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163 条记录 (耗时 0.011 秒)

    DEVICE AND METHOD FOR CARRYING THIN PLATE-LIKE SUBSTRATE
    21.
    发明公开
    DEVICE AND METHOD FOR CARRYING THIN PLATE-LIKE SUBSTRATE 失效
    ANORDNUNG UND VERFAHREN ZUM TRANSPORTIENEN VON基板在形式DÜNNERPLÄTTCHEN。

    公开(公告)号：EP0557523A1

    公开(公告)日：1993-09-01

    申请号：EP91918908.4

    申请日：1991-10-28

    申请人： KABUSHIKI KAISHA WATANABE SHOKO

    发明人： TODA, Masayuki, 7-139, Higashi 2-chome ,  ONODA, Takashi, Yamagata University Kogakubu ,  OHMI, Tadahiro, 1-17-301, Komegabukuro 2-chome ,  UMEDA, Masaru, Kabushiki-Kaisha Watanabe Shoko ,  KANNO, Yoichi, Kabushiki-Kaisha Motoyama

    IPC分类号： H01L21/68

    CPC分类号： H01L21/67787 ,  B65G51/03 ,  H01L21/67784 ,  Y10S414/135 ,  Y10S414/136

    摘要： A device for carrying a thin plate-like substrate such as a semiconductor wafer and controlling its position by floating it with an inert gas of low impurity concentration. A transferring unit and a controlling unit are respectively provided with gas nozzles for floating a thin plate-like substrate and with a gas exhausting and circulating system, and a plurality of them are in combination with each other in a sealing state. The controlling unit, further, has a vacuum suction hole at its controlling center, and is provided with nozzles for controlling the thin plate-like substrate in its radial and cirumferential direction respectively and with nozzles for stopping the thin plate-like substrate or sending out it to the next unit too. On the bottom face of a control space, grooves extending from the vacuum suction hole are formed for improving the positional accuracy of stopping the thin plate-like substrate, and they are closed on the insides of their circumferential parts when the center of the thin plate-like substrate has coincided with the controlling center of the controlling unit.

    摘要翻译： 用于承载诸如半导体晶片的薄板状基板的装置，并通过使用低杂质浓度的惰性气体漂浮来控制其位置。 传送单元和控制单元分别设置有用于浮动薄板状基板和排气循环系统的气体喷嘴，并且多个它们在密封状态下彼此组合。 另外，控制单元在其控制中心具有真空吸引孔，并且设置有用于分别在其径向和圆周方向上控制薄板状基板的喷嘴和用于停止薄板状基板的喷嘴或发出 它也到下一个单位。 在控制空间的底面，形成有从真空吸引孔延伸出的槽，用于提高停止薄板状基板的位置精度，并且当薄板的中心部分在其周向部分的内侧封闭时 样基板与控制单元的控制中心一致。

    An apparatus for transporting an electrically conductive wafer
    23.
    发明公开
    An apparatus for transporting an electrically conductive wafer 失效
    用于运输电导体波导的装置

    公开(公告)号：EP0287838A3

    公开(公告)日：1990-07-18

    申请号：EP88104776.5

    申请日：1988-03-24

    申请人： FUJITSU LIMITED

    发明人： Machida, Akira

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67784

    摘要： The wafer transporter of the invention comprises a plurality of plane electrodes (1-1,...1-5) which are horizontally coplanar with each other. The plane electrodes (1-1,...1-5) face the wafer (6) to be transported. A plurality of air nozzles (7) are provided through the electrodes (1-1,...1-5), and air is blown off from the nozzles (7) perpendicularly toward the wafer (6) surface. A voltage is applied between the electrodes (1-1,...1-5) facing the wafer (6). The applied voltage is divided by the capacitances between the wafer (6) which is electrically conductive and the electrodes (1-1,...1-5), thus the wafer (6) is attracted vertically toward the electrode, but stays without friction at the balance of the repulsive force of the air blow and the attractive force. On the other hand, the divided voltages become unequal caused by the difference of the wafer's area facing respective electrodes (1-1,...1-5). This voltage difference produces a horizontally attractive force to move the wafer (6) in a horizontal direction. The wafer (6) is forced to stay at a balancing point where the induced voltages are equal. This is used to prevent the wafer (6) from deviating from the course. Successive switching of the voltage application to a next electrode in the direction of the wafer's move allow the wafer (6) to travel along the row of the electrodes (1-1,...1-5).

