公开(公告)号：EP1192674A4

公开(公告)日：2005-08-24

申请号：EP00928361

申请日：2000-04-25

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  CORTEZ EDWARD J ,  DIPAOLA J MARK ,  NETSCH ROBERT R

IPC分类号： B65G49/07 ,  H01L21/673 ,  H01L21/677 ,  H01L21/00

CPC分类号： H01L21/67775 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14

摘要： A universal SMIF pod interface and wafer cassette transfer apparatus (100) may be configured either as an indexer or as a load port opener. The apparatus includes both a port plate (102) having a central opening (175), and a port door (104) fitting within and sealing the central opening when no pod is present. The apparatus further includes a linear drive screw (120), a motor (114), and transmission (118, 124, 122) for rotating the linear drive screw. A carriage (128) is translatable vertically by means of the linear drive screw. As an indexer, the port plate mounts to the carriage so that the port plate is movable vertically, above the stationary port door. As a load port opener, the port door is mounted to the carriage so that the port door is movable vertically, below the stationary port plate.

公开(公告)号：EP1210282A4

公开(公告)日：2004-12-22

申请号：EP00947175

申请日：2000-07-10

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  NETSCH ROBERT ,  SULLIVAN PATRICK ,  FOSNIGHT WILLIAM J ,  SHENK JOSHUA ,  NOMA EDWIN

IPC分类号： B65G49/00 ,  B65D6/40 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67775 ,  Y10S414/135 ,  Y10S414/136

摘要： An ergonomic loading assembly (100) for an I/O port onto which a bare cassette may be easily loaded and unloaded isolates the operator and the I/O port after loading of a cassette to minimize safety risks and to minimize the amount of particulates and contaminants around the workpieces while on the port. The loading assembly (100) includes a cover assembly having a stationary cover section around the port plate (102), and two pivoting cover sections (112, 114) which open and close like jaws to allow a cassette to position within the cover assembly when opened and which enclose the cassette within the cover assembly when closed. The loading assembly further includes a pivoting deck (122) onto which the cassette is loaded when the pivoting cover sections are open. As the pivoting cover sections are closed, the pivoting deck rotates the cassette and seats the cassette on the port door of the port with the workpieces positioned in a horizontal orientation.

摘要翻译： 用于I / O端口的人体工程学加载组件（100），其上可以容易地加载和卸载裸露的盒子，在加载盒子之后隔离操作者和I / O端口，以最小化安全风险并且使微粒和 端口上工件周围的污染物。 装载组件（100）包括具有围绕端口板（102）的固定盖部分的盖组件以及两个枢转盖部分（112,114），其像钳口一样打开和闭合以允许盒在盒盖 打开并且在关闭时将盒子封闭在盖组件内。 装载组件还包括枢转盖板（122），当枢转盖部分打开时，盒子被装载到枢转盖板上。 当枢转盖部分关闭时，枢转平台旋转卡匣并将卡匣放置在端口的端口门上，同时工件定位在水平方向。

公开(公告)号：EP1252079A4

公开(公告)日：2004-06-30

申请号：EP00986267

申请日：2000-12-04

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  NETSCH ROBERT R ,  GOULD RICHARD

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/673 ,  H01L21/677 ,  B65G49/00 ,  H01L21/00 ,  H01L21/68

CPC分类号： G03F7/70525 ,  G03F7/70541 ,  G03F7/70741 ,  G03F7/7075 ,  H01L21/67769 ,  Y10S414/14

摘要： A wafer transport mechanism is disclosed capable of transferring workpiece cassettes (123) between lot boxes (130) and SMIF pods (116). The transport mechanism includes a frame (102) having a first support platform (114) on a first side of the frame for supporting a SMIF pod, and a second support platform (128) on a second side of the frame for supporting a lot box. The frame further includes a carrier transfer mechanism (112) which resides completely within the frame when in a home position. The transfer mechanism includes an arm (134) and a gripper (136) pivotally mounted to the arm. Once a SMIF pod and lot box are seated on their respective support platforms, the transfer mechanism transfers a cassette between the two containers.

公开(公告)号：EP1124745A4

公开(公告)日：2002-05-15

申请号：EP00950923

申请日：2000-08-01

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  GOULD RICHARD H

IPC分类号： B65G43/08 ,  B65G19/02 ,  B65G35/06 ,  B65G37/02 ,  H01L21/677 ,  B65G37/00 ,  B65G49/04

CPC分类号： H01L21/67706 ,  B65G19/02 ,  B65G35/06 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773

摘要： A transport system for transporting articles including a conveyor system (14) having a director (52, 70, 100). The conveyor system includes a drive rail (32) and a support rail (34) for supporting a transport carrier (12).

