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    ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS
    23.
    发明公开
    ELECTRO-ACTIVE MICROELECTROMECHANICAL DEVICE AND CORRESPONDING DETECTION PROCESS 有权
    卓越奖获奖作品在ZUGEHÖRIGESDETEKTIONSVERFAHREN

    公开(公告)号：EP2617074A1

    公开(公告)日：2013-07-24

    申请号：EP11773859.1

    申请日：2011-09-13

    申请人： Fondazione Istituto Italiano Di Tecnologia

    发明人： QUALTIERI, Antonio ,  RIZZI, Francesco ,  DE VITTORIO, Massimo ,  PASSASEO, Adriana ,  TODARO, Maria, Teresa ,  EPIFANI, Gianmichele

    IPC分类号： H01L41/09 ,  G01Q60/38

    CPC分类号： G01P5/02 ,  G01Q10/045 ,  H01L41/094 ,  H01L41/25 ,  H01L41/27

    摘要： Electroactive microelectromechanical device of the Artificial Hair Cell type, comprising a moving cilium structure including a substrate (11, 12; 42) and a cantilever (18; 48), partly or entirely in.piezoelectric material, subject to bending or deformation following the action of a force and/or an applied voltage (V
    app1 ), said cantilever (18; 48) comprising a multilayer (13, 14a, 14b, 16) inducing a stress-driven geometry in which a portion (19) of said cantilever (18; 48) lies outside of a plane defined by the substrate (11, 12; 42). According to the invention said cantilever (18; 48) is associated to a piezoresistive element, in particular of piezoresistive material (15) configured to measure the bending or deformation of said cantilever (18; 48).

    摘要翻译： 人造毛细胞类型的电活性微机电装置包括移动的纤毛结构，其具有基底和部分或全部为压电材料的悬臂，经受在力作用和/或施加电压之后的弯曲或变形。 悬臂包括多层诱导应力驱动几何形状，其中悬臂的一部分位于由衬底限定的平面的外侧。 根据本发明，悬臂与压阻元件有关，特别是配置成测量悬臂弯曲或变形的压阻材料。

    A probe for scanning probe microscopy
    25.
    发明公开
    A probe for scanning probe microscopy 审中-公开
    用于扫描探针显微镜的探针

    公开(公告)号：EP2535725A1

    公开(公告)日：2012-12-19

    申请号：EP11170330.2

    申请日：2011-06-17

    申请人： IMEC

    发明人： Hantschel, Thomas ,  Vandervorst, Wilfried

    IPC分类号： G01Q60/30 ,  G01Q60/38 ,  G01Q70/10 ,  B82Y35/00

    CPC分类号： G01Q60/30 ,  G01Q60/38 ,  G01Q70/10

    摘要： The present invention is related to a probe for surface analysis by Atomic Force Microscopy. The tip body comprises at least a top portions formed of a rectangular ground plane, two trapezoidal side planes and two triangular side planes, with a straight line-shaped edge (11). One of the end points (18) of said edge serves as the tip point when the tip is held at an angle between the edge (11) and the surface to be scanned. The tip of the invention is obtainable by a process wherein a mold is produced by wet anisotropic etching through a rectangular or ellipse-shaped hardmask. The tip body is arranged on a cantilever, with the edge parallel or at an angle to the longitudinal direction of the cantilever. According to an embodiment in which the tip must be at an angle to said cantilever direction, the tip may have a rectangular top surface (20) instead of a straight line-shaped edge. The invention is equally related to a method for producing a probe according to the invention.

    摘要翻译： 本发明涉及用于通过原子力显微镜进行表面分析的探针。 尖端体至少包括由矩形的接地平面，两个梯形的侧面和两个三角形的侧面形成的具有直线形边缘（11）的顶部。 当尖端保持在边缘（11）和待扫描表面之间的角度时，所述边缘的一个端点（18）用作尖端点。 本发明的尖端可通过其中通过经由矩形或椭圆形硬掩模进行湿法各向异性蚀刻来制造模具的工艺来获得。 尖端体布置在悬臂上，其边缘与悬臂的纵向方向平行或成一定角度。 根据其中尖端必须与所述悬臂方向成角度的实施例，尖端可具有矩形顶表面（20）而不是直线形边缘。 本发明同样涉及用于制造根据本发明的探针的方法。

    EP0839312A4 -
    30.
    发明公开
    EP0839312A4 - 失效
    EP0839312A4 - Google专利

    公开(公告)号：EP0839312A4

    公开(公告)日：1998-05-06

    申请号：EP96906289

    申请日：1996-01-31

    IPC分类号： G01B21/30 ,  G01B7/34 ,  G01N37/00 ,  G01Q20/04 ,  G01Q30/12 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/34 ,  G01Q60/38 ,  G01Q60/40 ,  G01Q60/42

    CPC分类号： G01Q60/34 ,  Y10S977/851

    摘要： A probe tip in an atomic force microscope is oscillated at a resonant frequency and at an amplitude setpoint and scanned across the surface of a sample at constant amplitude in intermittent contact with the sample. Changes in phase or in resonant frequency of the oscillating are measured to determine adhesion between the probe tip and the sample. The setpoint amplitude of oscillation of the probe is greater than 10 nm to assure that the energy in the probe lever arm is much higher than that lost in each cycle by the probe striking the sample surface so that the probe tip does not stick to the sample surface. Force dependent sample characteristics are determined by comparing data obtained at different tapping amplitude setpoints.

    摘要翻译： 原子力显微镜中的探针尖端以共振频率和振幅设定点振荡，并以恒定振幅横跨样品表面扫描，间歇接触样品。 测量振荡相位或谐振频率的变化以确定探针尖端与样品之间的粘附。 探头摆动的设定值幅度大于10nm，以确保探头杆臂中的能量远高于探头撞击样品表面时在每个循环中损失的能量，使得探头尖端不会粘住样品 表面。 通过比较在不同敲击振幅设定点获得的数据来确定依赖于力的样本特性。