FILM FORMING APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING APPARATUS

    公开(公告)号:EP4438768A1

    公开(公告)日:2024-10-02

    申请号:EP24164762.7

    申请日:2024-03-20

    发明人: ISHII, Ryuji

    摘要: A film forming apparatus includes an outer chamber, an inner chamber arranged inside the outer chamber and dividable into a first portion and a second portion, a driving mechanism configured to lift and lower the second portion along an elevator axis, and a plurality of supply paths arranged so as to be capable of individually supplying a plurality of source gases to a first space which is a space inside the inner chamber. The first portion includes a first seal, and the second portion includes a second seal to come into contact with the first seal. In a longitudinal section along a plane including the elevator axis, a surface of each of the first seal and the second seal has a non-linear shape.