公开(公告)号：EP2593587B1

公开(公告)日：2016-09-07

申请号：EP11748301.6

申请日：2011-07-13

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  LINDGREN, Lennart ,  SVENSSON, Stefan ,  CHAUVET, Jean-Michel ,  SANTOS, Antonio ,  FREDENBERG, Mikael

IPC分类号： C25D1/00 ,  C25D7/12 ,  C25D17/00 ,  C25D17/06 ,  C25D17/12 ,  C25D17/14

CPC分类号： C25D7/123 ,  C25D17/001 ,  C25D17/06 ,  C25D17/12 ,  C25D17/14

公开(公告)号：EP1948850B1

公开(公告)日：2019-04-17

申请号：EP06813033.5

申请日：2006-11-20

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： FREDENBERG, Mikael ,  MÖLLER, Patrik ,  WIWEN-NILSSON, Peter

IPC分类号： C25D5/02 ,  C25D21/08 ,  C25D21/11 ,  C25F3/14 ,  H01L21/288 ,  H01L21/3213 ,  H01L21/768

公开(公告)号：EP2593586B1

公开(公告)日：2017-09-06

申请号：EP11748300.8

申请日：2011-07-13

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  LINDGREN, Lennart ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  UTTERBÄCK, Tomas ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter

IPC分类号： C25D1/00 ,  C25D7/12 ,  C25D17/06 ,  C25D17/00 ,  C25D17/14 ,  H01L21/687 ,  H01L21/67 ,  H01L21/683

CPC分类号： H01L21/67092 ,  C25D7/123 ,  C25D17/001 ,  C25D17/005 ,  C25D17/06 ,  C25D17/14 ,  H01L21/6838 ,  H01L21/68735

公开(公告)号：EP2593591B1

公开(公告)日：2016-06-08

申请号：EP11738426.3

申请日：2011-07-13

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  LINDGREN, Lennart ,  SVENSSON, Stefan ,  CHAUVET, Jean-Michel ,  SANTOS, Antonio ,  FREDENBERG, Mikael

IPC分类号： C25D19/00 ,  H01L21/00 ,  C25D21/08 ,  H01L21/67 ,  C25D5/02 ,  C25D7/12 ,  H01L21/288 ,  C25D17/00 ,  C25D17/06 ,  C25D17/10

CPC分类号： H01L21/67051 ,  C25D5/02 ,  C25D7/123 ,  C25D17/001 ,  C25D17/004 ,  C25D17/06 ,  C25D17/10 ,  C25D21/08 ,  H01L21/67028 ,  H01L21/67034

公开(公告)号：EP2655701B1

公开(公告)日：2018-08-29

申请号：EP10795732.6

申请日：2010-12-23

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： DAINESE, Matteo ,  CUTHBERTSON, Alan ,  FREDENBERG, Mikael ,  MÖLLER, Patrik ,  VAN DEN HOEK, Wilbert ,  ARONSSON, Cecilia

IPC分类号： C25D5/02 ,  C25D7/12 ,  H01L21/3065 ,  H01L21/288

CPC分类号： C25D7/12 ,  H01L21/2885 ,  H05K3/205

摘要： A method for providing a topographical pattern on a conducting or semiconducting carrier element of an ECPR master electrode is provided. The method comprises the steps of providing an etch mask on a front side of said carrier element; and etching said front side of said carrier element according to an reactive ion etch sequence, wherein said sequence comprises i) etching a first part of a trench of said carrier element using a predetermined set of constant etch parameters, and ii) etching a second part of said trench using a repeated cycle of a predetermined set of alternating etch parameters.

公开(公告)号：EP2593592B1

公开(公告)日：2018-05-16

申请号：EP11745502.2

申请日：2011-07-13

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  UTTERBÄCK, Tomas ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  ROSÉN, Daniel ,  SVENSSON, Stefan

IPC分类号： C25D5/02 ,  C25D17/12 ,  H01L21/683 ,  H01L21/67 ,  C25D1/20 ,  C25D1/00 ,  C25D7/12

CPC分类号： H01L21/67092 ,  C25D1/003 ,  C25D1/20 ,  C25D5/02 ,  C25D7/123 ,  C25D17/12 ,  H01L21/683

摘要： Methods for separating a master electrode (101, 201) and a substrate (102, 202) in an ECPR process after printing are disclosed. The master electrode (101, 201) or the substrate (102, 202) is arranged on a first chuck (103, 104, 203, 204) and the other one of said master electrode (101, 201) and the substrate (102, 202) is arranged on a second chuck (103, 104, 203, 204. The master electrode (101, 201) and substrate (102, 202) have a planar interaction area during plating.

