摘要:
The invention relates to a method for producing a planar spacer, an associated bipolar transistor and an associated biCMOS circuit arrangement, wherein the first and second spacer layers (3, 4) are formed on a substrate (1) after a sacrifice mask (2) is formed and first and second spacer layers (3, 4) are embodied. In order to produce auxiliary spacers (4S) on the second spacer layer (4), a first anisotropic etching process is carried out. Afterwards, a second anisotropic etching process is carried out by means of the auxiliary spacers (4S) for producing a planar spacer (PS), thereby making it possible to freely select the height of the thus produced planar spacer (PS), wherein the planarity thereof very much simplifies the continuation of the process. The inventive method makes it possible to produce components exhibiting improved electric properties.
摘要:
Methods of forming air gaps between interconnects of integrated circuits and structures thereof are disclosed. A first insulating material is deposited over a workpiece, and a second insulating material having a sacrificial portion is deposited over the first insulating material. Conductive lines are formed in the first and second insulating layers. The second insulating material is treated to remove the sacrificial portion, and at least a portion of the first insulating material is removed, forming air gaps between the conductive lines. The second insulating material is impermeable as deposited and permeable after treating it to remove the sacrificial portion. A first region of the workpiece may be masked during the treatment, so that the second insulating material becomes permeable in a second region of the workpiece yet remains impermeable in the first region, thus allowing the formation of the air gaps in the second region, but not the first region.
摘要:
A high-k dielectric film, a method of forming the same and related semiconductor device are provided, wherein a bottom layer (B) of metal -silicon-oxynitride having a first nitrogen content (zB) and a first silicon content (xB), and a top layer (T) of metal -silicon-oxynitride having a second nitrogen content (zT) and a second silicon content (xT) are formed in such a way that the second nitrogen content (zT) is higher than the first nitrogen content (zB) and the second silicon content (xT) is higher than the first silicon content (xB).Thus, a dielectric film (2) with excellent leakage characteristics and a very high dielectric constant is formed.
摘要:
The invention relates to a semiconductor memory cell and to a method for producing the same, whereby a storage capacitor is linked with a select transistor (AT). The storage capacitor is configured as a contact hole capacitor (KK) in at least one contact hole for a source or drain region (S, D). The inventive semiconductor memory cell can be produced at especially reduced costs and allows for a high scale of integration.
摘要:
Die vorliegende Erfindung betrifft eine Anschlusselektrode (4) für Phasen-Wechsel-Materialien (5), ein zugehöriges Phasen-Wechsel-Speicherelement sowie ein zugehöriges Herstellungsverfahren, wobei in einem Elektrodenmaterial (E) eine Vielzahl von voneinander getrennten Isolationsgebieten (I) zumindest an der Anschlussoberfläche ausgebildet sind. Auf diese Weise verringert sich eine Gesamt-Kontaktfläche wodurch auch bei hohen Integrationsdichten eine erforderliche joulesche Erwärmung und somit Programmierung bei sehr kleinen Strömen realisiert werden kann.
摘要:
The invention relates to a field effect transistor with a heterostructure, comprising a support material, which has a stress-relieved monocrystalline semiconductor layer (3) consisting of a first semiconductor material (Si), a strained monocrystalline semiconductor layer (4), which has a semiconductor alloy (GexSi1-x), a fraction x of a second semiconductor material being freely selectable. In addition, a gate isolation layer (5) and a gate layer (6) are configured on the strained semiconductor layer (4). To define an undoped channel region (K), drain and source regions (D, S) are configured on either side of the gate layer at least in the strained semiconductor layer (4). The free selectability of the Ge fraction x allows any threshold voltage to be selected, thus permitting the production of modern logic semiconductor components.
摘要:
A quick startup procedure for a modem system utilizes known characteristics of a previously established communication channel to reduce the initialization period associated with subsequent connections over the same channel. In response to the establishment of a call, the modem devices determine whether the quick connect protocol is supported. If so, then the called modem transmits a modified answer tone to the calling modem. The calling modem analyzes the signal received in response to the modified answer tone to determine whether characteristics of the current channel are similar to stored characteristics associated with a previous connection over the same channel. If a channel "match" is found, then the modem devices carry out a quick initialization routine that eliminates, abbreviates, or modifies a number of procedures or protocols that are carried out in conventional modem startup processes. The general quick startup techniques may also be applied in the context of a quick reconnect procedure that can be performed in response to a temporary pausing or disconnecting of the data modem mode.
摘要:
The invention relates inter alia to a method for galvanising consisting, for example in structuring a copper layer (24) by means of a resist (26). A barrier layer (22) placed under said copper layer (24) is used for supplying a galvanisation current to the areas without the copper layer. The inventive method makes it possible to produce high quality soldering bumps.