公开(公告)号：EP0441311A2

公开(公告)日：1991-08-14

申请号：EP91101503.0

申请日：1991-02-05

申请人： HITACHI, LTD.

发明人： Hasegawa, Tsuyoshi, Hitachi Daiyon Kyoshinryo B208 ,  Hosaka, Sumio ,  Hosoki, Shigeyuki ,  Honda, Yukio ,  Ichikawa, Masakazu

IPC分类号： H01J37/252 ,  G01N27/00

CPC分类号： G01Q10/06 ,  G01Q20/00 ,  G01Q30/16 ,  G01Q70/02 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/873

摘要： An atomic force microscope is provided for sensing displacement of a cantilever (1) based on a scanning tunneling microscopy. Concretely, the present invention comprises a first microscope having a cantilever (1) for sensing atomic force or magnetic force and an STM (Scanning Tunneling Microscope) functioned as a second microscope for sensing tunneling current and keeping the tunneling current constant. It results in the microscope being able to carry out atomic force microscopy and tunneling microscopy without changing a single STM tip (1b) and to control the minimal force between the sample (3) and the tip (1b) to be constant.

摘要翻译： 提供了一种用于感测基于扫描隧道显微镜的悬臂（1）位移的原子力显微镜。 具体地，本发明包括具有用于感测原子力或磁力的悬臂（1）的第一显微镜和用作感测隧道电流并保持隧道电流恒定的第二显微镜的STM（扫描隧道显微镜）。 这导致显微镜能够进行原子力显微镜和隧道显微镜，而不改变单个STM尖端（1b）并且控制样品（3）和尖端（1b）之间的最小力保持恒定。

公开(公告)号：EP0364101A2

公开(公告)日：1990-04-18

申请号：EP89309231.2

申请日：1989-09-12

申请人： HITACHI, LTD.

发明人： Takagi, Kazumasa ,  Madokoro, Yuuichi ,  Fukazawa, Tokuumi ,  Miyauchi, Katsuki ,  Kawanami, Yoshimi ,  Aida, Toshiyuki ,  Honda, Yukio ,  Futamoto, Masaaki ,  Hiratani, Masahiko

IPC分类号： H01L39/22 ,  H01L39/24

CPC分类号： H01L39/2496 ,  Y10S505/701 ,  Y10S505/702 ,  Y10S505/729 ,  Y10T29/41

摘要： To form a weak-link Josephson junction of the type employing a thin film of an oxide superconductor, a crystal grain boundary produced reflecting an artificial crystal defect is utilized as the weak-link junction. The crystal grain boundary (45) is formed by a method in which atoms of different species are deposited on a predetermined part (42) of the surface of a substrate (40) the predetermined part of the surface of a substrate (40) is disturbed, or parts of different crystal face orientations are formed at the surface of a substrate (40). Then a superconducting thin film (44) is epitaxially grown on the substrate (43). Alternatively the predetermined part of the superconducting thin film (44) epitaxially grown on a substrate (43) is diffused with atoms of different species hampering a superconducting or the predetermined part of the superconductivity thin film (44) is disturbed, the superconducting thin film (44) is then annealed,
Also. a superconducting device employing the weak-link junction is disclosed.

摘要翻译： 为了形成型采用氧化物超导体薄膜的弱连接的约瑟夫逊结，晶粒边界产生的反射人工晶体缺陷被用作弱连接结。 晶界（45）是由在不同种类的哪个原子的方法形成沉积在基片的表面（40）一个基片的表面（40）的预定部分的预定部分（42）是不安 不同晶面取向的，或部分在基片（40）的表面上形成。 然后超导薄膜（44）被外延生长在衬底上（43）。 可替换地，超导薄膜（44）外延生长在一个基板（43）的预定部分与不同物种妨碍超导或超导薄膜的预定部分的原子扩散的（44）被打乱，超导薄膜（ 44）然后退火，从而。 超导器件用人弱连接结游离缺失盘。

公开(公告)号：EP0551814B1

公开(公告)日：1997-04-02

申请号：EP93100055.8

申请日：1993-01-05

申请人： HITACHI, LTD.

发明人： Hosaka, Sumio ,  Kikugawa, Atsushi ,  Honda, Yukio ,  Koyanagi, Hajime ,  Hosoki, Shigeyuki ,  Hasegawa, Tsuyoshi

IPC分类号： G01B7/34 ,  G01N27/00

CPC分类号： G01Q20/02 ,  G01Q60/02 ,  G01Q60/08 ,  G01Q60/26 ,  G01Q60/32 ,  G11B5/00 ,  G11B9/1409 ,  G11B11/007 ,  G11B2005/0002 ,  G11B2005/0005 ,  Y10S977/849 ,  Y10S977/851 ,  Y10S977/852 ,  Y10S977/873 ,  Y10S977/953

公开(公告)号：EP0596494A2

公开(公告)日：1994-05-11

申请号：EP93117906.3

申请日：1993-11-04

申请人： HITACHI, LTD. ,  HITACHI CONSTRUCTION MACHINERY CO., LTD.

发明人： Hosaka, Sumio ,  Kikugawa, Atsushi ,  Honda, Yukio ,  Koyanagi, Hajime ,  Nagasawa, Kiyosi

IPC分类号： G01N27/00 ,  G01B7/34

CPC分类号： G01Q70/04 ,  G01Q30/06 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/86 ,  Y10S977/868 ,  Y10S977/87 ,  Y10S977/872 ,  Y10S977/873

摘要： A scanning probe microscope in which the deflection of a cantilever (1, 104) caused by the proximity between a stylus (17, 109) and a sample (2) is detected, the relative distance between the sample and a probe at which the level of the deflection detection signal coincides with a reference level is subjected to servo control thereby to control the force exerted on the stylus to a constant level, and the relative positions of the sample and the probe are scanned to produce a three-dimensional image of the surface of the sample. In order to eliminate the error of servo control attributable to the deformation of the cantilever, the deflection detection signal is held with the cantilever set in free standing state, and the signal thus held is used to correct the level of the cantilever deflection detection signal. The servo control is effected by the detection signal thus corrected.

摘要翻译： 一种扫描探针显微镜，其中检测由触针（17,109）和样品（2）之间的接近度引起的悬臂（1,104）的偏转，所述样品与所述探针之间的相对距离 与参考水平重合的偏转检测信号经受伺服控制，从而将施加在触针上的力控制到一定水平，扫描样品和探针的相对位置，以产生三维图像 样品表面。 为了消除由于悬臂变形引起的伺服控制的误差，偏转检测信号由悬臂设定为独立状态而被保持的信号用于校正悬臂偏转检测信号的电平。 伺服控制由如此校正的检测信号来实现。