摘要:
In a semiconductor memory device having a memory cell array (MCA) and sense amplifiers (SA₁, SA₂, ...) connected by bit lines (BL₁, BL ₂, ...), a conductive shield plate (SLD) is arranged over the bit lines and between memory cell array and the sense amplifiers.
摘要:
In a semiconductor memory device having a memory cell array (MCA) and sense amplifiers (SA₁, SA₂, ...) connected by bit lines (BL₁, BL ₂, ...), a conductive shield plate (SLD) is arranged over the bit lines and between memory cell array and the sense amplifiers.
摘要:
On a IC where the wiring layer (21) is formed of superconductive material, an electrode (23) formed of normal metals, i. e. non-superconductive metals, such as aluminum, connects a part of semiconductor region (4) via a barrier metal, such as TiN, to the superconductive layer (21) wiring at least at the superconductive layer (21) wiring's side wall which is essentially orthogonal to the layer wiring. Accordingly, even when the wiring layer (21) is anisotropically superconductive mainly in direction parallel to the plane of the deposition, the superconductive property is fully enjoyed while the copper atoms in the superconductive material and the silicon atoms in the semiconductor region (4) of the IC do not produce undesirable alloy, resulting in improved reliability of the IC operation, i. e. the semiconductor material as well as the superconductive material is not deteriorated.
摘要:
Logic circuitry (1) includes a resonant-tunneling transistor ( 1) and a resistor (13) connected in series thereto. The resonant-tunneling transistor has a superlattice structure and may be a resonant-tunneling hot electron transistor or a resonant-tunneling bipolar transistor. The resonant-tunneling transistor is operable to flow a current, between a collector and an emitter, having one of at least three different current values of a first, a second or a third value in response to a base voltage (V IN ) in one of three different voltage values of a first, second or a third value. The third current value lies between the first and second current values, and the second voltage value lies between the first and third voltage values. The logic circuitry outputs one of at least three states having a high value, a low value, and a value approximately in between the high and low values in response to a signal applied to the logic circuitry the signal having an amplitude of one of the first to third voltage values.
摘要:
An insulating film (23) of a higher dielectric constant than silicon dioxide, for example of tantalum oxide, is formed on a p-type substrate (21). The insulating film (23) contains an n-type impurity, for example phosphorus. An electrode (24), for example of molybdenum silicide, is formed on the insulating film (23). By a heat treatment carried out for example for 30 minutes at a temperature of 1000°C an n-type region (25) is formed in the p-type substrate (21) by diffusion of impurity (phosphorus) from the insulating film (23), into the surface of the substrate (21). Thereby an MIS type capacitor can be provided in which the insulating film (23) has a higher dielectric constant than silicon dioxide, whereby an increased amount of electric charge can be held in a capacitor of the same size as one in which an insulating film is provided of silicon dioxide. By the provision of the n-type inversion region (25) the capacitor can be charged up to the voltage of the power source connected to the electrode (24). By the diffusion of impurities from the insulating film (23) into the substrate (21) to form the region (25), the region (25) is formed in an accurate self-aligning fashion.
摘要:
A semiconductor memory device having memory cells each of which stores data in the form of the width of a depletion layer, and each of which comprises a semiconductor substrate having one type of conductivity; a region having an opposite type of conductivity formed on the surface portion of the semiconductor substrate; a depletion-type channel region of the one type of conductivity formed on the region having the opposite type of conductivity; a gate insulator which is formed on the surface of the channel region; and a gate electrode formed on the gate insulator; a portion of the gate insulator having a reduced thickness, and a portion of the channel region under the thin portion of the gate insulator being surrounded by the region having the opposite type of conductivity and by the remaining portions of the channel region in the semiconductor substrate.
摘要:
An insulating film (23) of a higher dielectric constant than silicon dioxide, for example of tantalum oxide, is formed on a p-type substrate (21). The insulating film (23) contains an n-type impurity, for example phosphorus. An electrode (24), for example of molybdenum silicide, is formed on the insulating film (23). By a heat treatment carried out for example for 30 minutes at a temperature of 1000°C an n-type region (25) is formed in the p-type substrate (21) by diffusion of impurity (phosphorus) from the insulating film (23), into the surface of the substrate (21). Thereby an MIS type capacitor can be provided in which the insulating film (23) has a higher dielectric constant than silicon dioxide, whereby an increased amount of electric charge can be held in a capacitor of the same size as one in which an insulating film is provided of silicon dioxide. By the provision of the n-type inversion region (25) the capacitor can be charged up to the voltage of the power source connected to the electrode (24). By the diffusion of impurities from the insulating film (23) into the substrate (21) to form the region (25), the region (25) is formed in an accurate self-aligning fashion.