摘要:
A foam coaxial cable, comprising an inner conductor ( 1 ), a foam insulating layer ( 2 ) formed on the outer periphery of the inner conductor ( 1 ), an outer conductor ( 3 ) formed on the outer periphery of the foam insulating layer ( 2 ), and an outer cover ( 4 ) formed on the outer periphery of the outer conductor ( 3 ). A skin layer ( 11 ) having a generally complete round outline is formed on the outer periphery of the foam insulating layer ( 2 ). Thus, the productivity of the foam insulating layer ( 2 ) can be increased by increasing the accuracy of the characteristic impedance values of the cable while increasing the flexibility and mechanical strength of the cable.
摘要:
A test apparatus for testing an electric device includes a plurality of signal input-output units for inputting and/or outputting test signals in response to each of a plurality of terminals included by the electric device, a channel selection memory for storing pieces of channel selection information indicating whether each of the signal input-output units should perform setting based on a setting condition or not, a setting condition memory for storing the setting condition with regard to the signal input-output unit, and a controlling means for retrieving and supplying the setting condition stored in the setting condition memory and the channel selection information stored in the channel selection memory to the signal input-output units based on a setting instruction, when receiving the setting instruction to set the setting condition of the signal input-output unit, wherein when at least one of the signal input-output units is selected by the channel selection information supplied from the controlling means, the one of the signal input-output units is set based on the setting condition supplied from the controlling means.
摘要:
A coupling unit for electrically coupling a performance board on which an electronic device is mounted and a tester control unit for generating a control signal for controlling a test of the electronic device includes a board containing unit for containing a test board electrically coupled to the tester control unit in order that the test board is replaceable on one of a plurality of different holding positions and a coupling cable whose one end is coupled to the test board held in the holding position and the other end is coupled to the performance board.
摘要:
The present invention relates to a high-precision and high-speed electron beam exposure technique which corrects the position of each beam in a multi-beam exposure method without using a deflection array and a huge and high-precision driving circuit. In an electron beam exposure method for forming a desired pattern onto a specimen (217) by independently controlling emission and scanning of a plurality of electron beams (202), a deviation between a pattern formed by each of the plurality of electron beams (202) and the desired pattern is controlled by shifting the position of pattern data of the pattern formed by each of the plurality of electron beams (202).
摘要:
The present invention intends to improve the writing accuracy in an electron beam writing system using discrete multi beams in which the interval of the beams is larger than the size of the beams. In electron beam writing equipment which uses means generating multi electron beams; means on/off controlling each of the multi electron beams according to pattern data that should be written; and means deflecting the multi electron beams together, thereby performing writing on a wafer, one side of a unit writing area of the multi electron beams is larger than substantially twice the interval of the electron beams or substantially an integral multiple thereof.
摘要:
The dimension of the main field as a unit region for exposure is set to an integral submultiple of the arrangement pitch of the LSI to be exposed, by the control computer 62, and the exposure data stored in the form associated with electron beams from a data generation circuit 64 is limited to one-chip data alone in units of a stripe. This data is repeatedly read out to write the stripe. Further, a storage circuit 66 is provided to store the exposure data by means of a double buffer memory unit for each electron beam. While LSI is written according to one of the buffers, the next exposure stripe data is prepared on the other buffer, thereby bringing about a substantial reduction in the required speed of the exposure data generation circuit.
摘要:
This detector is provided with a suction transfer arm (12) for vacuum sucking an object material (11) at a nozzle bore and transferring the material in the horizontal and vertical directions. On the rear side of the portion of a stage (13) on which the material (11) to be sucked is placed, an upwardly directed light-emitting sensor (14) is provided. The portion of the stage on which the material (11) to be sucked is placed is provided with a through hole by which the upward rays of light-emitting sensor (14) is not shut off. At an inner part of the nozzle bore of the suction transfer arm (12), a downwardly directed light receiving sensor (15) for receiving the rays of light from the light-emitting sensor (14) is provided.