VIBRATING TYPE PRESSURE SENSOR
    21.
    发明公开
    VIBRATING TYPE PRESSURE SENSOR 有权
    振动型压力传感器

    公开(公告)号:EP1471340A4

    公开(公告)日:2006-09-06

    申请号:EP03701810

    申请日:2003-01-20

    IPC分类号: G01L9/00

    CPC分类号: G01L9/0017

    摘要: A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.

    Gyroscope and input device
    24.
    发明公开
    Gyroscope and input device 有权
    Kreisel und Eingabevorrichtung

    公开(公告)号:EP1099930A2

    公开(公告)日:2001-05-16

    申请号:EP00309009.9

    申请日:2000-10-13

    IPC分类号: G01C19/56 G01P9/04

    CPC分类号: G01C19/5628 G01C19/5621

    摘要: A gyroscope of the present invention includes a tuning fork having three legs and a support portion, an upper glass substrate and a lower glass substrate, between which the tuning fork is interposed, driving electrodes respectively arranged on the two glass substrates so that the driving electrodes are opposed to a base portion of each leg, six movable protruded detection electrodes formed on each of the top surface of and the underside of an end portion of each leg, and six stationary detection electrodes on each of the upper and lower glass substrates so that the six stationary detection electrodes are respectively opposed to the six movable detection electrodes. The gyroscope of the present invention thus features compact design, high sensitivity, and low required driving voltage.

    摘要翻译: 本发明的陀螺仪包括具有三个支腿的音叉和支撑部分,上玻璃基板和下玻璃基板,其间插有音叉,分别布置在两个玻璃基板上的驱动电极,使得驱动电极 与每个腿的基部相对,形成在每个腿的端部的顶部表面和下侧中的每一个上的六个可移动的突出检测电极,以及每个上部和下部玻璃基板上的六个固定检测电极,使得 六个固定检测电极分别与六个可动检测电极相对。 因此,本发明的陀螺仪具有紧凑的设计,高灵敏度和低要求的驱动电压。

    Tuning fork gyroscope
    25.
    发明公开
    Tuning fork gyroscope 审中-公开
    Stimmgabelkreisel

    公开(公告)号:EP1050743A2

    公开(公告)日:2000-11-08

    申请号:EP00303423.8

    申请日:2000-04-25

    IPC分类号: G01C19/56

    CPC分类号: G01C19/5607

    摘要: The invention provides a gyroscope that brings about the miniaturization of a device, improvement of detection sensitivity, and reduction of driving voltage. A gyroscope of the present invention is provided with a tuning fork (2) formed of conductive material having a plurality of legs and a support, a top glass substrate (5) and a bottom glass substrate (6) for holding the tuning fork in-between, a plurality of driving electrodes (3) for driving the plurality of legs in capacitance coupling with the legs, and a plurality of detecting electrodes (4), each detecting electrode is disposed so as to face to the end face of each leg in the extending direction corresponding to each leg.

    摘要翻译: 本发明提供一种实现装置小型化的陀螺仪,提高检测灵敏度,降低驱动电压。 本发明的陀螺仪设置有由具有多个支腿和支撑体的导电材料形成的音叉(2),顶部玻璃基板(5)和用于保持音叉的底部玻璃基板(6) 在多个用于驱动与脚电容耦合的多个支腿的驱动电极(3)和多个检测电极(4)之间,每个检测电极设置成面对每个支腿的端面 对应于每条腿的延伸方向。

    Active slender tubes and method of making the same
    26.
    发明公开
    Active slender tubes and method of making the same 有权
    活动细长管及其制造方法

    公开(公告)号:EP1010440A2

    公开(公告)日:2000-06-21

    申请号:EP99124074.8

    申请日:1999-12-10

    IPC分类号: A61M25/01 A61M25/00 A61B1/00

    摘要: An active slender tube as implemented as a catheter, guide wire, or any other medical or non-medical micro-mechanical or -system or system's active micro-component is disclosed that has a simple structure which facilitates the active slender tube to be reduced in diameter and with the capability of being multi-functionalized. The slender tube is provided in its distal, active end portion in the form of "J" with a bending, a torsionally rotating, an extending and retracting and/or a stiffness control mechanism. These mechanisms are adapted to bend, torsionally rotate, extend/retract and adjust stiffness of, the active end portion, respectively, with precision. Each mechanism comprises an outer skeleton including a liner coil spring, and an SMA (shape memory alloy) made coil actuator disposed inside of the liner coil coaxially therewith and fastened thereto. In the extending and retracting mechanism, the SMA made actuator is fastened to the liner coil spring upon deformation to have a length varied from a length of the SMA made actuator in its natural state. In the torsionally rotating mechanism, the SMA made actuator is fastened to the liner coil spring upon deformation to have a coil diameter torsionally varied from a coil diameter of the SMA made actuator in its natural shape memory step. The stiffness control mechanism has an SMA made actuator in its natural shape memory state.

