公开(公告)号：EP3933065A1

公开(公告)日：2022-01-05

申请号：EP20766608.2

申请日：2020-02-25

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  MOROTA, Shuhei ,  TAKIMOTO, Masaru ,  ARAKI, Yoshihito ,  YOKOYAMA, Hibiki ,  FUJII, Masahiro

IPC: C23C4/12 ,  H01L21/3065 ,  H01L21/683

Abstract: A stage includes a base material having a first surface and a second surface adjacent to the first surface, and an insulating film including a plurality of particles, each of the plurality of particles having a flat surface. The flat surface is provided along the first surface and the second surface. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface, and a surface obtained by extending the first surface and a surface obtained by extending the second surface intersect at 90 degrees. The base material includes a third surface in a direction 180 degrees opposite to the first surface, and a part of the flat surface included in the insulating film is provided along the third surface.

公开(公告)号：EP3869909A1

公开(公告)日：2021-08-25

申请号：EP19873637.3

申请日：2019-10-01

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko ,  TATSUMI, Arata ,  SEKIYA, Kenji ,  AIKAWA, Naoya ,  TAKANASHI, Masaya

IPC: H05B3/48 ,  C23C14/50 ,  C23C16/46 ,  H01L21/3065 ,  H01L21/31 ,  H05B3/02

Abstract: A heater comprises a folded heater wire, a first insulator provided on the folded heater wire, a metal sheath in contact with a part of the first insulator, a first insulating member arranged in parallel to a part of a first end of the folded heater wire taken out from a first end of the metal sheath, a second insulating member arranged in parallel to a part of the first insulating member and parallel to a part of a second end of the folded heater wire taken out from the first end of the metal sheath, a third insulating member arranged in parallel to a part of the first insulating member and the second insulating member, and bundle the first insulating member and the second insulating member, and a cylindrical member arranged in parallel to a part of the metal sheath and the third insulating member.

公开(公告)号：EP3826435A1

公开(公告)日：2021-05-26

申请号：EP19838458.8

申请日：2019-07-17

Applicant: NHK Spring Co., Ltd. ,  Izumi Techno Inc.

Inventor： HANAMACHI, Toshihiko ,  MOROTA, Shuhei ,  TAKAHARA, Go ,  TAKIMOTO, Masaru ,  YOKOYAMA, Hibiki ,  MITSUDA, Hiroshi ,  ARAKI, Yoshihito ,  AJISAWA, Kengo

IPC: H05H1/24 ,  C23C28/04 ,  C25D11/04 ,  C25D11/12 ,  C25D11/18 ,  H01L21/3065 ,  C25D11/00

Abstract: A member for a plasma processing device according to the present invention includes an aluminum base material, and an oxide film formed on the aluminum base material and has a porous structure. The oxide film includes a first oxide film formed on a surface of the aluminum base material, a second oxide film formed opposite to the aluminum base material side of the first oxide film, and a third oxide film formed opposite to the first oxide film side of the second oxide film. The first oxide film is harder than the second oxide film and the third oxide film. A hole formed in each of the first oxide film, the second oxide film and the third oxide film is sealed.

公开(公告)号：EP2732967A1

公开(公告)日：2014-05-21

申请号：EP12810573.1

申请日：2012-07-11

Applicant: NHK Spring Co., Ltd.

Inventor： YAMAUCHI, Yuichiro ,  HIRANO, Satoshi ,  SAITO, Shinji ,  HANAMACHI, Toshihiko

IPC: B32B15/04 ,  B05D1/12 ,  C23C24/04

CPC classification number: B32B15/04 ,  B05D1/12 ,  C04B37/026 ,  C04B2237/121 ,  C04B2237/126 ,  C04B2237/128 ,  C04B2237/34 ,  C04B2237/341 ,  C04B2237/343 ,  C04B2237/346 ,  C04B2237/348 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/402 ,  C04B2237/706 ,  C23C24/04 ,  C23C28/02 ,  C23C28/30 ,  H01L21/4846 ,  H01L23/3735 ,  H01L23/498 ,  H01L2224/291 ,  H01L2224/32225 ,  H01L2224/83447 ,  H01L2924/1305 ,  H01L2924/13055 ,  H05K1/0306 ,  H05K3/14 ,  H05K3/38 ,  H05K2201/0341 ,  H05K2201/0355 ,  H05K2203/1344 ,  Y10T428/12056 ,  H01L2924/014 ,  H01L2924/00

Abstract: When a laminated body having a metal film formed on a ceramic base member is manufactured by using a cold spraying method, a laminated body having a high adhesion strength between a ceramic and the metal film and a method of manufacturing such a laminated body are provided. The laminated body includes a ceramic base member 10 having an insulating property, an intermediate layer 50 including metal or alloy as a main component formed on a surface of the ceramic base member 10, and a metal film layer (a circuit layer 20 and a cooling fin 40) formed on a surface of the intermediate layer 50 by accelerating a powder of metal or alloy with a gas and spraying and depositing the powder on the surface of the intermediate layer 50 as the powder is in a solid state.

Abstract translation: 当通过使用冷喷涂法制造具有形成在陶瓷基底上的金属膜的层压体时，提供陶瓷和金属膜之间的粘合强度高的层叠体以及这种层压体的制造方法。 层叠体包括具有绝缘性的陶瓷基体部件10，在陶瓷基体部件10的表面上形成的金属或合金作为主要成分的中间层50，以及金属膜层（电路层20和冷却 翅片40），其通过用气体加速金属或合金粉末而形成在中间层50的表面上，并且当粉末处于固体状态时将粉末喷涂并沉积在中间层50的表面上。

公开(公告)号：EP2592730A1

公开(公告)日：2013-05-15

申请号：EP11803638.3

申请日：2011-07-06

Applicant: NHK Spring Co., Ltd.

Inventor： HANAMACHI, Toshihiko

IPC: H02K17/16 ,  H02K15/02

CPC classification number: H02K17/165 ,  H02K15/0012 ,  H02K15/02 ,  H02K2213/03 ,  Y10T29/49012

Abstract: A squirrel-cage rotor 1 according to the present invention includes a rotor core 2 made by stacking a plurality of cores made of steel plates and having a plurality of slots 7 extending in parallel to each other, rotor bars 5 respectively inserted into the plurality of slots 7, the rotor bars 5 being made of metal and having lengths longer than the lengths of the slots inserted, two end rings 3, 4 respectively provided at end portions of the rotor core 2 and both end portions in a direction in which the plurality of slots 7 extend, the two end rings 3, 4 short-circuiting the plurality of rotor bars 5, wherein the end rings 3, 4 are formed by blowing, to the end portions, metal material powder in a solid state constituting the end rings 3, 4 at a temperature lower than a melting point of the metal material powder using heated compressed gas.

Abstract translation: 根据本发明的鼠笼式转子1包括通过堆叠由钢板制成的多个芯体并且具有彼此平行延伸的多个狭槽7而制成的转子芯体2，分别插入到多个 转子杆5由金属制成，长度大于所插入的槽的长度，两个端环3,4分别设置在转子芯2的端部和两个端部的多个 槽7延伸，两个端环3,4使多个转子杆5短路，其中端环3,4通过以构成端环的固态的方式向端部吹入金属材料粉末而形成 在比使用加热的压缩气体的金属材料粉末的熔点低的温度下进行。