利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

30 条记录 (耗时 0.02 秒)

    METHOD TO MODULATE THE SENSITIVITY OF A BOLOMETER VIA NEGATIVE INTERFERENCE
    21.
    发明公开
    METHOD TO MODULATE THE SENSITIVITY OF A BOLOMETER VIA NEGATIVE INTERFERENCE 审中-公开
    通过负面干扰调节手枪灵敏度的方法

    公开(公告)号：EP3204742A1

    公开(公告)日：2017-08-16

    申请号：EP15848474.1

    申请日：2015-10-09

    申请人： Robert Bosch GmbH

    发明人： ROCZNIK, Thomas ,  PURKL, Fabian ,  O'BRIEN, Gary ,  FEYH, Ando ,  KIM, Bongsang ,  SAMARAO, Ashwin ,  YAMA, Gary

    IPC分类号： G01J5/10 ,  G01J5/22 ,  G01J5/00

    CPC分类号： G01J5/06 ,  G01J5/0809 ,  G01J5/0853 ,  G01J5/20 ,  G01J5/24 ,  G01J2005/066 ,  G01J2005/067

    摘要： A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.

    摘要翻译： 半导体传感器系统，特别是辐射热测量计，包括衬底，由衬底支撑的电极，与衬底隔开的吸收器，电压源和电流源。 电极可以包括镜子，或者该系统可以包括与电极分离的镜子。 吸收体的辐射吸收效率基于吸收体和反射镜之间的最小间隙距离。 电流源在吸收器结构上施加DC电流以产生指示吸收器结构吸收的辐射的信号。 电压源为电极供电以产生作用在吸收器上的调制静电场以调节最小间隙距离。 静电场包括调整吸收效率的直流分量和循环驱动吸收器的交流分量，以消极地干扰信号中的噪声。

    TITANIUM NITRIDE FOR MEMS BOLOMETERS
    22.
    发明公开
    TITANIUM NITRIDE FOR MEMS BOLOMETERS 审中-公开
    氮化钛对于MEMS红外探测器

    公开(公告)号：EP3050105A1

    公开(公告)日：2016-08-03

    申请号：EP14847383.8

    申请日：2014-09-26

    申请人： Robert Bosch GmbH

    发明人： SAMARAO, Ashwin, K. ,  O'BRIEN, Gary ,  FEYH, Ando ,  PURKL, Fabian ,  YAMA, Gary

    IPC分类号： H01L27/04 ,  B81B7/02

    CPC分类号： G01J5/20 ,  G01J5/024

    摘要： A method for fabricating a semiconductor device includes patterning a sacrificial layer on a substrate to define a bolometer, with trenches being formed in the sacrificial layer to define anchors for the bolometer, the trenches extending through the sacrificial layer and exposing conductive elements at the bottom of the trenches. A thin titanium nitride layer is then deposited on the sacrificial layer and within the trenches. The titanium nitride layer is configured to form a structural support for the bolometer and to provide an electrical connection to the conductive elements on the substrate.

    RESISTIVE SWITCHING FOR MEMS DEVICES
    27.
    发明公开
    RESISTIVE SWITCHING FOR MEMS DEVICES 审中-公开
    MEMS器件的电阻切换

    公开(公告)号：EP3230702A1

    公开(公告)日：2017-10-18

    申请号：EP15866993.7

    申请日：2015-12-10

    申请人： Robert Bosch GmbH

    发明人： SAMARAO, Ashwin, K. ,  O'BRIEN, Gary ,  FEYH, Ando ,  PURKL, Fabian ,  YAMA, Gary

    IPC分类号： G01J5/20 ,  H01L31/101

    摘要： A MEMS device includes a bolometer attached to a silicon wafer by a base portion of at least one anchor structure. The base portion comprises a layer stack having a metal-insulator-metal (MIM) configuration such that the base portion acts as a resistive switch such that, when the first DC voltage is applied to the patterned conductive layer, the base portion transitions from a high resistive state to a low resistive state, and, when the second DC voltage is applied to the patterned conductive layer, the base portion transitions from a high resistive state to a low resistive state.

    摘要翻译： MEMS装置包括通过至少一个锚结构的基部连接到硅晶片的辐射热测量计。 基座部分包括具有金属 - 绝缘体 - 金属（MIM）配置的层堆叠，使得基座部分充当电阻性开关，使得当第一DC电压施加到图案化的导电层时，基座部分从 高电阻状态切换到低电阻状态，并且当第二DC电压被施加到图案化导电层时，基部从高电阻状态转变到低电阻状态。

    PORTABLE DEVICE WITH TEMPERATURE SENSING
    29.
    发明公开
    PORTABLE DEVICE WITH TEMPERATURE SENSING 审中-公开
    便携式设备与温度感应

    公开(公告)号：EP2972157A1

    公开(公告)日：2016-01-20

    申请号：EP14772989.1

    申请日：2014-03-12

    申请人： Robert Bosch GmbH

    发明人： FEYH, Ando ,  CHEN, Po-jui ,  YAMA, Gary ,  PURKL, Fabian

    IPC分类号： G01J5/00 ,  G01K1/16 ,  G01K11/00 ,  G06T11/00 ,  B81B7/02

    CPC分类号： G01K13/00 ,  G01J5/0205 ,  G01J5/025 ,  G01J5/0265 ,  G01J5/0806 ,  G01J5/0859 ,  G01J5/089 ,  G01J5/20 ,  G01J2005/0077 ,  G01K1/02 ,  G01K2211/00 ,  G01K2213/00

    摘要： In one embodiment, a portable temperature sensing system includes a portable housing configured to be carried by a user, a micro electrical mechanical system (MEMS) thermal sensor assembly supported by the housing and including an array of thermal sensor elements, a memory including program instructions, and a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements, determine an average sensed temperature based upon the signals, and render data associated with the determined average sensed temperature.

    摘要翻译： 在一个实施例中，便携式温度感测系统包括被配置为由用户携带的便携式外壳，由外壳支撑并包括热传感器元件阵列的微型电子机械系统（MEMS）热传感器组件，包括程序指令 以及处理器，其可操作地连接到所述存储器和所述传感器，并且被配置为执行所述程序指令以从所述热传感器元件阵列的所选择的一组热传感器元件中的每一个获得信号，基于所述 信号并呈现与所确定的平均感测温度相关联的数据。

    SUSPENSION AND ABSORBER STRUCTURE FOR BOLOMETER
    30.
    发明公开
    SUSPENSION AND ABSORBER STRUCTURE FOR BOLOMETER 审中-公开
    暂停及吸音结构FOR A辐射热测量计

    公开(公告)号：EP2946182A2

    公开(公告)日：2015-11-25

    申请号：EP13870385.5

    申请日：2013-12-18

    申请人： Robert Bosch GmbH

    发明人： PURKL, Fabian ,  YAMA, Gary ,  FEYH, Ando

    IPC分类号： G01J5/20 ,  G01J5/08

    CPC分类号： H01L31/101 ,  G01J5/0853 ,  G01J5/20 ,  H01L31/02327

    摘要： A semiconductor device includes a substrate having an upper surface that defines a sensing region. A fixed beam structure is supported at a first level above the sensing region. The fixed beam structure includes fixed beam supports that extend upwardly from the upper surface of the substrate to position the fixed beam structure at the first level above the sensing region. An absorber structure is supported above the fixed beam structure at a second level above the sensing region. The absorber structure includes a pillar support that extends upwardly from the fixed beam structure to position the absorber structure at the second level above the sensing region.