公开(公告)号：EP2883244A4

公开(公告)日：2016-03-30

申请号：EP13828155

申请日：2013-05-20

Applicant: KLA TENCOR CORP

Inventor： BEZEL ILYA ,  SHCHEMELININ ANATOLY ,  PANZER MATTHEW ALAN

IPC: H01L21/66 ,  H01J61/12 ,  H01J61/16 ,  H01J61/28 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

公开(公告)号：EP2890930A4

公开(公告)日：2016-03-09

申请号：EP13832549

申请日：2013-08-28

Applicant: KLA TENCOR CORP

Inventor： WANG JINCHENG ,  CHIMMALGI ANANT ,  PATIL RAJEEV ,  KIM ERIK ,  BRUNNER RUDOLF ,  GIANG QUANG ,  WILSON LAUREN ,  GROSS KENNETH P ,  BEZEL ILYA ,  LASFARGUES CEDRIC ,  SCOTT DANIEL ,  VORA YOUNUS ,  DERSTINE MATTHEW

IPC: F21V29/503 ,  F21V19/00 ,  F21V29/60

CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Abstract translation: 一种流体输入歧管喷射配给流体围绕灯泡的主体冷却到低于阈值的灯泡。 注入的流体因此沿所述灯泡的表面更均匀地分布热量，以减少热应力。 所述流体输入歧管可以包括一个或多个翼型件以沿着灯泡的表面的基本层流流动，或者它可包括定向成产生基本上层流流动的流体喷射喷嘴的复数。 的输出部分可以被配置成通过允许注入的流体，以吸收来自灯泡热后容易逃脱或通过施加负压，以积极绘制注入的流体沿着灯泡和远离的表面以便沿着灯泡的表面的流体流动。

公开(公告)号：EP2959503A4

公开(公告)日：2016-10-26

申请号：EP14753960

申请日：2014-02-21

Applicant: KLA TENCOR CORP

Inventor： BRADY GREGORY ,  SHCHEGROV ANDREI V ,  ROTTER LAWRENCE D ,  SHAUGHNESSY DERRICK ,  SHCEMELININ ANATOLY ,  BEZEL ILYA ,  ARAIN MUZAMMIL ,  VASILIEV ANATOLY ,  ALLEN JAMES ,  SHULEPOV OLEG ,  HILL ANDREW ,  BACHAR OHAD ,  MARKOWITZ MOSHE ,  ISH-SHALOM YARON ,  SELA ILAN ,  MANASSEN AMNON ,  SVIZHER ALEXANDER ,  KHOKHLOV MAXIM ,  ABRAMOV AVI ,  TSIBULEVSKY OLEG ,  KANDEL DANIEL ,  GHINOVKER MARK

IPC: H01L21/66 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293 ,  G02B6/35

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 用于向用于光学测量的测量头提供照明的系统被配置为组合来自多个照明源的照明光束以将一个或多个所选波长的照明传送到测量头。 控制传递到测量头的照明的强度和/或空间相干性。 在一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

公开(公告)号：EP2766919A4

公开(公告)日：2015-05-27

申请号：EP12846194

申请日：2012-10-10

Applicant: KLA TENCOR CORP

Inventor： CHIMMALGI ANANT ,  SHCHEMELININ ANATOLY ,  BEZEL ILYA ,  PATIL RAJEEV

IPC: H01J63/08 ,  H01J61/12 ,  H01J61/28 ,  H01J61/52 ,  H01J65/04

CPC classification number: H01J61/526 ,  H01J61/28 ,  H01J65/04