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    OPTICAL POLARISATION MODULATION AND DETECTION APPARATUS AND DETECTION METHOD
    13.
    发明公开
    OPTICAL POLARISATION MODULATION AND DETECTION APPARATUS AND DETECTION METHOD 有权

    公开(公告)号：EP3093636A4

    公开(公告)日：2017-11-29

    申请号：EP15733176

    申请日：2015-01-06

    Applicant: GRADUATE SCHOOL SHENZHEN TSINGHUA UNIV

    Inventor： MA HUI ,  CHANG JINTAO ,  ZENG NAN ,  HE YONGHONG ,  LIAO RAN ,  SUN SHUQING ,  HE HONGHUI ,  CHEN ZHENHUA

    IPC: G01J4/00

    CPC classification number: G01J4/04

    Abstract: Disclosed are a light polarization state detection apparatus, a detection method and a light polarization state modulation method. The light polarization state detection apparatus comprises a lens with a variable birefringence feature as an optical phase modulator, a polarizer as a SOP analyzer, a plurality of common lenses and a CCD as imaging devices, and a data processing and displaying unit. The SOP detection apparatus uses special birefringence distribution of birefringence optical elements such as a GRIN lens to obtain the Stokes parameters of light to be measured by CCD in a single frame imaging, and can rapidly accurately measure the SOP. The SOP detection apparatus is simple in structure, lower in cost without containing any motion parts and electrical modulation devices, and is a fully static full Stokes parameters SOP detection apparatus. The light polarization state modulation apparatus comprises a GRIN lens with a variable birefringence feature. The modulation method is continuous in each position of a modulation aperture, rich in modulation variety and low in cost.

    METHOD AND APPARATUS FOR MEASURING PARAMETERS OF OPTICAL ANISOTROPY
    15.
    发明公开
    METHOD AND APPARATUS FOR MEASURING PARAMETERS OF OPTICAL ANISOTROPY 审中-公开
    VERFAHREN UND VORRICHTUNG ZUR PARAMETERMUNGUNG VON OPTISCHER ANISOTROPIE

    公开(公告)号：EP3052908A4

    公开(公告)日：2017-05-31

    申请号：EP14850913

    申请日：2014-10-03

    Applicant: AXOMETRICS INC

    Inventor： SMITH MATTHEW H ,  ZOU YANG

    IPC: G01J4/00

    CPC classification number: G01N21/21 ,  G01N21/19 ,  G01N21/23

    Abstract: Methods and systems are provided to measure the optical anisotropy properties of a film on glass or other substrates. This technique is suitable for production environments, and is not strongly affected by the TFT or CF active area on LCD panels, even for very high pixel density displays. A method is provided for measuring a magnitude and orientation of optical anisotropy. These methods and systems include an optical anisotropy measurement apparatus for measuring anisotropic materials in a reflection or transmission configuration. The methods and systems may measure a Mueller matrix, diattentuation orientation, or retardance of a sample at one or more rotation angles to calculate anisotropic magnitude and orientation.

    Abstract translation: 提供了用于测量玻璃或其他基底上的膜的光学各向异性特性的方法和系统。 该技术适用于生产环境，即使对于非常高像素密度的显示器，也不受LCD面板上的TFT或CF有源区域的强烈影响。 提供了一种用于测量光学各向异性的大小和取向的方法。 这些方法和系统包括用于测量反射或透射配置中的各向异性材料的光学各向异性测量设备。 该方法和系统可以测量一个或多个旋转角度下样品的穆勒矩阵，扩散取向或延迟，以计算各向异性量值和取向。

    ELLIPSOMETRY SYSTEM
    18.
    发明公开
    ELLIPSOMETRY SYSTEM 审中-公开
    ELLIPSOMETRIESYSTEM

    公开(公告)号：EP2733477A4

    公开(公告)日：2015-04-01

    申请号：EP12811812

    申请日：2012-07-09

    Applicant: UNIV UTSUNOMIYA

    Inventor： YATAGAI TOYOHIKO ,  ABRAHAM J CENSE

    IPC: G01N21/17 ,  A61B3/10 ,  G01B9/02 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G01N21/47 ,  G02B5/04 ,  G02B5/30

    CPC classification number: G01N21/211 ,  A61B3/102 ,  G01B9/02044 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J4/00 ,  G01N21/4795 ,  G02B5/04 ,  G02B5/3083

    Abstract: An ellipsometry system and a detection unit thereof are capable of achieving miniaturization and price reduction associated therewith. The ellipsometry system includes the detection unit that: has an optical polarization element; separates an interference polarization beam obtained by causing the object-reflected polarization beam and reference reflected polarization beam to interfere with each other into a plurality of interference polarization beams on a wavelength basis; and detects the respective separated polarization components in each wavelength. The optical polarization element: has a birefringence characteristic including a first refractive index and a second refractive index; receives the separated interference polarization beams of the respective wavelengths in a wavelength order and in a parallel manner; separates the separated interference polarization beam of each wavelength, on a polarization component basis, while transmitting the same, and outputs the respective separated polarization components in each wavelength in the same direction but along different optical axes.

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