METHOD FOR PRODUCING GROUP III ELEMENT NITRIDE CRYSTAL, GROUP III ELEMENT NITRIDE CRYSTAL, SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND APPARATUS FOR PRODUCING GROUP III ELEMENT NITRIDE CRYSTAL
    102.
    发明公开
    METHOD FOR PRODUCING GROUP III ELEMENT NITRIDE CRYSTAL, GROUP III ELEMENT NITRIDE CRYSTAL, SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND APPARATUS FOR PRODUCING GROUP III ELEMENT NITRIDE CRYSTAL 审中-公开
    生产III族元素氮化物晶体,III族元素氮化物晶体的方法,半导体装置,制造半导体装置的方法和生产III族元素氮化物晶体的装置

    公开(公告)号:EP3199670A1

    公开(公告)日:2017-08-02

    申请号:EP15855510.2

    申请日:2015-10-28

    摘要: To provide a method for producing a Group III element nitride crystal by growing it on a plane on the -c-plane side as a crystal growth plane. The present invention is a method for producing a Group III element nitride crystal, including a vapor phase growth step of growing a Group III element nitride crystal 12 on a crystal growth plane of a Group III element nitride seed crystal 11 by vapor deposition. The vapor phase growth step is a step of causing a Group III metal, an oxidant, and a nitrogen-containing gas to react with one another to grow the Group III element nitride crystal 12 or includes: a reduced product gas generation step of causing a Group III element oxide and a reducing gas to react with each other to generate a gas of a reduced product of the Group III element oxide; and a crystal generation step of causing the gas of the reduced product and a nitrogen-containing gas to react with each other to generate the Group III element nitride crystal 12. The crystal growth plane is a plane on the -c-plane side. A crystal growth temperature is 1200°C or more. In the vapor phase growth step, the Group III element nitride crystal is grown in an approximately -c direction.

    摘要翻译: 提供一种通过在-c面侧的平面上生长III族元素氮化物晶体作为晶体生长面来制造III族元素氮化物晶体的方法。 本发明是用于制造III族元素氮化物晶体的方法,其包括通过气相沉积在III族元素氮化物晶种11的晶体生长面上生长III族元素氮化物晶体12的气相生长步骤。 气相生长步骤是使III族金属,氧化剂和含氮气体彼此反应以生长III族元素氮化物晶体12的步骤,或者包括:还原产物气体生成步骤, 使III族元素氧化物与还原性气体反应而生成III族元素氧化物的还原物的气体的工序; 和使还原生成物的气体和含氮气体反应而生成III族元素氮化物晶体12的晶体生成工序。晶体生长平面是-c面侧的面。 晶体生长温度为1200℃或更高。 在气相生长步骤中,III族元素氮化物晶体在近似-c方向上生长。

    LAMINATE AND PROCESS FOR PRODUCING THE LAMINATE
    110.
    发明公开
    LAMINATE AND PROCESS FOR PRODUCING THE LAMINATE 审中-公开
    LAMINAT UND VERFAHREN ZUR HERSTELLUNG DES LAMINATS

    公开(公告)号:EP2243868A1

    公开(公告)日:2010-10-27

    申请号:EP09702588.6

    申请日:2009-01-09

    IPC分类号: C30B29/38 C30B25/18

    摘要: The present invention provides a self-supporting substrate obtained by the steps of: forming an Al-based group-III nitride thin-layer having a thickness in the range of 3-200 nm on a base substrate made of a single crystal of an inorganic substance which substantially does not decompose at 800 °C in an inert gas atmosphere and which does produce volatiles by decomposition when contacting with a reducing gas in a temperature range of 800-1600 °C, for example sapphire; forming voids along the interface between the base substrate and the Al-based group-III nitride thin-layer of the obtained laminated substrate by thermally treating the laminated substrate in a temperature range of 800-1600 °C in a reducing gas atmosphere containing ammonia gas; forming a group-III nitride single crystal thick-layer on the Al-based group-III nitride thin-layer; and separating these formed layers. The self-supporting substrate is a self-supporting substrate of the group-III nitride single crystal such as AlN, which is suitably used for forming a semiconductor device such as ultraviolet light emitting device and of which crystal plane shows a large radius of curvature.

    摘要翻译: 本发明提供一种自支撑基板,其通过以下步骤获得:在由无机的单晶制成的基底上形成厚度在3〜200nm范围内的Al系III族氮化物薄层 在800℃,在惰性气体气氛中基本上不分解的物质,当与800-1600℃的温度范围内的还原气体接触时会分解产生挥发物,例如蓝宝石; 通过在800-1600℃的温度范围内,在含有氨气体的还原性气体气氛中对叠层基板进行热处理,沿着基底基板和Al基III族氮化物薄层之间的界面形成空隙 ; 在Al系III族氮化物薄层上形成III族氮化物单晶厚层; 并分离这些形成的层。 自支撑衬底是诸如AlN的III族氮化物单晶的自支撑衬底,其适合用于形成诸如紫外光发射器件的半导体器件,并且其晶面显示出大的曲率半径。