公开(公告)号：EP2003225B1

公开(公告)日：2016-09-14

申请号：EP07740157.8

申请日：2007-03-28

Applicant: HOYA CORPORATION

Inventor： TAKAHASHI, Yukihiro ,  HAMAMOTO, Terufumi ,  SHINDE, Kenichi

IPC: C23C14/22 ,  G02B1/11

CPC classification number: C23C14/32 ,  C23C14/0031 ,  C23C14/0042 ,  C23C14/221 ,  C23C14/54 ,  C23C14/564 ,  C23C16/30 ,  G02B1/11 ,  H01J27/02 ,  H01J37/08 ,  H01J37/302 ,  H01J37/317 ,  H01J37/3178 ,  H01J2237/006 ,  H01J2237/022

公开(公告)号：EP2197014B1

公开(公告)日：2016-09-07

申请号：EP09178753.1

申请日：2009-12-10

Applicant: Vistec Electron Beam GmbH

Inventor： Döring, Hans-Joachim ,  Elster, Thomas ,  Slodowski, Matthias ,  Heinitz, Joachim

IPC: H01J37/04 ,  H01J37/09 ,  H01J37/147 ,  H01J37/302 ,  H01J37/317 ,  G03F7/20

CPC classification number: H01J37/3177 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/78 ,  H01J37/045 ,  H01J37/09 ,  H01J37/1471 ,  H01J37/302 ,  H01J37/3174 ,  H01J2237/0435 ,  H01J2237/045 ,  H01J2237/0492

公开(公告)号：EP2209047B1

公开(公告)日：2016-01-06

申请号：EP10159048.7

申请日：2007-02-14

Applicant: FEI COMPANY

Inventor： Schmidt, Michael ,  Blackwood, Jeff

IPC: C23C14/30 ,  H01J37/302 ,  H01J37/305 ,  B23K15/00 ,  B23K15/06

CPC classification number: B23K15/06 ,  B23K15/0086 ,  B23K2201/40 ,  C23C14/30 ,  H01J37/302 ,  H01J37/3056

公开(公告)号：EP2669928A1

公开(公告)日：2013-12-04

申请号：EP13002790.7

申请日：2013-05-29

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Biberger, Josef ,  Pulwey, Ralph

IPC: H01J37/28 ,  H01J37/302

CPC classification number: H01J37/3026 ,  H01J3/26 ,  H01J37/302 ,  H01J37/3023 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/1536 ,  H01J2237/30483 ,  H01J2237/30488

Abstract: A method of scanning a surface of an object using a particle beam comprises: determining a surface portion of the surface of the object, wherein the surface portion is to be scanned; determining initial positions of a set of raster points within the surface portion; changing the positions of at least some raster points of the set of raster points; and then scanning the surface portion by directing the particle beam to the positions of the raster points.

Abstract translation: 扫描使用粒子束的物体的表面的方法包括：确定挖掘对象物的表面的表面部分，worin表面部分是要被扫描; 确定性采矿一组的表面部分内的网格点的初始位置; 改变设定的栅格点中的至少一些网格点的位置; 然后由粒子束引导到网格点的位置扫描表面部分。

公开(公告)号：EP2509098A1

公开(公告)日：2012-10-10

申请号：EP12163264.0

申请日：2012-04-05

Applicant: FEI COMPANY

Inventor： Otten, Max ,  Van Hoften, Gerald ,  Lof, Joeri

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/302

CPC classification number: H01J37/26 ,  H01J37/244 ,  H01J37/302 ,  H01J2237/0203 ,  H01J2237/043 ,  H01J2237/065 ,  H01J2237/22 ,  H01J2237/2441 ,  H01J2237/24455 ,  H01J2237/24507 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/2802

Abstract: The invention relates to a Method of protecting a direct electron detector (151) in a TEM. The invention involves predicting the current density on the detector before setting new beam parameters, such as changes to the excitation of condenser lenses (104), projector lenses (106) and/or beam energy. The prediction is made using an optical model or a Look-Up-Table. When the predicted exposure of the detector is less than a predetermined value, the desired changes are made, otherwise a warning message is generated and changes to the settings are postponed.

Abstract translation: 本发明涉及一种保护TEM中的直接电子探测器（151）的方法。 本发明涉及在设置新的光束参数（例如聚光透镜（104），投影透镜（106）的激励和/或光束能量的改变）之前预测检测器上的电流密度。 预测是使用光学模型或查找表进行的。 当检测器的预测曝光量小于预定值时，进行期望的改变，否则产生警告消息并且延迟对设置的改变。

公开(公告)号：EP1710828B1

公开(公告)日：2012-05-30

申请号：EP06005921.9

申请日：2006-03-23

Applicant: Carl Zeiss NTS GmbH

Inventor： Principe, Edward L.

IPC: H01J37/305 ,  H01J37/28 ,  H01J37/302 ,  G01N1/32

CPC classification number: H01J37/28 ,  G01N1/32 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/226

公开(公告)号：EP1710828A3

公开(公告)日：2010-11-03

申请号：EP06005921.9

申请日：2006-03-23

Applicant: Carl Zeiss NTS GmbH

Inventor： Principe, Edward L.

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N1/32 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/226

Abstract: A method and an apparatus are for three-dimensional tomographic image generation in a scanning electron microscope system. At least two longitudinal marks are provided on the top surface of the sample which include an angle therebetween. In consecutive image recordings, the positions of these marks are determined and are used to quantify the slice thickness removed between consecutive image recordings.

公开(公告)号：EP1891658A2

公开(公告)日：2008-02-27

申请号：EP06760675.6

申请日：2006-06-02

Applicant: AXCELIS TECHNOLOGIES, INC.

Inventor： VANDERPOT, John ,  BERRIAN, Donald

IPC: H01J37/317 ,  H01J37/08 ,  H01J37/304

CPC classification number: H01J37/244 ,  H01J37/045 ,  H01J37/09 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H01J2237/30433 ,  H01J2237/31705

Abstract: A system and method for mitigating contamination in an ion implantation system is provided. The system comprises an ion source (200), a power supply (216) operable to supply power to a filament (214) and mirror electrode (218) of the ion source, a workpiece handling system, and a controller (228), wherein the ion source is selectively tunable via the controller to provide rapid control of a formation of an ion beam. The controller is operable to selectively rapidly control power to the ion source, therein modulating a power of the ion beam between an implantation power and a minimal power in less than approximately 20 microseconds based, at least in part, to a signal associated with a workpiece position. Control of the ion source therefore mitigates particle contamination in the ion implantation system by minimizing an amount of time at which the ion beam is at the implantation current.

公开(公告)号：EP1060498B1

公开(公告)日：2005-11-16

申请号：EP00901387.1

申请日：2000-01-04

Applicant: APPLIED MATERIALS, INC.

Inventor： RISHTON, Stephen, A. ,  WANG, Weidong ,  BOEGLI, Volker ,  HOFMANN, Ulrich

IPC: H01J37/302 ,  H01J37/317

CPC classification number: H01J37/3026 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/302 ,  H01J37/3174 ,  Y10S438/949

公开(公告)号：EP0910110B1

公开(公告)日：2005-06-01

申请号：EP98119063.0

申请日：1998-10-08

Applicant: Unaxis Deutschland Holding GmbH

Inventor： Bähr, Martin, Dr.rer. nat ,  Laux, Erik, Dipl.-Ing.

IPC: H01J37/305 ,  H01J37/302

CPC classification number: H01J37/302 ,  H01J37/3053 ,  H01J2237/30483 ,  H01J2237/3132