricating a self-aligned spin-transfer torque memory (STTM) device with a dot-contacted free magnetic layer. In some embodiments, the disclosed STTM device includes a first dielectric spacer covering sidewalls of an electrically conductive hardmask layer that is patterned to provide an electronic contact for the STTM's free magnetic layer. The hardmask contact can be narrower than the free magnetic layer. The first dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer. In some embodiments, the STTM further includes an optional second dielectric spacer covering sidewalls of its free magnetic layer. The second dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer and may serve, at least in part, to protect the sidewalls of the free magnetic layer from redepositing of etch byproducts during such patterning, thereby preventing electrical shorting between the fixed magnetic layer and the free magnetic layer.
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