公开(公告)号：EP2980554A4

公开(公告)日：2016-12-21

申请号：EP14773018

申请日：2014-03-19

申请人： ASAHI GLASS CO LTD

发明人： SENOO TOMONOBU ,  KOBAYASHI YUSUKE ,  OGAMI SATOSHI

IPC分类号： G01N21/958 ,  C03C15/00 ,  C03C17/22 ,  C03C19/00 ,  G01M11/00 ,  G01N21/88 ,  G02B1/11 ,  G02F1/1333 ,  G09F9/00

CPC分类号： G01N21/4738 ,  G01N21/59 ,  G01N21/8851 ,  G01N21/958 ,  G01N2021/8883 ,  G01N2021/9513 ,  G02B1/11 ,  G02F1/1309

公开(公告)号：EP2631710A1

公开(公告)日：2013-08-28

申请号：EP13168475.5

申请日：2010-10-04

申请人： Nitto Denko Corporation

发明人： Nakazono, Takuya ,  Umemoto, Seiji ,  Shimanoe, Fumihito

IPC分类号： G02F1/1335 ,  G01N21/896

CPC分类号： G02F1/133528 ,  G01N21/21 ,  G01N21/8914 ,  G01N21/896 ,  G01N2021/9513 ,  G02F1/1303 ,  G02F2203/69 ,  Y10T156/1056 ,  Y10T156/1057

摘要： The present invention provides an information storage-readout-calculation system (1) for use in a continuous manufacturing system of liquid-crystal display elements, comprising information storage medium for storing information (800) of defects detected through a preliminary inspection of a continuous polarizing composite film included in a continuous optical film laminate, a roll (R) of a continuous inspected optical film laminate being provided with identification means and a slitting position calculation means (420) for determining defective-polarizing-sheet slitting positions to define defect-containing polarizing sheets having defects and normal-polarizing-sheet slitting positions to define defect-free polarizing sheets by using defect position information read out from the information storage medium based on the identification means, an, a method for manufacturing the information storage-readout-calculation system.

摘要翻译： 本发明提供的信息存储读出运算系统（1），用于在液晶显示元件的连续制造系统中使用，其特征在于信息存储介质，用于存储通过连续偏振的初步检查而检测出的缺陷的信息（800） 复合膜包括在连续状光学膜叠层，完成检查的连续光学膜叠层的卷（R）设有识别装置和一个切断位置运算机构（420），用于确定的采矿缺陷-偏光片分切的位置，以限定具有缺陷的 具有缺陷和正常偏光片分切的位置通过使用缺陷位置信息来定义的无缺陷偏振片偏振片基于所述识别装置，一个，用于制造该信息存储读出运算的方法从信息存储介质读出 系统。

公开(公告)号：EP2482059A2

公开(公告)日：2012-08-01

申请号：EP11169205.9

申请日：2011-06-09

申请人： Kuo Cooper S. K.

发明人： Kuo, Cooper S.K. ,  Tsai, Ron ,  Lee, Steven

IPC分类号： G01N21/95

CPC分类号： G01N21/95 ,  G01N2021/9513

摘要： An apparatus for optical inspection comprises a platform extending in a first direction, a transmitting unit for transporting at least one carrier in the first direction from an input port to an output port thereof, each of the at least one carrier to support one of at least one object to be inspected, a first detector disposed above the platform and extending in a second direction orthogonal to the first direction for inspecting the at least one object on the at least one carrier, the first detector including a first scanner extending in the second direction between the input port and the output port, and a first roller set between the first scanner and the input port to apply force onto a surface of each of the at least one object.

摘要翻译： 一种用于光学检测的装置包括沿第一方向延伸的平台，用于将第一方向上的至少一个载体从其输入端口输出到其输出端口的传送单元，用于至少一个载体中的至少一个载体 一个要检查的物体，第一检测器，设置在平台上方并且沿与第一方向正交的第二方向延伸，用于检查至少一个载体上的至少一个物体，第一检测器包括沿第二方向延伸的第一扫描器 在所述输入端口和所述输出端口之间，以及设置在所述第一扫描仪和所述输入端口之间的第一辊，以将力施加到所述至少一个物体中的每一个的表面上。

公开(公告)号：EP2372349A3

公开(公告)日：2012-05-23

申请号：EP10163863.3

申请日：2010-05-26

申请人： Kuo Cooper S. K.

发明人： Kuo, Cooper S. K. ,  Tsai, Ron ,  Lee, Steven

IPC分类号： G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC分类号： G01N21/88 ,  G01N21/8851 ,  G01N21/95 ,  G01N21/958 ,  G01N2021/9513 ,  G02F1/1309

摘要： A support mechanism (20) includes a first work frame (251) to provide a first scanning area for a first scanner (38), a first frame (21) to support a first panel (210), the first frame pivotably coupled (26) to a first side of the first work frame (251) so that the first frame (21) is rotatable about the first side of the first work frame (251) between a folded position that the first frame is folded toward the first scanning area and an unfolded position that the first frame is away from the first scanning area, and a second frame (22) to support a second panel (220), the second frame pivotably coupled (26) to a second side of the first work frame (251) so that the second frame (22) is rotatable about the second side of the first work frame (251) between a folded position that the second frame is folded toward the first scanning area and an unfolded position that the second frame is away from the first scanning area, wherein the first scanning area allows the first scanner (38) to scan across one of the first and second frames when the one of the first and second frames is at the folded position while the other one of the first and second frames is at the unfolded position.

