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公开(公告)号:EP3882969B1
公开(公告)日:2024-05-01
申请号:EP20163929.1
申请日:2020-03-18
IPC分类号: H01L25/18 , H01L21/98 , H01L23/495 , H01L23/48
CPC分类号: H01L23/49537 , H01L23/49562 , H01L23/49575 , H01L23/481 , H01L2224/3214520130101 , H01L2224/3701320130101 , H01L2224/4025720130101 , H01L24/40 , H01L2924/1306420130101 , H01L2924/1309120130101 , H01L2924/103320130101 , H01L2224/3224520130101 , H01L2224/8319220130101 , H01L2224/29120130101 , H01L2224/838420130101 , H01L2224/7326320130101 , H01L2224/3318120130101 , H01L2224/4049920130101 , H01L2224/2929420130101 , H01L2224/29320130101 , H01L2224/848420130101 , H01L2224/8380120130101 , H01L2224/8480120130101 , H01L2224/8334520130101 , H01L24/37 , H01L2224/4010620130101 , H01L2224/4010520130101 , H01L2924/18120130101 , H01L2224/9224220130101 , H01L2224/273220130101 , H01L2224/2731220130101 , H01L2224/273120130101 , H01L2224/8381520130101 , H01L2224/8481520130101 , H01L2224/922120130101 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/33 , H01L24/92 , H01L24/73 , H01L2224/7321320130101 , H01L2224/8390720130101 , H01L2224/921120130101 , H01L24/83 , H01L24/84 , H01L23/49524
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公开(公告)号:EP3234988B1
公开(公告)日:2024-10-09
申请号:EP15870960.0
申请日:2015-12-16
IPC分类号: H01L21/603 , H01L21/60 , H01L21/48 , H01L23/495 , H01L23/488
CPC分类号: H01L24/83 , H01L24/97 , H01L2224/2933920130101 , H01L2224/3224520130101 , H01L2224/8319120130101 , H01L2224/8319220130101 , H01L2224/8320320130101 , H01L2224/838420130101 , H01L2224/8398620130101 , H01L2224/9720130101 , H01L23/49524 , H01L23/49582 , H01L21/4825 , H01L2224/3701220130101 , H01L2224/4049920130101 , H01L2224/3701320130101 , H01L24/37 , H01L24/40 , H01L24/92 , H01L2224/8300120130101 , H01L2224/8343920130101 , H01L2224/8344720130101 , H01L2224/8390720130101 , H01L2224/920520130101 , H01L2224/922120130101 , H01L2224/8400120130101 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/84 , H01L2224/4010520130101 , H01L2224/4024520130101 , H01L2224/7326320130101 , H01L2224/8420320130101 , H01L2224/848420130101 , H01L24/38
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