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    RETARDING POTENTIAL TYPE ENERGY ANALYZER
    1.
    发明公开
    RETARDING POTENTIAL TYPE ENERGY ANALYZER 审中-公开

    公开(公告)号：EP3330998A4

    公开(公告)日：2018-08-01

    申请号：EP16886330

    申请日：2016-01-21

    Applicant: JAPAN SYNCHROTRON RADIATION RES INSTITUTE

    Inventor： MURO TAKAYUKI ,  MATSUSHITA TOMOHIRO

    IPC: H01J37/244 ,  H01J37/05 ,  H01J49/46

    CPC classification number: H01J49/488 ,  H01J37/05 ,  H01J37/244 ,  H01J49/022 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/24485

    Abstract: In a retarding potential type energy analyzer including a front grid electrode 21, reference grid electrode 22 and rear grid electrode 23 sequentially arranged, with a predetermined amount of potential difference given between the reference grid electrode 22 and the front grid electrode 21 to form an upward potential gradient as well as a potential difference given between the reference grid electrode 22 and the rear grid electrode 23 to form a downward potential gradient, the grid electrodes are arranged so that the distance between the reference grid electrode 22 and the rear grid electrode 23 is shorter than the distance between the reference grid electrode 22 and the front grid electrode 21, or the potential difference between the reference grid electrode 22 and the rear grid electrode 23 is made to be greater than the potential difference between the reference grid electrode 22 and the front grid electrode 21.

    Ion energy analyzer and electrically controlled geometric filter for same
    5.
    发明公开
    Ion energy analyzer and electrically controlled geometric filter for same 失效
    离子能量分析仪和电控几何滤波器用于这种分析仪

    公开(公告)号：EP0734044A3

    公开(公告)日：1997-07-23

    申请号：EP96103793.4

    申请日：1996-03-11

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Loewenhardt, Peter ,  Yin, Gerald Zheyao

    IPC: H01J37/05

    CPC classification number: H01J37/32935 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/057

    Abstract: An ion energy analyzer (100) having a micro-channel plate (104) where the geometric filtering characteristics of the micro-channel plate (104) are electrically controlled. The ion energy analyzer contains a metallic collector (116), a control grid (108) and a micro-channel plate (104), all formed into a cylindrical stack where the collector (116), control grid (108) and micro-channel plate (104) are separated by ceramic insulating washers. A control element is formed within each aperture (124) of the micro-channel plate (104) for controlling a critical angle of each aperture (124). A voltage is applied to the control element such that an electric field is generated within each micro-channel (124). By varying the magnitude of the electric field, the critical angle of the micro-channel plate (104) can be electrically controlled, and as such, certain ion trajectories can be selected for entry into the ion energy analyzer (100).

    Abstract translation: 离子能量分析仪（100），其具有其中的微通道板（104）的几何滤波特性被电控制的微通道板（104）。 离子能量分析仪含有金属收集器（116），控制栅极（108）和微通道板（104），所有的形成为圆筒堆，其中收集器（116），控制栅极（108）和微通道 板（104）由陶瓷制绝缘垫片分开。 控制元件设置在所述微通道板（104），用于控制每个孔（124）的临界角的每个孔（124）内形成。 电压被施加到在电场确实是每个微通道（124）内产生的控制元件的搜索。 通过改变电场的大小，所述微通道板（104）的临界角可电控制的，并作为求，某些离子轨迹可以被选择为进入离子能量分析仪（100）。

    Ion energy analyzer and electrically controlled geometric filter for same
    6.
    发明公开
    Ion energy analyzer and electrically controlled geometric filter for same 失效
    离子能量分析仪和电控几何滤波器用于这种分析仪

    公开(公告)号：EP0734044A2

    公开(公告)日：1996-09-25

    申请号：EP96103793.4

    申请日：1996-03-11

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Loewenhardt, Peter ,  Yin, Gerald Zheyao

    IPC: H01J37/05

    CPC classification number: H01J37/32935 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/057

    Abstract: An ion energy analyzer (100) having a micro-channel plate (104) where the geometric filtering characteristics of the micro-channel plate (104) are electrically controlled. The ion energy analyzer contains a metallic collector (116), a control grid (108) and a micro-channel plate (104), all formed into a cylindrical stack where the collector (116), control grid (108) and micro-channel plate (104) are separated by ceramic insulating washers. A control element is formed within each aperture (124) of the micro-channel plate (104) for controlling a critical angle of each aperture (124). A voltage is applied to the control element such that an electric field is generated within each micro-channel (124). By varying the magnitude of the electric field, the critical angle of the micro-channel plate (104) can be electrically controlled, and as such, certain ion trajectories can be selected for entry into the ion energy analyzer (100).

