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    Plasma treatment equipment and impedance measurement tool
    1.
    发明公开
    Plasma treatment equipment and impedance measurement tool 有权
    等离子处理设备和阻抗测量工具

    公开(公告)号：EP1406292A2

    公开(公告)日：2004-04-07

    申请号：EP03023423.1

    申请日：1999-11-25

    申请人： ALPS ELECTRIC CO., LTD. ,  Ohmi, Tadahiro

    发明人： Nakano, Akira ,  Kim, Sung, Chul ,  Fukuda, Koichi ,  Kasama, Yasuhiko ,  Ohmi, Tadahiro ,  Ono, Shoichi

    IPC分类号： H01J37/32 ,  G01R27/22

    CPC分类号： H01J37/32082 ,  G01R1/06772 ,  G01R27/02 ,  H01J37/32935

    摘要： The invention provides a plasma equipment which is advantageous in that the suscepter impedance is small, the dependence on the frequency is low, the power consumption efficiency is high, the film forming speed is faster with comparison with the conventional plasma equipment, and the film quality is high. Metalplates (80a, 80b) AC short between a chamber wall (10) and a shield (12) of an electrode of the same DC potential as the chamber.

    摘要翻译： 本发明提供了一种等离子体设备，其优点在于，感光体阻抗小，对频率的依赖性低，功率消耗效率高，与传统等离子体设备相比成膜速度更快，并且膜质量 高。 在腔室壁（10）和与腔室具有相同DC电势的电极的屏蔽（12）之间的金属板（80a，80b）AC短路。

    Plasma treatment equipment and impedance measurement tool
    5.
    发明公开
    Plasma treatment equipment and impedance measurement tool 有权
    Plasmabearbeitungsgerätund Werkzeug zur Impedanzmessung

    公开(公告)号：EP1030345A2

    公开(公告)日：2000-08-23

    申请号：EP99309434.1

    申请日：1999-11-25

    申请人： ALPS ELECTRIC CO., LTD. ,  Ohmi, Tadahiro

    发明人： Nakano, Akira ,  Kim, Sung Chul ,  Kasama, Yasuhiko ,  Ohmi, Tadahiro ,  Ono, Shoichi ,  Fukuda, Koichi

    IPC分类号： H01J37/32

    CPC分类号： H01J37/32082 ,  G01R1/06772 ,  G01R27/02 ,  H01J37/32935

    摘要： The invention provides a plasma equipment which is advantageous in that the suscepter impedance is small, the dependence on the frequency is low, the power consumption efficiency is high, the film forming speed is faster with comparison with the conventional plasma equipment, and the film quality is high. Metal plates (80a, 80b) AC short between a chamber wall (10) and a shield (12) of an electrode of the same DC potential as the chamber.

    摘要翻译： 本发明提供一种等离子体设备，其优点在于，阻抗较小，与频率的依赖性低，功耗效率高，与常规等离子体设备相比成膜速度更快，并且膜质量 高。 金属板（80a，80b）在室壁（10）和与腔室相同的DC电位的电极的屏蔽（12）之间交流短路。

    Ultrasonic cleaner and wet treatment nozzle comprising the same
    7.
    发明公开
    Ultrasonic cleaner and wet treatment nozzle comprising the same 有权
    超声波清洁器和包括其的湿处理喷嘴

    公开(公告)号：EP1321198A2

    公开(公告)日：2003-06-25

    申请号：EP03075663.9

    申请日：2000-03-07

    申请人： ALPS ELECTRIC CO., LTD.