    摘要翻译: 公开了一种作为导管,引导线或任何其他医疗或非医疗微机械或系统或系统的有源微型部件实施的有源细长管,其具有简单的结构,其便于有源细长管减少 直径并且具有多功能化的能力。 细长管以其形式为“J”的远端有源端部以弯曲,扭转,伸缩和/或刚度控制机构提供。 这些机构适于分别精确地弯曲,扭转,伸展/缩回和调整活动端部的刚度。 每个机构包括外部骨架和SMA(形状记忆合金)制成的线圈致动器,所述线圈致动器布置在所述衬套线圈的内部并且与所述线圈致动器同轴并固定在所述外部骨架上。 在伸缩机构中,SMA制造的致动器在变形时固定在衬套螺旋弹簧上,其长度与SMA制造的致动器在其自然状态下的长度不同。 在扭转旋转机构中,SMA制造的致动器在变形时被紧固到衬套螺旋弹簧,以具有与SMA形致动器的线圈直径在其自然形状记忆步骤中扭转变化的线圈直径。 刚度控制机构具有形状记忆状态的SMA制造的致动器。

    PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME
    27.
    发明公开
    PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME 有权
    压力传感器和相同的方法

    公开(公告)号:EP0997721A1

    公开(公告)日:2000-05-03

    申请号:EP98954712.0

    申请日:1998-11-17

    申请人: ESASHI, Masayoshi

    IPC分类号: G01L9/00

    CPC分类号: G01L9/0077

    摘要: A reflective type movable diaphragm unit 2 is formed on a groove 26-carrying silicon substrate 3, and a bonding agent layer serving also as a spacer 24 is provided around the diaphragm unit, this spacer 24 being bonded to a half mirror layer 11 of an optical fiber 1 with a cross-sectionally semicircular diaphragm portion 25 further provided on the diaphragm unit 2, whereby a pressure sensor is formed.

    Recording/reproducing head, method of producing the same, recording apparatus and reproducing apparatus
    28.
    发明公开
    Recording/reproducing head, method of producing the same, recording apparatus and reproducing apparatus 审中-公开
    记录/再现头的方法,其生产,记录装置和再生装置

    公开(公告)号:EP1542222A2

    公开(公告)日:2005-06-15

    申请号:EP04029368.0

    申请日:2004-12-10

    IPC分类号: G11B9/00 G11B9/02

    摘要: A recording / reproducing head (100) is intended to perform at least one of a record operation of recording information onto a dielectric recording medium (20) and a reproduction operation of reproducing the information from the dielectric recording medium. The recording / reproducing head (100) is provided with: a support member (130) which extends in a longitudinal direction; a projection portion (110) which is mounted on the support member such that a tip of the projection portion faces the dielectric recording medium; and a conductive layer (120) which covers a part other than at least the tip out of the projection portion, the projection portion containing a harder material than that of the conductive layer.

    摘要翻译: 的记录/再现头(100)是为了进行信息的记录操作的记录中的至少一个到介电记录介质(20)和业务再现来自所述介电记录介质中的信息的再现。 记录/再现头(100)上设置有:其中在纵向方向上延伸的支撑构件(130); 其被安装在支撑构件搜索的突出部(110)所有做的突起部的前端面对电介质记录介质上; 和覆盖至少比前端以外的部分出了突出部的导电层(120),将含有比导电层的更硬的材料的突出部。

    Recording / reproducing head, recording / reproducing head array, method of producing the same, and recording apparatus and reproducing apparatus
    29.
    发明公开
    Recording / reproducing head, recording / reproducing head array, method of producing the same, and recording apparatus and reproducing apparatus 审中-公开
    记录/再现头中,记录/再现头组件,制造过程中,和记录/再现装置,

    公开(公告)号:EP1533804A1

    公开(公告)日:2005-05-25

    申请号:EP04027531.5

    申请日:2004-11-19

    IPC分类号: G11B9/08 G11B11/08

    摘要: A recording / reproducing head (100) for performing at least one of a record operation of recording information onto a dielectric recording medium and a reproduction operation of reproducing the information from the dielectric recording medium (20), the recording / reproducing head provided with: a support member (130) which extends in a longitudinal direction; and a projection portion (110) which is mounted on the support member such that a tip of the projection portion faces the dielectric recording medium, the support member having a rounded shape at a surface thereof on a side facing the dielectric recording medium, at least in a mounted portion on which the projection portion is mounted.

    摘要翻译: 用于执行记录操作的记录信息中的至少一个到介电记录介质和再现来自所述介电记录介质(20)中的信息的再现手术的记录/再现头(100)时,记录/再现头设置有: 的支撑构件(130)其中在纵向方向上延伸; 并且其被安装在支撑构件搜索的突出部(110)所有做的突起部的前端面对电介质的记录介质,其具有在面向所述介电记录介质中,至少其一侧处的表面的圆形形状的支撑构件, 在被安装部上的突起部被安装。

    VIBRATING TYPE PRESSURE SENSOR
    30.
    发明公开
    VIBRATING TYPE PRESSURE SENSOR 有权
    DRUCKSENSOR DES VIBRATIONSTYPS

    公开(公告)号:EP1471340A1

    公开(公告)日:2004-10-27

    申请号:EP03701810.8

    申请日:2003-01-20

    IPC分类号: G01L9/00

    CPC分类号: G01L9/0017

    摘要: A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for light transmission for changing an internal space in which the vibrator (12) is present into a vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the vacuum chamber (10), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed A forced vibration means (57) can also be operated by piezo driving and electrostatic driving from the outside without generating noise.

    摘要翻译: 传感器由布置在隔膜(4)的前表面和可渗透部分(20)的振动器(12)组成。 渗透部分通过闭合形成在围绕振动器的壁(8)中的开口(8a)来改变容纳振动器的真空室中的内部空间。