    Aberration-corrected wien ExB mass filter with removal of neutrals from the beam
    7.
    发明公开
    Aberration-corrected wien ExB mass filter with removal of neutrals from the beam 有权
    Aberrationskorrigierter Wien-ExB-Massenfilter mit Beseitigung von Neutralen aus dem Strahl

    公开(公告)号：EP2511935A1

    公开(公告)日：2012-10-17

    申请号：EP12164205.2

    申请日：2012-04-16

    Applicant: FEI Company

    Inventor： Tuggle, David ,  Parker, N. William ,  Utlaut, Mark

    IPC: H01J37/05

    CPC classification number: H01J37/05 ,  H01J37/317 ,  H01J2237/053 ,  H01J2237/055 ,  H01J2237/057 ,  H01J2237/31749

    Abstract: A mass filter for an ion beam system includes at least two stages (306U,306L) and reduces chromatic aberration. One embodiment includes two symmetrical mass filter stages, the combination of which reduces or eliminates chromatic aberration, and entrance and exit fringing field errors. Embodiments can also prevent neutral particles from reaching the sample surface and avoid crossovers in the beam path. In one embodiment, the filter can pass a single species of ion from a source that produces multiple species. In other embodiments, the filter can pass a single ion species with a range of energies and focus the multi-energetic ions at the same point on the substrate surface.

    Abstract translation: 用于离子束系统的质量过滤器包括至少两个级（306U，306L）并且减少色差。 一个实施例包括两个对称质量过滤器级，其组合减少或消除色差，以及入射和出射边缘场误差。 实施例还可以防止中性粒子到达样品表面，并避免光束路径中的交叉。 在一个实施方案中，过滤器可以从产生多种物质的源传递单种离子。 在其它实施例中，过滤器可以通过具有一定能量范围的单个离子种类并将多能量离子聚焦在衬底表面上的相同点。

    Charged particle source with integrated electrostatic energy filter
    8.
    发明公开
    Charged particle source with integrated electrostatic energy filter 有权
    带有集成静电能量过滤器的带电粒子源

    公开(公告)号：EP2453462A1

    公开(公告)日：2012-05-16

    申请号：EP11187991.2

    申请日：2011-11-07

    Applicant: FEI Company

    Inventor： Henstra, Sander

    IPC: H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/31713

    Abstract: The invention relates to a charged particle filter with an integrated energy filter. Where most filters used have a highly curved optical axis, and thus use parts with forms that are difficult to manufacture, the source according the invention uses electrodes surrounding a straight optical axis. Surprisingly the inventor found that it is well possible to deflect a beam of charged particles 106a quite far from the axis 104 showing respectable energy dispersion at an energy selecting slit 108 without introducing coma or astigmatism that cannot be corrected, provided that some of the electrodes (114, 116, 120, 122) are formed as 120°/60°/120°/60°. Such electrodes can be attached to each other by gluing or brazing of ceramic, and then series of a highly concentric bores can be formed by e.g. spark erosion.

    Abstract translation: 本发明涉及具有集成能量滤波器的带电粒子滤波器。 在大多数使用的滤光片具有高度弯曲的光轴并且因此使用具有难以制造的形状的部件的情况下，根据本发明的光源使用围绕直光轴的电极。 令人惊讶的是，本发明人发现，在能量选择狭缝108处显示出可观的能量分散的非常远离轴线104的带电粒子束106a很可能偏转，而不会引入不能校正的彗形像差或散光，假设一些电极 114,116,120,122）形成为120°/ 60°/ 120°/ 60°。 这样的电极可以通过粘合或钎焊陶瓷而彼此连接，然后一系列高度同心的孔可以通过例如一个或多个孔形成。 火花侵蚀。

    Charged particle source with integrated electrostatic energy filter
    9.
    发明公开
    Charged particle source with integrated electrostatic energy filter 审中-公开
    Quellefürgeladene Teilchen mit integriertem elektrostatischen Energiefilter

    公开(公告)号：EP2453461A1

    公开(公告)日：2012-05-16

    申请号：EP10190706.1

    申请日：2010-11-10

    Applicant: FEI Company

    Inventor： Henstra, Sander

    IPC: H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/09 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/31713

    Abstract: The invention relates to a charged particle filter with an integrated energy filter. Where most filters used have a highly curved optical axis, and thus use parts with forms that are difficult to manufacture, the source according the invention uses electrodes surrounding a straight optical axis. Surprisingly the inventor found that it is well possible to deflect a beam of charged particles 106a quite far from the axis 104 showing respectable energy dispersion at an energy selecting slit 108 without introducing coma or astigmatism that cannot be corrected, provided that some of the electrodes (114, 116, 120, 122) are formed as 120°/60°/120°/60°. Such electrodes can be attached to each other by gluing or brazing of ceramic, and then series of a highly concentric bores can be formed by e.g. spark erosion.

    Abstract translation: 本发明涉及带有集成能量滤波器的带电粒子滤波器。 如果大多数使用的滤光片具有高度弯曲的光轴，并且因此使用具有难以制造的形式的部件，则根据本发明的光源使用围绕直线光轴的电极。 令人惊奇的是，发明人发现，很有可能使带电粒子束106a偏离轴线104，从而在能量选择狭缝108处示出可显示的能量分散，而不引入不能校正的彗差或像散，只要一些电极 114,116,120,122）形成为120°/ 60°/ 120°/ 60°。 这样的电极可以通过陶瓷的胶合或钎焊而彼此附接，然后可以通过例如一些高度同心的孔来形成一系列高度同心的孔。 火花侵蚀

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