    发明人： Ono, Shoichi ,  Mitsumori, Kenichi c/o Frontec Incorporated ,  Kasama, Yasuhiko c/o Frontec Incorporated ,  Haga, Nobuaki c/o Frontec Incorporated ,  Soejima, Junichiro ,  Takhashi, Norihisa ,  Fujie, Akio ,  Iwasaki, Mineo

    IPC分类号： B08B3/12 ,  B08B3/02

    CPC分类号： H01L21/67057 ,  B08B3/12 ,  H01L21/67051

    摘要： A second housing whose center portion is depressed and whose end portion around the center portion is formed like a visor is arranged around a first housing whose center portion is depressed and whose end portion around the center portion is formed like a visor, and a hollow portion is formed between the first housing and the second housing by sandwiching a packing between the end portions of the housings. Further, degassed water for preventing empty heating is filled in the hollow portion, and an ultrasonic transducer is placed on the surface of the center portion of the first housing. A weight for preventing the vibration of the wall is provided on the wall surface of the second housing. Since the vibration of the wall of the housing is suppressed by the weight, vibration energy returns toward the bottom surface of the center of the housing through water and is radiated from the bottom surface efficiently as ultrasonic waves.

    摘要翻译： 其中心部分被压下并且其中心部分周围的端部部分被形成为类似于帽檐的第二壳体被布置在第一壳体周围，该第一壳体的中心部分被压低并且其中心部分周围的端部被形成为像帽檐一样， 通过将密封件夹在壳体的端部之间而形成在第一壳体和第二壳体之间。 此外，在空心部分填充用于防止空热的脱气水，并且超声换能器放置在第一壳体的中心部分的表面上。 在第二壳体的壁表面上设置有用于防止壁振动的配重。 由于壳体的壁的振动被重量抑制，所以振动能量通过水向壳体的中心的底面返回，并且作为超声波从底面有效地辐射。

    Ultrasonic cleaner and wet treatment nozzle comprising the same
    9.
    发明公开
    Ultrasonic cleaner and wet treatment nozzle comprising the same 有权
    超声波清洁器和包括其的湿处理喷嘴

    公开(公告)号：EP1321198A3

    公开(公告)日：2003-07-02

    申请号：EP03075663.9

    申请日：2000-03-07

    申请人： ALPS ELECTRIC CO., LTD.

    发明人： Ono, Shoichi ,  Mitsumori, Kenichi c/o Frontec Incorporated ,  Kasama, Yasuhiko c/o Frontec Incorporated ,  Haga, Nobuaki c/o Frontec Incorporated ,  Soejima, Junichiro ,  Takhashi, Norihisa ,  Fujie, Akio ,  Iwasaki, Mineo

    IPC分类号： B08B3/12 ,  B08B3/02

    CPC分类号： H01L21/67057 ,  B08B3/12 ,  H01L21/67051

    摘要： A second housing (12) whose center portion (12a) is depressed and whose end portion (12b) around the center portion (12a) is formed like a visor is arranged around a first housing (11) whose center portion (11a) is depressed and whose end portion (11b) around the center portion (11a) is formed like a visor, and a hollow portion (14) is formed between the first housing (11) and the second housing (12) by sandwiching a packing (13) between the end portions (11b,12b) of the housings (11,12). Further, degassed water (15) for preventing empty heating is filled in the hollow portion (14), and an ultrasonic transducer (16) is placed on the surface of the center portion (11a) of the first housing (11). A weight (17) for preventing the vibration of the wall (12c) is provided on the wall surface of the second housing (12). Since the vibration of the wall (12c) of the housing (12) is suppressed by the weight (17), vibration energy returns toward the bottom surface of the center of the housing (12) through water and is radiated from the bottom surface efficiently as ultrasonic waves.

    摘要翻译： 其中心部分（12a）被压下并且其中心部分（12a）周围的端部（12b）形成为类似于帽檐的第二壳体（12）围绕中心部分（11a）被压下的第一壳体 （11a）周围的端部（11b）形成为像遮阳板一样的形状，在第一外壳（11）和第二外壳（12）之间夹有填料（13）形成中空部分（14） 在壳体（11,12）的端部（11b，12b）之间。 另外，在中空部14中填充防止空热的脱气水15，在第一壳体11的中央部11a的表面配置超声波振子16。 在第二壳体（12）的壁表面上设置有用于防止壁（12c）振动的重物（17）。 由于壳体12的壁12c的振动通过配重17被抑制，因此振动能量通过水向壳体12的中心的底面返回，并且从底面有效地放射 作为超声波。