公开(公告)号：EP4059064A1

公开(公告)日：2022-09-21

申请号：EP20888141.7

申请日：2020-11-10

Applicant: Applied Materials, Inc.

Inventor： SANGLE, Abhijeet Laxman ,  SHARMA, Vijay Bhan ,  KADAM, Ankur ,  RAMAKRISHNAN, Bharatwaj ,  SIVARAMAKRISHNAN, Visweswaren ,  XUE, Yuan

IPC: H01L41/18 ,  C23C14/08 ,  C23C14/34 ,  C23C14/58 ,  H01L41/22

公开(公告)号：EP4200917A1

公开(公告)日：2023-06-28

申请号：EP20950544.5

申请日：2020-08-24

Applicant: Applied Materials, Inc.

Inventor： SANGLE, Abhijeet Laxman ,  SHARMA, Vijay Bhan ,  XUE, Yuan ,  KADAM, Ankur ,  RAMAKRISHNAN, Bharatwaj ,  PAI, Uday ,  PATIL, Nilesh

IPC: H01L41/083 ,  H01L41/27

公开(公告)号：EP4059063A1

公开(公告)日：2022-09-21

申请号：EP20886854.7

申请日：2020-11-10

Applicant: Applied Materials, Inc.

Inventor： SANGLE, Abhijeet Laxman ,  SHARMA, Vijay Bhan ,  XUE, Yuan ,  PAI, Uday ,  RAMAKRISHNAN, Bharatwaj ,  KADAM, Ankur

IPC: H01L41/18 ,  H01L41/22

公开(公告)号：EP4196293A1

公开(公告)日：2023-06-21

申请号：EP21856727.9

申请日：2021-08-12

Applicant: Applied Materials, Inc.

Inventor： MANDAL, Abhishek ,  SCUDDER, Lance A ,  BRITZ, David Alexander ,  OHNO, Kenichi ,  DEEPAK, Nitin ,  GORADIA, Prerna Sonthalia ,  KADAM, Ankur

IPC: B08B3/08 ,  B08B3/12 ,  B08B3/10 ,  G01N17/00 ,  G01N21/27 ,  G01N21/31 ,  G01N21/33

公开(公告)号：EP4175772A1

公开(公告)日：2023-05-10

申请号：EP21833819.2

申请日：2021-06-04

Applicant: Applied Materials, Inc.

Inventor： MANDAL, Abhishek ,  DEEPAK, Nitin ,  GUPTA, Neha ,  GORADIA, Prerna Sonthalia ,  KADAM, Ankur ,  OHNO, Kenichi ,  BRITZ, David Alexander ,  SCUDDER, Lance A

IPC: B08B3/08 ,  B08B3/12 ,  C23C16/02 ,  B08B3/10 ,  C23C16/34 ,  C23C16/40

公开(公告)号：EP4028572A1

公开(公告)日：2022-07-20

申请号：EP20863668.8

申请日：2020-07-28

Applicant: Applied Materials, Inc.

Inventor： BAJAJ, Geetika ,  PAREEK, Yogita ,  GORADIA, Prerna Sonthalia ,  KADAM, Ankur

IPC: C23C16/44 ,  C23C16/40 ,  C23C16/455 ,  C23C16/02

公开(公告)号：EP4010916A1

公开(公告)日：2022-06-15

申请号：EP20851743.3

申请日：2020-06-22

Applicant: Applied Materials, Inc.

Inventor： BAJAJ, Geetika ,  PAREEK, Yogita ,  THAKARE, Darshan ,  GORADIA, Prerna Sonthalia ,  KADAM, Ankur ,  PAPKE, Kevin A.

IPC: H01J37/32 ,  C23C28/00 ,  C23C16/44

公开(公告)号：EP2183765A1

公开(公告)日：2010-05-12

申请号：EP08796547.1

申请日：2008-07-24

Applicant: Applied Materials, Inc.

Inventor： CHOI, Soo Young ,  KADAM, Ankur ,  CHAE, Yong Kee

IPC: H01L21/00

CPC classification number: H01L21/67236 ,  H01L21/67201

Abstract: Apparatus and methods of substrate temperature control during thin film solar cell manufacturing are provided. One method comprises performing a temperature stabilization process on a substrate to pre-heat the substrate for a time period in a first chamber, calculating a wait time period for a second chamber, wherein the wait time period is bases on the availability of the second chamber, the availability of a vacuum transfer robot adapted to transfer the substrate from the first chamber to the second chamber, or both, and adjusting the temperature stabilization time period to compensate for the loss of heat from the substrate during the wait time period.

公开(公告)号：EP2099949A1

公开(公告)日：2009-09-16

申请号：EP07865841.6

申请日：2007-12-19

Applicant: Applied Materials, Inc.

Inventor： LI, Yanping ,  YE, Yan ,  CHAE, Yong-Kee ,  WON, Tae Kyung ,  KADAM, Ankur ,  SHENG, Shuran ,  LI, Liwei

IPC: C23C14/00

CPC classification number: C23C14/086 ,  C23C14/0073 ,  H01L31/022466 ,  H01L31/1884 ,  Y02E10/50

Abstract: Methods for sputter depositing a transparent conductive oxide (TCO) layer are provided in the present invention. The transparent conductive oxide layer may be utilized as a back reflector in a photovoltaic device. In one embodiment, the method includes providing a substrate in a processing chamber, forming a first portion of a transparent conductive oxide layer on the substrate by a first sputter deposition step, and forming a second portion of the transparent conductive oxide layer by a second sputter deposition step.