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    CAPACITANCE DETECTION CIRCUIT
    2.
    发明公开
    CAPACITANCE DETECTION CIRCUIT 审中-公开
    KAPAZITÄTSERKENNUNGSSCHALTUNG

    公开(公告)号：EP2790025A4

    公开(公告)日：2015-12-30

    申请号：EP12850761

    申请日：2012-11-19

    申请人： FUJI ELECTRIC CO LTD

    发明人： KISHIRO MASAMI

    IPC分类号： G01D5/241 ,  G01P15/08 ,  G01P15/125 ,  H05K1/02 ,  H05K3/34

    CPC分类号： G01R27/2605 ,  G01D5/2417 ,  G01P15/00 ,  G01P15/125 ,  G01P2015/082 ,  G01P2015/084 ,  H05K1/0256 ,  H05K3/3452 ,  H05K2201/09972 ,  H05K2201/10151

    摘要： The present invention provides a capacitance detection circuit that has a simple configuration and that is capable of preventing a decrease in insulation resistance caused by deterioration of hygroscopicity. The capacitance detection circuit has at least a carrier signal generating circuit (21) that supplies a carrier signal to one of movable and fixed electrodes; an operational amplifier (Q21) that has input terminals, with the other one of the movable and fixed electrodes of a physical sensor (1) being input to one of the input terminals while the other one of the terminals being connected to the ground; and a printed circuit board (30) on which the physical quantity sensor, the carrier signal generating circuit, and the operational amplifier are mounted. An insulation-secured area (Ais) on the printed circuit board is configured as a moisture absorption reduction area (A1), including at least an electrode connection part of the physical quantity sensor, an input-side connection part of the operational amplifier, and a connection part connected to the input side of the operational amplifier out of connection parts of input-side circuit components connected between the electrode connection part and the input-side connection part.

    摘要翻译： 本发明提供一种电容检测电路，其具有简单的结构，并且能够防止由吸湿性劣化引起的绝缘电阻降低。 电容检测电路至少具有将载波信号提供给可动电极和固定电极之一的载波信号发生电路（21） 具有输入端子的运算放大器（Q21），物理传感器（1）的可移动和固定电极中的另一个输入到输入端子之一，而另一个端子连接到地; 以及其上安装有物理量传感器，载波信号发生电路和运算放大器的印刷电路板（30）。 印刷电路板上的绝缘保护区域（Ais）被配置为吸湿减少区域（A1），其包括至少物理量传感器的电极连接部分，运算放大器的输入侧连接部分和 连接部分，连接在连接在电极连接部分和输入侧连接部分之间的输入侧电路部件的连接部分的运算放大器的输入侧。

    Sensitivity inspection system and sensitivity inspection method
    3.
    发明公开
    Sensitivity inspection system and sensitivity inspection method 审中-公开
    EMPFINDLICHKEITSINSPEKTIONSSYSTEM UND EMPFINDLICHKEITSINSPEKTIONSVERFAHREN

    公开(公告)号：EP2933608A1

    公开(公告)日：2015-10-21

    申请号：EP15160535.9

    申请日：2015-03-24

    申请人： Fuji Electric Co., Ltd.

    发明人： Kakinuma, Minoru ,  Nakamura, Satoru

    IPC分类号： G01C25/00 ,  G01P15/125 ,  G01P15/18 ,  G01P21/00

    CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P21/00 ,  G01P2015/082 ,  G01P2015/084

    摘要： A sensitivity inspection system 2000 is a system inspecting the sensitivity of an electrostatic capacitance sensor 10 detecting acceleration in each of a plurality of directions. An output acquisition unit 2020 acquires an output based on capacitance in each of the first and second directions from the electrostatic capacitance sensor 10 made inclined to be brought in an inspection state. Each of a first conversion unit 2040 and a second conversion unit 2060 converts the value of the output of the electrostatic capacitance sensor 10 in its own one of the first and second directions to the value of a converted output, which is equivalent to the value of the output when a reference acceleration is applied, by using the ratio of the theoretical value of the output of the electrostatic capacitance sensor 10 based on the value of the capacitance when the reference acceleration is applied to the theoretical value of the output of the electrostatic capacitance sensor 10 based on the value of the capacitance when acceleration is applied in the inspection state. This reduces the cost required for adjusting the sensitivity of the electrostatic capacitance sensor 10.

    摘要翻译： 灵敏度检查系统2000是检测在多个方向上检测加速度的静电电容传感器10的灵敏度的系统。 输出获取单元2020从倾斜成为检查状态的静电电容传感器10获取基于第一方向和第二方向的电容的输出。 第一转换单元2040和第二转换单元2060中的每一个将静电电容传感器10的输出的值在其自身的第一和第二方向上转换为转换输出的值，该值等于 通过使用静电容量传感器10的输出的理论值的比例，将基准加速度时的静电电容的值与静电电容的输出的理论值相对应地施加基准加速度时的输出 传感器10基于在检查状态下施加加速度时的电容值。 这降低了调整静电电容传感器10的灵敏度所需的成本。

    RESONANT BIAXIAL ACCELEROMETER STRUCTURE OF THE MICROELECTROMECHANICAL TYPE
    5.
    发明公开
    RESONANT BIAXIAL ACCELEROMETER STRUCTURE OF THE MICROELECTROMECHANICAL TYPE 有权
    微电子机械型共振双轴加速度计结构

    公开(公告)号：EP2643702A1

    公开(公告)日：2013-10-02

    申请号：EP11799844.3

    申请日：2011-11-25

    申请人： STMicroelectronics S.r.l. ,  Politecnico Di Milano

    发明人： COMI, Claudia ,  CORIGLIANO, Alberto ,  SIMONI, Barbara

    IPC分类号： G01P15/097 ,  G01P15/18

    CPC分类号： G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

    摘要： A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (a
    x , a
    y ); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N
    1 , N
    2 ) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).