    Transporteur de tranches empilables dans des cassettes
    24.
    发明公开
    Transporteur de tranches empilables dans des cassettes 失效
    Kassetten的Fördervorrichtungfürstapelbung Scheiben。

    公开(公告)号：EP0305260A1

    公开(公告)日：1989-03-01

    申请号：EP88402061.1

    申请日：1988-08-08

    申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE Etablissement de Caractère Scientifique Technique et Industriel

    发明人： Cruz, Didier ,  Daval, Jacques ,  Lazzari, Jean-Pierre

    IPC分类号： H01L21/68 ,  H01L21/00 ,  B65G51/03

    CPC分类号： H01L21/67784

    摘要： Transporteur de tranches empilables dans des cassettes. Les tranches (1) sont au départ dans des cassettes (20) en peignes (21, 22). Le transporteur (5) s'insère entre les peignes (21, 22). Un coussin d'air oblique extrait les tranches (1) et les déplace vers la droite. Un orifice de succion (12) les plaque alors fermement contre la piste (6). Un coussin d'air dans l'autre sens permet de replacer les tranches (1) dans une autre cassette (20). Plusieurs pistes (6) horizontales sont superposées en hauteur.

    摘要翻译： 板（1）最初以夹具（21,22）的形式存放在盒（20）中。 传送带（5）被引入夹具（21,22）之间。 倾斜气垫提取板（1）并将它们向右移动。 通过孔（12）吸入然后将其紧紧地按压在轨道（6）上。 另一方向的气垫使得能够在另一个盒（20）中更换板（1）。 几个水平轨道（6）彼此重叠。

    Air film transportation device
    27.
    发明公开
    Air film transportation device 失效
    空气膜运输装置

    公开(公告)号：EP0043457A3

    公开(公告)日：1982-04-14

    申请号：EP81104436

    申请日：1981-06-10

    申请人： International Business Machines Corporation

    发明人： Hassan, Javathu Kutikaran ,  Paivanas, John Angelo

    IPC分类号： B65G51/00 ,  H01L21/68

    CPC分类号： B65G51/03 ,  H01L21/67784

    摘要： A track (14) for transporting objects such as semiconductor wafers on a bed of a gaseous fluid is provided making improved use of an axi-radial effect and a coanda effect. The track surface construction contains rows of air feed nozzles (20) separated by evacuating channels (26). The rows of holes (20) on each side of the center line (24) of the track are oriented such that the holes (20) in adjacent rows are spaced longitudinally along the track. The use of longitudinal spacing of the holes in adjacent rows reduces the number of holes necessary for the overall track configuration.

    Air film transportation device
    28.
    发明公开
    Air film transportation device 失效
    Luftkissen-Transporteinrichtung。

    公开(公告)号：EP0043457A2

    公开(公告)日：1982-01-13

    申请号：EP81104436.1

    申请日：1981-06-10

    申请人： International Business Machines Corporation

    发明人： Hassan, Javathu Kutikaran ,  Paivanas, John Angelo

    IPC分类号： B65G51/00 ,  H01L21/68

    CPC分类号： B65G51/03 ,  H01L21/67784

    摘要： A track (14) for transporting objects such as semiconductor wafers on a bed of a gaseous fluid is provided making improved use of an axi-radial effect and a coanda effect. The track surface construction contains rows of air feed nozzles (20) separated by evacuating channels (26). The rows of holes (20) on each side of the center line (24) of the track are oriented such that the holes (20) in adjacent rows are spaced longitudinally along the track. The use of longitudinal spacing of the holes in adjacent rows reduces the number of holes necessary for the overall track configuration.

    摘要翻译： 提供了用于在气态流体床上输送诸如半导体晶片的物体的轨道（14），从而改进了轴向径向效应和共同作用效果。 轨道表面结构包含由抽空通道（26）分开的一排排气喷嘴（20）。 轨道的中心线（24）的每一侧上的孔排（20）被定向成使得相邻排中的孔（20）沿轨道纵向间隔开。 使用相邻行中的孔的纵向间隔减少了整个轨道配置所需的孔的数量。