公开(公告)号：EP2711674A1

公开(公告)日：2014-03-26

申请号：EP13184739.4

申请日：2013-09-17

Applicant: Seiko Epson Corporation

Inventor： Matsushita, Tomonori ,  Arai, Yoshifumi

IPC: G01J3/26 ,  G02B5/28

CPC classification number: G01J3/0205 ,  G01J3/26 ,  G01J3/51 ,  G02B5/28 ,  G02B5/284 ,  G02B26/001

Abstract: A spectrometer includes a first reflective film, a second reflective film facing the first reflective film with a gap interposed therebetween, a gap change portion that changes the amount of the gap by changing the relative position of the second reflective film with respect to the first reflective film, and a processing unit that outputs optical characteristic data at a predetermined first wavelength interval on the basis of light of a plurality of the wavelengths to be measured which are extracted by the first reflective film and the second reflective film by changing the gap amount using the gap change portion, wherein a full width at half maximum of a spectrum of at least one component of light among the light of the plurality of wavelengths to be measured which are extracted by the first reflective film and the second reflective film is larger than the first wavelength interval.

Abstract translation: 光谱仪包括第一反射膜，面对第一反射膜的第二反射膜，其间具有间隙;间隙变化部，其通过改变第二反射膜相对于第一反射膜的相对位置来改变间隙量 基于由第一反射膜和第二反射膜提取的多个待测量波长的光，以预定的第一波长间隔输出光学特性数据的处理单元，通过使用 所述间隙变化部分，其中由所述第一反射膜和所述第二反射膜提取的所述待测量的多个波长的光中的至少一个光分量的光的最大半值的全宽大于 第一波长间隔。

公开(公告)号：EP2534455B1

公开(公告)日：2014-01-08

申请号：EP11704045.1

申请日：2011-02-07

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Office National d'Etudes et de Recherches Aérospatiales

Inventor： FENDLER, Manuel ,  LAFARGUES, Gilles ,  GUERINEAU, Nicolas ,  ROMMELUERE, Sylvain ,  DE LA BARRIERE, Florence

IPC: G01J3/02 ,  G01J3/26 ,  G01J3/28 ,  G01J3/453

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2823 ,  G01J3/4531 ,  H01L2224/16225

Abstract: A micro-machined optical measuring device including: a set of photosensitive detector elements situated on a given face of a first support; a second support, assembled to the first support, forming a prism and including a first face through which a visible radiation is intended to penetrate and a second face, forming a non-zero angle &thetas; with the first face and a non-zero angle α with the given face of the first support, the second face being semi-reflective, the first support and the second support being positioned such that an interferometric cavity is made between the second face and the given face, the distance between the given face of the first support and the second face of the second support varying regularly.

公开(公告)号：EP2600192A3

公开(公告)日：2013-12-25

申请号：EP13157161.4

申请日：2011-03-17

Applicant: Seiko Epson Corporation

Inventor： Shinto, Susumu ,  Yamazaki, Seiji

IPC: G03F7/20 ,  G02B5/20 ,  G02B5/28 ,  G02B26/00 ,  G02F1/00 ,  G01J3/26 ,  G02F1/21

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B5/284 ,  G02F1/21 ,  G02F2001/213 ,  G03F7/70575

Abstract: An optical filter (1) comprises a first substrate (3); a first mirror (4B) provided to the first substrate (3); a first electrode (6B) provided to the first substrate (3); a second substrate (2) disposed so as to be opposed to the first substrate (3); a second mirror (4A) provided to the second substrate (2), and opposed to the first mirror (4B); a second electrode (6A) provided to the second substrate (2), and opposed to the first electrode (6B), wherein the second substrate (2) has a groove (8) surrounding the second mirror (4A) in a plan view, and the groove (8) includes a first curved surface (8b) with a large curvature radius between a first side surface (8c) of the groove and a bottom surface (8a) of the groove, and a second curved surface (8d) with a large curvature radius between a second side surface (8e) of the groove and the bottom surface (8a) of the groove.