    摘要翻译： 一种用于MEMS谐振双轴加速度计（16）的微机电检测结构（1; 1'）设有：惯性质量块（2; 2'），借助于弹性元件（8）固定在基板（30） （30）上方悬挂的方式，弹性元件（8）能够使惯性质量块（2; 2'）沿着第一检测轴线（x）和第二检测轴线 y）;响应于相应的线性外部加速度（ax，ay），所述惯性质量（2; y'）属于所述惯性质量（2; 2'）的主延伸的平面（xy）; 和至少一个第一谐振元件（10a）和一个第二谐振元件（10b），其分别沿着第一检测轴（x）和第二检测轴（y）具有各自的纵向延伸， （2; 2'）通过相应的一个弹性元件（8），以便当惯性质量分别沿着第一轴线（X 1，X 2）移动时经历相应的轴向应力（N 1，N 2） 检测（x）和第二检测轴（y）。

    Microelectromechanical inertial sensor, in particular for free-fall detection applications
    7.
    发明授权
    Microelectromechanical inertial sensor, in particular for free-fall detection applications 有权
    微机电惯性传感器，尤其是用于自由落体应用

    公开(公告)号：EP1879034B1

    公开(公告)日：2009-11-18

    申请号：EP06425485.7

    申请日：2006-07-14

    申请人： STMicroelectronics S.r.l.

    发明人： Merassi, Angelo ,  Zerbini, Sarah ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC分类号： G01P15/08 ,  G01P15/125 ,  G11B19/04

    CPC分类号： G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    摘要： Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.

    Microelectromechanical inertial sensor, in particular for free-fall detection applications
    9.
    发明公开
    Microelectromechanical inertial sensor, in particular for free-fall detection applications 有权
    微机电惯性传感器，尤其是用于自由落体应用

    公开(公告)号：EP1879034A9

    公开(公告)日：2008-05-14

    申请号：EP06425485.7

    申请日：2006-07-14

    申请人： STMicroelectronics S.r.l.

    发明人： Merassi, Angelo ,  Zerbini, Sarah ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC分类号： G01P15/08 ,  G01P15/125 ,  G11B19/04

    CPC分类号： G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    摘要： Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.

    Micro-electromechanical Inertial Sensor, in Particular for Free-fall Detection Applications
    10.
    发明公开
    Micro-electromechanical Inertial Sensor, in Particular for Free-fall Detection Applications 有权
    米克罗 - 电力机械师惯性传感器，Frefinall-Anwendungen的insbesondere

    公开(公告)号：EP1879034A1

    公开(公告)日：2008-01-16

    申请号：EP06425485.7

    申请日：2006-07-14

    申请人： STMicroelectronics S.r.l.

    发明人： Merassi, Angelo ,  Zerbini, Sarah ,  Lasalandra, Ernesto ,  Vigna, Benedetto

    IPC分类号： G01P15/08 ,  G01P15/125 ,  G11B19/04

    CPC分类号： G11B19/04 ,  G01P15/0891 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

    摘要： Described herein is an inertial sensor (1) provided with a detection structure (9, 19) sensitive to a first, a second and a third component of acceleration (a x , a y , a z ) along respective directions of detection (x, y, z), and generating respective electrical quantities as a function of said components of acceleration. The detection structure (9, 19) supplies at output a resultant electrical quantity (C) obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration (a) acting on the inertial sensor (1), given by a vector sum of the components of acceleration (a x , a y , a z ) . In particular, the detection structure (9, 19) is of a microelectromechanical type, and comprises a mobile portion (2, 12) made of semiconductor material forming with a fixed portion (8, 18) a first, a second and a third detection capacitor, and an electrical-interconnection portion (10, 20), connecting the detection capacitors in parallel; the resultant electrical quantity (C) being the capacitance obtained from said connection in parallel.

    摘要翻译： 这里描述的是具有对沿着检测方向（x，y，z）的加速度（ax，ay，az）的第一，第二和第三分量敏感的检测结构（9,19）的惯性传感器（1） ），并且产生作为所述加速度分量的函数的相应的电量。 检测结构（9,19）在输出端提供作为所述电量的组合获得的合成电量（C），并与作用在惯性传感器（1）上的合成加速度（a）的值相关，由 加速度分量（ax，ay，az）的矢量和。 特别地，检测结构（9,19）是微机电类型的，并且包括由形成有固定部分（8,18）的半导体材料制成的可移动部分（2,12），第一，第二和第三检测 电容器和电连接部分（10,20），并联连接检测电容器; 所得电量（C）是从所述连接并联获得的电容。