公开(公告)号：EP2593590B1

公开(公告)日：2017-10-04

申请号：EP11711567.5

申请日：2011-03-31

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  FREDENBERG, Mikael

IPC分类号： C25D19/00 ,  C25D5/02 ,  H01L21/67 ,  C25D7/12

CPC分类号： H01L21/6723 ,  C25D5/022 ,  C25D7/123

公开(公告)号：EP3269846B1

公开(公告)日：2019-11-06

申请号：EP17184006.9

申请日：2011-07-13

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  LINDGREN, Lennart ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  UTTERBÄCK, Thomas ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter

IPC分类号： C25D1/00 ,  C25D7/12 ,  C25D17/06 ,  H01L21/683 ,  H01L21/67 ,  C25D17/00 ,  C25D17/14 ,  H01L21/687

公开(公告)号：EP1948852B1

公开(公告)日：2018-08-29

申请号：EP06824464.9

申请日：2006-11-20

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： FREDENBERG, Mikael ,  MÖLLER, Patrik ,  WIWEN-NILSSON, Peter ,  ARONSSON, Cecilia ,  DAINESE, Matteo

IPC分类号： C25D5/02 ,  C25D21/08 ,  C25F3/14 ,  C25D7/12 ,  C25D21/11 ,  H01L21/768 ,  H01L21/288 ,  C25D5/10 ,  C25D1/00 ,  H05K3/24 ,  H05K3/46 ,  C25D5/50 ,  B81C99/00 ,  H01L21/3213 ,  H05K3/07 ,  H05K3/10

CPC分类号： C25D5/02 ,  B81C99/0085 ,  C23C14/34 ,  C23C14/3414 ,  C25D1/003 ,  C25D1/10 ,  C25D5/022 ,  C25D5/10 ,  C25D5/50 ,  C25D7/12 ,  C25D7/123 ,  C25F3/14 ,  H01L21/2885 ,  H01L21/32134 ,  H01L21/76838 ,  H01L21/76843 ,  H01L21/76852 ,  H01L21/76873 ,  H01L21/76877 ,  H01L21/76885 ,  H05K3/07 ,  H05K3/108 ,  H05K3/241 ,  H05K3/4647 ,  H05K2203/0117 ,  H05K2203/0733 ,  Y10T156/10

摘要： An electrode for forming an electrochemical cell with a substrate and a method of forming said electrode. The electrode comprises a carrier (1) provided with an insulating layer (7) which is patterned at a front side. Conducting material in an electrode layer (4) is applied in the cavities of the patterned insulating layer and in contact with the carrier. An connection layer (5) is applied at the backside of the carrier and in contact with the carrier. The periphery of the electrode is covered by the insulating material.

公开(公告)号：EP3269846A1

公开(公告)日：2018-01-17

申请号：EP17184006.9

申请日：2011-07-13

申请人： Luxembourg Institute of Science and Technology (LIST)

发明人： MÖLLER, Patrik ,  FREDENBERG, Mikael ,  LINDGREN, Lennart ,  SANTOS, Antonio ,  CHAUVET, Jean-Michel ,  UTTERBÄCK, Thomas ,  ROSÉN, Daniel ,  WIWEN-NILSSON, Peter

IPC分类号： C25D1/00 ,  C25D7/12 ,  C25D17/06 ,  H01L21/683 ,  H01L21/67 ,  C25D17/00 ,  C25D17/14 ,  H01L21/687

摘要： A chuck (500) for holding a master electrode or a substrate during an electrochemical pattern replication (ECPR) process is provided. The chuck comprises an interaction surface (506) on which the master electrode or the substrate is arranged, and attaching means for clamping said master electrode or said substrate to said interaction surface, such that said master electrode or said substrate is substantially conforming to the shape of said interaction surface (506) in a resting position. The chuck is provided with a void (504) proximally of the interaction surface (506), and a pressure channel (507) communicating with said void (504), such that an over pressure in said void (504) brings said interaction surface (506) into convex shape, such that said master electrode or said substrate arches distally in said resting position.

摘要翻译： 提供了用于在电化学图案复制（ECPR）过程期间保持主电极或衬底的卡盘（500）。 卡盘包括主电极或衬底布置在其上的相互作用表面（506），以及用于将所述主电极或所述衬底夹持到所述相互作用表面的附连装置，使得所述主电极或所述衬底基本上符合形状 所述交互表面（506）处于静止位置。 卡盘设置有在相互作用表面（506）的近侧的空隙（504）和与所述空隙（504）连通的压力通道（507），使得所述空隙（504）中的过压将所述相互作用表面 506）成凸形，使得所述主电极或所述衬底在所述静止位置向远侧拱起。