Abstract translation: 滤光器（1）包括第一基板（3）; 设置在所述第一基板（3）上的第一反射镜（4B）; 提供给第一基板（3）的第一电极（6B）; 与第一基板（3）相对配置的第二基板（2）; 设置在所述第二基板（2）上且与所述第一反射镜（4B）相对的第二反射镜（4A）; （2）上并与第一电极（6B）相对的第二电极（6A），其中第二基板（2）在平面图中具有围绕第二反射镜（4A）的凹槽（8） ，所述槽（8）包括在所述槽的第一侧表面（8c）和所述槽的底表面（8a）之间具有大曲率半径的第一弯曲表面（8b）和具有第二弯曲表面 在凹槽的第二侧表面（8e）和凹槽的底表面（8a）之间具有大的曲率半径。

公开(公告)号：EP2600194A2

公开(公告)日：2013-06-05

申请号：EP13157164.8

申请日：2011-03-17

Applicant: Seiko Epson Corporation

Inventor： Shinto, Susumu ,  Yamazaki, Seiji

IPC: G03F7/20 ,  G02B5/20 ,  G02B5/28 ,  G02B26/00 ,  G02F1/00 ,  G01J3/26

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B5/284 ,  G02F1/21 ,  G02F2001/213 ,  G03F7/70575

Abstract: An optical filter (1) comprises a lower substrate (3); a lower mirror (4B) provided to the lower substrate (3); a lower electrode (6B) provided to the lower substrate (3); an upper substrate (2) disposed so as to be opposed to the lower substrate (3); an upper mirror (4A) provided to the upper substrate (2), and opposed to the lower mirror (4B); and an upper electrode (6A) provided to the upper substrate (2), and opposed to the lower electrode (6B), wherein the upper substrate (2) has a groove (8) surrounding the upper mirror (4A) in a plan view, the groove (8) includes a first side surface section (8c), a second side surface section (8e), a bottom surface section (8a), a first end section (8b) located between the first side surface section (8c) and the bottom surface section (8a), and a second end section (8d) located between the second side surface section (8e) and the bottom surface section (8a), in a cross-sectional view, and the bottom surface (8a) is flat, and the first end section (8b) and the second end section (8d) each have a curved surface with a large curvature radius, in order to ease the stress concentration in the end sections.

Abstract translation: 滤光器（1）包括下基板（3）; 设置到下基板（3）的下反射镜（4B）; 设置在下基板（3）上的下电极（6B）; 设置成与下基板（3）相对的上基板（2）; 设置在上基板（2）上并与下反射镜（4B）相对的上反射镜（4A）; 以及设置在所述上​​基板（2）上并且与所述下电极（6B）相对的上电极（6A），其中所述上基板（2）在俯视图中具有围绕所述上反射镜（4A）的凹槽（8） ，所述槽（8）包括第一侧面部（8c），第二侧面部（8e），底面部（8a），位于所述第一侧面部（8c）之间的第一端部（8b） 和底面部分（8a），以及位于第二侧表面部分（8e）和底部表面部分（8a）之间的第二端部部分（8d），并且底部表面（8a） 为了缓解端部的应力集中，第一端部（8b）和第二端部（8d）各自具有曲率半径大的曲面。

公开(公告)号：EP2010861A4

公开(公告)日：2013-05-01

申请号：EP07753888

申请日：2007-03-23

Applicant: CYMER INC

Inventor： RAFAC ROBERT J

IPC: G01B9/02

CPC classification number: G01J3/02 ,  G01J3/027 ,  G01J3/26 ,  G01J3/2803 ,  G01J9/0246

公开(公告)号：EP2580561A2

公开(公告)日：2013-04-17

申请号：EP11738513.8

申请日：2011-06-13

Applicant: Block Engineering, LLC

Inventor： KOTIDIS, Petros ,  DEUTSCH, Erik ,  ZHU, Ninghui ,  ERLICH, Adam ,  CAVICCHIO, Dan ,  COATES, John ,  HEANUE, John