公开(公告)号：EP1159212A4

公开(公告)日：2009-09-30

申请号：EP99966286

申请日：1999-12-15

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  GOULD RICHARD H ,  BRAIN MICHAEL D ,  ADAMS DAVID V

IPC分类号： B65G47/46 ,  H01L21/00 ,  B65G1/00 ,  B65G19/02 ,  B65G47/90 ,  B65G49/07 ,  G01N35/04 ,  H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67763 ,  H01L21/67766 ,  H01L21/67769

公开(公告)号：EP1121672A4

公开(公告)日：2009-05-06

申请号：EP99954634

申请日：1999-10-13

申请人： ASYST TECHNOLOGIES

发明人： ROSENQUIST FREDERICK T ,  RICHARDSON BRUCE ,  FOSNIGHT WILLIAM J ,  BONORA ANTHONY C

IPC分类号： B65G49/00 ,  H01L21/00 ,  H01L21/67 ,  H01L21/673 ,  H01L21/68 ,  G08B21/00

CPC分类号： H01L21/67265

摘要： A wafer mapping system is disclosed mounted to the port door (22) of a process tool (20). As the port door, is lowered away from the access port (24) of the process tool in order to allow wafer (25) transfer through the port, the wafer mapping system according to the present invention detects the presence and position of the various wafers in the pod shell (32), which information may then be stored in memory for later use. As such, wafer mapping according to this system occurs without additional processing steps or time. The port door is lowered by a servo driver which allows the precise position of the port door to be identified at any given time. As such, the position of a wafer within the pod shell may be precisely identified by the wafer mapping system mounted on the port door as the door is lowered.

公开(公告)号：EP1042200A4

公开(公告)日：2004-06-30

申请号：EP98962091

申请日：1998-12-14

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  FOSNIGHT WILLIAM J ,  MARTIN RAYMOND S

IPC分类号： B65G49/00 ,  B65G49/07 ,  H01L21/673 ,  H01L21/677 ,  H01L21/00

CPC分类号： H01L21/67766 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/139 ,  Y10S414/141 ,  Y10T29/53 ,  Y10T29/53539

摘要： A system for opening and closing the port door (116) from the inside of an I/O mini-environment in a wafer processing system that can also store the door within the mini-environment. The system utilizes various gripping attachment (128) means which can be installed on the back of a robotic end effector (125). The end effector (125) can have various gripping means such as magnetic, vacuum, or electroactuating which cause the door to disengage from its sealing position.

公开(公告)号：EP1159214A4

公开(公告)日：2007-06-27

申请号：EP99966152

申请日：1999-12-13

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  GOULD RICHARD H

IPC分类号： B65G47/46 ,  B65G1/00 ,  B65G47/90 ,  B65G49/07 ,  H01L21/677 ,  B65G37/00

CPC分类号： H01L21/67775 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67763 ,  H01L21/67766 ,  H01L21/67769

摘要： A transfer system (10) for moving one or more articles (12) between a conveyor (14) and a station (16). The system (10) includes a transfer assembly (10) having a lifting mechanism (62) configured to engage the article (12) as it is carried by the conveyor (14), lift the article (12) to a raised position above the support (60) and lower the article (12) from the raised position to the conveyor (14). The assembly (10) also includes a displacement device (114) configured to move the article (12) from the raised position to a station (16), position the article (12) at the station (16), and return the article (12) from the station (16) to the raised position above the conveyor (14). The system (10) also includes the method of transferring an article (12) between a conveyor (14) having a pair of spaced rails (116) and a station (16) positioned to one side of the conveyor (14). The method includes engaging the underside of the article (12) between the rails (116) and lifting the article (12) to a raised position and moving the article (12) in a direction perpendicular to the conveyor (14) between the raised position and a position vicinal the station (16).

公开(公告)号：EP1075418A4

公开(公告)日：2004-10-20

申请号：EP99914037

申请日：1999-03-22

申请人： ASYST TECHNOLOGIES

发明人： FOSNIGHT WILLIAM J ,  BONORA ANTHONY C ,  MARTIN RAYMOND S ,  TATRO JAY

IPC分类号： H01L21/677 ,  H01L21/673 ,  B65B1/04

CPC分类号： H01L21/67376 ,  H01L21/67393

摘要： A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particules from wafers within a pod (21). The purge system includes seals at the interfaces between the gas inlet and removal lines (23, 25) to substantially prevent leakage at the interfaces.

公开(公告)号：EP1159213A4

公开(公告)日：2007-01-10

申请号：EP99966151

申请日：1999-12-13

申请人： ASYST TECHNOLOGIES

发明人： BONORA ANTHONY C ,  GOULD RICHARD H

IPC分类号： B65G47/46 ,  B65G1/00 ,  B65G47/90 ,  B65G49/07 ,  H01L21/677 ,  B65G37/02 ,  B65G47/34 ,  H01L21/68

CPC分类号： H01L21/67775 ,  H01L21/67706 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67763 ,  H01L21/67766 ,  H01L21/67769

摘要： A transfer system (10) and method (figure 16) for moving an article (12) between a conveyor (14) and a workstation (16). The transfer system (10) includes an elevator system (60) having a lift device (64) configured to engage the article carried by a conveyor (14) and raise the article (12) above the conveyor (14). The lift device (64) is movable between a stand-by position with the lift device (64) positioned for the movement of articles (12) past the lift device (64) along the conveyor (14), and an actuated position with the lift device holding the article (12) above the conveyor. The transfer system (10) also includes a support assembly (62) for supporting the article (12) vicinal a workstation. The support assembly (62) including a shelf (120) for retaining the article (12) at the workstation (16) and a displacement mechanism (126) for moving the shelf (120) between the conveyor (14) and the lift device (64). The method (figure 16) includes moving a support (62) to engage the article (12) and lift the article (12) above the conveyor (14), extending a load port shelf (120) to the conveyor (14) and inserting the shelf (120) between the article (12) and the conveyor (14). After the shelf (120) is extended, the method (figure 16) includes moving the support (62) to deposit the article (12) onto the shelf (120), and after the step of moving the support (62), the method (figure 16) includes retracting the shelf (120) to the load port (22).