公开(公告)号：EP1750087B1

公开(公告)日：2011-12-21

申请号：EP05745755.8

申请日：2005-06-02

申请人： Asahi Glass Company, Limited

发明人： SONDA, Yoshiyuki c/o Asahi Glass Company, Ltd. ,  OTO, Kimiaki c/o Asahi Glass Company, Ltd. ,  KATO, Munehisa c/o Asahi Glass Company, Ltd. ,  KIYAMA, Atsushi c/o Asahi Glass Fine Techno Co,Ltd.

IPC分类号： G01B11/25

CPC分类号： G01N21/896 ,  G01N2021/9513

摘要： A method and an apparatus are provided for accurately inspecting characteristics of a front surface shape by eliminating influences of a rear surface reflection image by a low-cost apparatus constitution. First, a stripe pattern (1), which has a light and dark pattern and in which a reflection image made by being reflected by a front surface of a transparent board-shaped body (3) (object to be inspected) and a reflection image made by being reflected by a rear surface of the transparent board-shaped body are set to separate by an image signal obtained by image pickup, is decided, as a stripe pattern suitable for the transparent board-shaped body. Then, by using the decided stripe pattern (1), the front surface shape of the transparent board-shaped body (3) is evaluated by image analysis by using only the reflection image made by being reflected by the front surface of the transparent board-shaped body (3) of the stripe pattern (1).

公开(公告)号：EP2278270A2

公开(公告)日：2011-01-26

申请号：EP10014269.4

申请日：2005-06-02

申请人： ASAHI GLASS COMPANY, LIMITED

发明人： Sonda, Yoshiyuki ,  Oto, Kimiaki ,  Kato, Munehisa ,  Kiyama, Atsushi

IPC分类号： G01B11/25

CPC分类号： G01N21/896 ,  G01N2021/9513

摘要： The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object 3 (object to be inspected), a stripe pattern 1 having a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, the reflection image of the stripe pattern 1 produced by the transparent plate-shaped object 3 is selected and the front surface shape of the transparent plate-shaped object 3 is evaluated by an image analysis using the selected reflection image.

摘要翻译： 对本发明的检查方法和检查装置，其提供可以去除后表面反射图像的影响，并通过在廉价的装置结构检查以良好的精度的前表面形状的特性。 首先，作为条纹图案适合于透明板形物体3（待检查物体），条纹图案具有1亮暗图形配置成使得没有其反射图像通过透明板状的前表面产生的 通过透明板状对象的后表面上产生形状的物体和它的反射图像在由图像捕获获得的图像信号是分开的，是确定性的开采。 有后，通过透明板状物体3产生的条纹图案1的反射图像被选择和透明板状物体3的前表面的形状是由图像分析使用所选择的反射图像进行评估。

公开(公告)号：EP2097713A2

公开(公告)日：2009-09-09

申请号：EP07871735.2

申请日：2007-12-21

申请人： Zygo Corporation

发明人： DE LEGA, Xavier Colonna ,  DE GROOT, Peter

IPC分类号： G01B11/00

CPC分类号： G01B9/02043 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/70 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/9513

摘要： An apparatus is disclosed which includes an interferometry system configured to operate in a first mode to produce a first set of multiple interferometry signals corresponding to different illumination angles of a test object by test light and in a second mode produce a second set of multiple interferometry signals corresponding to different surface locations of a test object. An electronic processor coupled to the interferometry system is configured to receive the first set of interferometry signals and programmed to compare information derivable from the first set of multiple interferometry signals to information corresponding to multiple models of the test object to determine information related to one or features of the test object, and output the information. In some embodiments, the features include an under-resolved feature.

公开(公告)号：EP1359460B1

公开(公告)日：2005-12-14

申请号：EP03009542.6

申请日：2003-04-28

申请人： Optrex Corporation ,  OPTREX EUROPE GmbH

发明人： Ozeki, Masao Asahi Glass Comp. Ltd. ,  Fertig, Werner ,  Lauenstein, Christian

IPC分类号： G02F1/13363 ,  G01B11/06

CPC分类号： G01B11/0675 ,  G01N21/896 ,  G01N2021/9513 ,  G02F1/133636 ,  G02F2203/64

公开(公告)号：EP1599722A2

公开(公告)日：2005-11-30

申请号：EP04717517.9

申请日：2004-03-04

申请人： Corning Incorporated

发明人： GAHAGAN, Kevin ,  HILTNER, Jason

IPC分类号： G01N21/896

CPC分类号： G01N21/958 ,  G01N21/41 ,  G01N2021/9513

摘要： Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm.

公开(公告)号：EP1371994A3

公开(公告)日：2004-03-03

申请号：EP03013120.5

申请日：2003-06-11

申请人： Baccini, Gisulfo

发明人： Baccini, Gisulfo

IPC分类号： G01R1/073

CPC分类号： G01B5/0014 ,  G01B11/306 ,  G01N21/956 ,  G01N21/958 ,  G01N2021/9513

摘要： Apparatus to measure and control large-size plane elements (20), comprising a fixed base (11) having a horizontal supporting plane (17) on which the plane elements (20) are able to be arranged and horizontal guides (21, 22) arranged parallel to a first horizontal axis (X), a supporting structure (30) able to slide on the horizontal guides (21, 22), a slider (50) able to slide on the supporting structure (30) along a second horizontal axis (Y) perpendicular to the first horizontal axis (X), and a measurement and control unit (60) mounted on the slider (50) in order to slide in the two orthogonal directions (X-Y) with respect to the horizontal supporting plane (17). The horizontal guides comprise at least a first pair of bars (21) arranged on one side of the horizontal supporting plane (17), parallel to the first axis (X) and at a determinate distance (d) from each other, so as to define a first horizontal compartment inside which a guide element (37) of the supporting structure (30) is arranged.