IPC: G01J3/433

CPC classification number: G01N21/39 ,  B82Y20/00 ,  G01J3/108 ,  G01J3/26 ,  G01J3/4338 ,  G01J3/45 ,  G01N21/272 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N2021/1793 ,  G01N2021/399 ,  G01N2201/0221 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/08 ,  G02B21/0028 ,  G02B21/008 ,  G02B21/06 ,  H01S5/0071 ,  H01S5/141 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4031

Abstract: A spectroscopy system comprising at least two laser modules, each of the laser modules including a laser cavity, a quantum cascade gain chip for amplifying light within the laser cavity, and a tuning element for controlling a wavelength of light generated by the modules. Combining optics are used to combine the light generated by the at least two laser modules into a single beam and a sample detector detects the single beam returning from a sample.

公开(公告)号：EP1488483A4

公开(公告)日：2013-03-06

申请号：EP03706132

申请日：2003-03-10

Applicant: UNIV WESTERN AUSTRALIA

Inventor： ANTOSZEWSKI JAREK ,  DELL JOHN MARCEL ,  FARAONE LORENZO ,  MUSCA CHARLES ANTHONY ,  WINCHESTER KEVIN JAMES

IPC: H01S3/08 ,  G01J3/26 ,  G02B26/00 ,  H01L21/02 ,  H01S5/10

CPC classification number: G02B26/001 ,  G01J3/26 ,  H01S3/08059 ,  H01S3/105

公开(公告)号：EP2555038A1

公开(公告)日：2013-02-06

申请号：EP11762564.0

申请日：2011-03-15

Applicant: Olympus Corporation

Inventor： WAKAI Hiroshi

IPC: G02B26/00 ,  G01B7/30 ,  G01J3/26

CPC classification number: G01B7/30 ,  G01B7/003 ,  G01J3/26

Abstract: In the variable spectroscopic element, the first sensor 3 1 and the third sensor 3 3 are arranged at positions that form symmetry with respect to the axis that links gravity centers of mutually facing surfaces of the pair of optical substrates 2, and so are the second sensor 3 2 and the fourth sensor 3 4 ; the first to fourth piezoelectric elements 4 1 to 4 4 are arranged, respectively, on lines that extend from the gravity centers of the mutually facing surfaces of the pair of optical substrates 2 toward respective centers of the first to fourth sensors 3 1 to 3 4 ; and a control section is provided to calculate, from signals by the first to fourth sensors 3 1 to 3 4 , a distance x between the gravity centers of the mutually facing surfaces of the pair of optical substrates, to calculate, from a signal by the first sensor 3 1 and a signal by the third sensor 3 3 , a first angle θ formed by a plane perpendicular to the line that links the gravity centers and one of the mutually facing surfaces of moving one of the optical substrates, to calculate, from a signal by the second sensor 3 2 and a signal by the fourth sensor 3 4 , a second angle φ formed by a plane perpendicular to the line that links the gravity centers and the one of the mutually facing surface of the moving one of the optical substrates, to drive the first to fourth piezoelectric elements 4 1 to 4 4 on the basis of the distance x , the angle θ and the angle φ , and to carry out feedback control and feed forward control with respect to at least one of the distance x , the angle θ and the angle φ .

Abstract translation: 在可变分光元件中，第一传感器31和第三传感器33配置在相对于连结一对光学基板2的相互面对的面的重心的轴对称的位置，第二传感器32也是如此 和第四传感器34; 第一至第四压电元件41至44分别布置在从一对光学基板2的相互面对的表面的重心朝向第一至第四传感器31至34的相应中心延伸的线上; 并且设置控制部分以从第一传感器31至第四传感器34的信号计算一对光学基板的相互面对的表面的重心之间的距离x，以从第一传感器的信号 31和由第三传感器33得到的信号，由与连接重心的线相垂直的平面形成的第一角度θ与移动一个光学基板的一个相互面对的表面之间的距离， 第二传感器32和第四传感器34发出的信号产生第二角度φ，该第二角度由垂直于连接重心和移动的一个光学基底的一个相互面对的表面的线的平面形成，以驱动第一 基于距离x，角度θ和角度φ，对第四压电元件41〜44施加相对于距离x，角度θ和角度中的至少一个的反馈控制和前馈控制 φ。

