摘要:
A high-sensitive and high-accuracy vibrating type pressure sensor 1 allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm 4 for receiving a fluid pressure P on a rear surface side, the vibrator 12 formed on the front surface side of the pressure receiving diaphragm 4, a wall body 8 disposed so as to surround the periphery of the vibrator 12, and a permeable part 20 for light transmission for changing an internal space in which the vibrator 12 is present into a vacuum chamber 10 by closing an opening part 8a in the wall body 8, whereby, since the diaphragm 4 is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator 12 and the vibrator is isolatedly disposed in the vacuum chamber 10, mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator 12 is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed. A forced vibration means 57 can also be operated by piezo driving and electrostatic driving from the outside without generating noise.
摘要:
A gyroscope of the present invention includes a tuning fork having three legs and a support portion, an upper glass substrate and a lower glass substrate, between which the tuning fork is interposed, driving electrodes respectively arranged on the two glass substrates so that the driving electrodes are opposed to a base portion of each leg, six movable protruded detection electrodes formed on each of the top surface of and the underside of an end portion of each leg, and six stationary detection electrodes on each of the upper and lower glass substrates so that the six stationary detection electrodes are respectively opposed to the six movable detection electrodes. The gyroscope of the present invention thus features compact design, high sensitivity, and low required driving voltage.
摘要:
The invention provides a gyroscope that brings about the miniaturization of a device, improvement of detection sensitivity, and reduction of driving voltage. A gyroscope of the present invention is provided with a tuning fork (2) formed of conductive material having a plurality of legs and a support, a top glass substrate (5) and a bottom glass substrate (6) for holding the tuning fork in-between, a plurality of driving electrodes (3) for driving the plurality of legs in capacitance coupling with the legs, and a plurality of detecting electrodes (4), each detecting electrode is disposed so as to face to the end face of each leg in the extending direction corresponding to each leg.
摘要:
An active slender tube as implemented as a catheter, guide wire, or any other medical or non-medical micro-mechanical or -system or system's active micro-component is disclosed that has a simple structure which facilitates the active slender tube to be reduced in diameter and with the capability of being multi-functionalized. The slender tube is provided in its distal, active end portion in the form of "J" with a bending, a torsionally rotating, an extending and retracting and/or a stiffness control mechanism. These mechanisms are adapted to bend, torsionally rotate, extend/retract and adjust stiffness of, the active end portion, respectively, with precision. Each mechanism comprises an outer skeleton including a liner coil spring, and an SMA (shape memory alloy) made coil actuator disposed inside of the liner coil coaxially therewith and fastened thereto. In the extending and retracting mechanism, the SMA made actuator is fastened to the liner coil spring upon deformation to have a length varied from a length of the SMA made actuator in its natural state. In the torsionally rotating mechanism, the SMA made actuator is fastened to the liner coil spring upon deformation to have a coil diameter torsionally varied from a coil diameter of the SMA made actuator in its natural shape memory step. The stiffness control mechanism has an SMA made actuator in its natural shape memory state.
摘要:
A reflective type movable diaphragm unit 2 is formed on a groove 26-carrying silicon substrate 3, and a bonding agent layer serving also as a spacer 24 is provided around the diaphragm unit, this spacer 24 being bonded to a half mirror layer 11 of an optical fiber 1 with a cross-sectionally semicircular diaphragm portion 25 further provided on the diaphragm unit 2, whereby a pressure sensor is formed.
摘要:
A recording / reproducing head (100) is intended to perform at least one of a record operation of recording information onto a dielectric recording medium (20) and a reproduction operation of reproducing the information from the dielectric recording medium. The recording / reproducing head (100) is provided with: a support member (130) which extends in a longitudinal direction; a projection portion (110) which is mounted on the support member such that a tip of the projection portion faces the dielectric recording medium; and a conductive layer (120) which covers a part other than at least the tip out of the projection portion, the projection portion containing a harder material than that of the conductive layer.
摘要:
A recording / reproducing head (100) for performing at least one of a record operation of recording information onto a dielectric recording medium and a reproduction operation of reproducing the information from the dielectric recording medium (20), the recording / reproducing head provided with: a support member (130) which extends in a longitudinal direction; and a projection portion (110) which is mounted on the support member such that a tip of the projection portion faces the dielectric recording medium, the support member having a rounded shape at a surface thereof on a side facing the dielectric recording medium, at least in a mounted portion on which the projection portion is mounted.
摘要:
A high-sensitive and high accuracy vibrating type pressure sensor (1) allowing a corrosive gas pressure to be directly applied thereto, having a heat resistance, and having no room for mixing of noise into a vibrator, comprising a stainless steel pressure receiving diaphragm (4) for receiving a fluid pressure P on a rear surface side, the vibrator (12) formed on the front surface side of the pressure receiving diaphragm (4), a wall body (8) disposed so as to surround the periphery of the vibrator (12), and a permeable part (20) for light transmission for changing an internal space in which the vibrator (12) is present into a vacuum chamber (10) by closing an opening part (8a) in the wall body (8), whereby, since the diaphragm (4) is formed of the stainless steel with corrosion resistance, the sensor can also be applied to corrosive fluid, since circuit wiring is eliminated from the vibrator (12) and the vibrator is isolatedly disposed in the vacuum chamber (10), mixing of electromagnetic noise can be eliminated, and since the resonance frequency fn of the vibrator (12) is performed by optical measurement in the state of non-contact, extremely high-sensitive and high-accuracy detection can be performed A forced vibration means (57) can also be operated by piezo driving and electrostatic driving from the outside without generating noise.