公开(公告)号：EP2546622A1

公开(公告)日：2013-01-16

申请号：EP12188057.9

申请日：2006-12-19

Applicant: Palo Alto Research Center Incorporated

Inventor： Kiesel, Peter ,  Maeda, Patrick Y ,  Schmidt, Oliver

IPC: G01J3/26 ,  G01J3/28 ,  G01J3/12

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0264 ,  G01J3/2803 ,  G01J3/36 ,  G01J2003/1213 ,  G01N21/645 ,  H01L27/14625

Abstract: Light to be sensed is spread across an entry surface of a transmission structure (40) with a laterally varying energy transmission function. For example, the light could be output from a stimulus-wavelength converter, provided through an optical fiber, or it could come from a point-like source or broad area source. Output photons from the transmission structure (40) can be photosensed by photosensing components (50) such as an array, position sensor, or array of position sensors. Wavelength information from the light can be obtained in response to the photosensing component. Spreading can be performed by air, gas, transparent material, or vacuum in a gap, by a region or other part of a lens, or by an optical fiber end surface. If the light comes from more than one source, a propagation component can both spread the light and also keep light from the sources separate.

Abstract translation: 要被感测的光通过侧向变化的能量传输功能扩展到传输结构（40）的入口表面。 例如，光可以从通过光纤提供的刺激 - 波长转换器输出，或者它可以来自点状源或广域源。 来自传输结构（40）的输出光子可以通过诸如阵列，位置传感器或位置传感器阵列的光敏元件（50）进行光照。 可以根据光敏元件获得来自光的波长信息。 通过空气，气体，透明材料或间隙中的真空，透镜的区域或其他部分或光纤端面可以进行扩散。 如果光源来自不止一个源，则传播组件既可以传播光，也可以将来自光源的光分开。

公开(公告)号：EP2522968A1

公开(公告)日：2012-11-14

申请号：EP12175335.4

申请日：2010-11-30

Applicant: IMEC

Inventor： Tack, Klaas ,  Lambrechts, Andy ,  Haspeslagh, Luc

IPC: G01J3/26 ,  G01J3/28 ,  G01J3/12

CPC classification number: G01J3/2823 ,  G01J3/12 ,  G01J3/26 ,  G01J3/2803 ,  G01J2003/1226 ,  G01J2003/265 ,  G01J2003/2806 ,  G01J2003/2826 ,  H04N5/332 ,  H04N5/378

Abstract: An integrated circuit for an imaging system has an array of optical sensors (40), and an array of optical filters (10) each configured to pass a band of wavelengths onto one or more of the sensors, the array of optical filters being integrated with the array of sensors, and the integrated circuit also having read out circuitry (30) to read out pixel values from the array of sensors to represent an image, different ones of the optical filters being configured to have a different thickness, to pass different bands of wavelengths by means of interference, to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.

Abstract translation: 一种用于成像系统的集成电路具有光学传感器阵列（40）和每个被配置成将波长带传递到一个或多个传感器上的滤光器阵列（10），所述滤光器阵列与 所述传感器阵列和所述集成电路还具有读出电路（30），以从所述传感器阵列中读出像素值以表示图像，所述不同的所述滤光器被配置为具有不同的厚度以通过不同的带 的波长，以允许检测波长的光谱。 读出电路可以使一个光学滤波器下的多个像素平行读出。 厚度可以在整个阵列上单调变化。 读出或稍后的图像处理可能涉及波长之间的选择或插值，以进行频谱采样或移位，以补偿厚度误差。