-
公开(公告)号:EP3358398A1
公开(公告)日:2018-08-08
申请号:EP18158049.9
申请日:2009-08-27
发明人: ITO, Haruyasu , MATSUMOTO, Naoya , INOUE, Takashi
IPC分类号: G02F1/01 , B23K26/06 , B23K26/073 , H01S3/10 , G02B27/00 , G11B7/1392 , G02B5/32
CPC分类号: G02B27/0025 , B23K26/00 , B23K26/03 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/36 , B23K26/364 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , B23K2101/40 , B23K2103/50 , G02B5/1876 , G02B5/32 , G02B21/0032 , G02B21/02 , G02B21/06 , G02B21/361 , G02B27/0068 , G02F1/01 , G02F2203/18
摘要: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.
-
公开(公告)号:EP3249441A1
公开(公告)日:2017-11-29
申请号:EP16740022.5
申请日:2016-01-12
发明人: MATSUMOTO, Naoya
CPC分类号: G01N21/64 , G02B21/0032 , G02B21/0036 , G02B21/0076 , G02B21/06 , G02B21/36 , G02B26/0808 , G02B26/0833 , G02B26/10 , G02B27/0031 , G02F1/01
摘要: An image acquisition device includes a spatial light modulator modulating irradiation light, a control unit controlling a modulating pattern so that a plurality of light converging points are formed in an observation object, a light converging optical system converging the modulated irradiation light, a scanning unit scanning positions of the plurality of light converging points in the observation object in a scanning direction intersecting an optical axis of the light converging optical system, and a photodetector configured to detect a plurality of observation lights generated from the plurality of light converging points. The control unit sets a center spacing between adjacent light converging points on the basis of the positions of the plurality of light converging points in a direction of the optical axis.
摘要翻译: 一种图像获取设备,包括:调制照射光的空间光调制器;控制调制图案的控制单元,使得多个聚光点形成在观察对象中;聚光光学系统,聚焦调制的照射光;扫描单元扫描 在与所述聚光光学系统的光轴交叉的扫描方向上的所述观察对象中的所述多个聚光点的位置以及被配置为检测从所述多个聚光点产生的多个观察光的光检测器。 控制单元基于多个聚光点在光轴方向上的位置来设定相邻聚光点之间的中心间隔。
-
公开(公告)号:EP3249440A1
公开(公告)日:2017-11-29
申请号:EP16740015.9
申请日:2016-01-12
发明人: MATSUMOTO, Naoya , WATANABE, Koyo
CPC分类号: G01N21/6456 , G01N21/64 , G02B21/002 , G02B21/06 , G02B21/08 , G02B26/10 , G02F1/01 , G02F1/13318 , G02F1/133788
摘要: An image acquisition device includes a spatial light modulator modulating irradiation light, a control unit controlling a modulating pattern so that first and second light converging points are formed in an observation object, a light converging optical system converging the irradiation light, a scanning unit scanning positions of the first and second light converging points in the observation object in a scanning direction intersecting an optical axis of the light converging optical system, and a photodetector detecting first observation light generated from the first light converging point and second observation light generated from the second light converging point. The photodetector has a first detection area for detecting the first observation light and a second detection area for detecting the second observation light. The positions of the first and second light converging points are different from each other in a direction of the optical axis.
摘要翻译: 一种图像获取设备,包括:调制照射光的空间光调制器;控制调制图案以使得第一和第二聚光点形成在观察对象中的控制单元;会聚照射光的聚光光学系统;扫描单元扫描位置 在与所述聚光光学系统的光轴交叉的扫描方向上的所述观察对象中的所述第一聚光点和所述第二聚光点,以及光检测器,其检测从所述第一聚光点产生的第一观察光和从所述第二光产生的第二观察光 会聚点。 光检测器具有用于检测第一观察光的第一检测区域和用于检测第二观察光的第二检测区域。 第一和第二聚光点的位置在光轴方向上彼此不同。
-
4.
公开(公告)号:EP2088462A1
公开(公告)日:2009-08-12
申请号:EP07807355.8
申请日:2007-09-14
CPC分类号: G02B27/09 , G02B5/3025 , G02B21/32 , G02B26/06
摘要: The light beam generator 1 is provided with a laser light source 10, an optical phase modulation element 15 and others. The optical phase modulation element 15 receives coherent light output from the laser light source 10 and passed through a beam splitter 14 to modulate a phase of the light depending on a position on the beam cross section of the light, and outputs the light after the phase modulation to the beam splitter 14. A polar coordinate system (r, θ) in which a predetermined position is given as an origin is set on the beam cross section of the light input in the optical phase modulation element 15, and when (p + 1) domains divided by p (number of pieces) circumferences in which the predetermined position is given as a center are set, of these (p + 1) domains, a phase modulation amount φ at each position inside an even numbered domain counted from the inside is expressed by a formula of "φ = q θ", and a phase modulation amount φ at each position inside an odd numbered domain counted from the inside is expressed by a formula of "φ = q θ + π".
摘要翻译: 光束发生器1设置有激光光源10,光相位调制元件15等。 光相位调制元件15接收从激光光源10输出的相干光,并通过分束器14,根据光束横截面上的位置调制光的相位,并输出相位后的光 在光相位调制元件15中的光输入的光束横截面上设定以预定位置为原点的极坐标系(r,¸),当(p + 在这些(p + 1)域中,设定了以p(个数)作为中心设定了规定位置的周期的域(p = 1)的区域中的偶数域的每个位置的相位调制量Æ 内部由“Æ= q¸”的公式表示,并且从内部计数的奇数域内的每个位置处的相位调制量Æ由“Æ= q¸+À”的公式表示。
-
公开(公告)号:EP2325689B1
公开(公告)日:2018-03-28
申请号:EP09809970.8
申请日:2009-08-27
发明人: ITO, Haruyasu , MATSUMOTO, Naoya , INOUE, Takashi
IPC分类号: G02F1/01 , B23K26/06 , B23K26/073 , H01S3/10 , G02B27/00 , G11B7/1392 , G02B5/32
CPC分类号: G02B27/0025 , B23K26/00 , B23K26/03 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/36 , B23K26/364 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , B23K2101/40 , B23K2103/50 , G02B5/1876 , G02B5/32 , G02B21/0032 , G02B21/02 , G02B21/06 , G02B21/361 , G02B27/0068 , G02F1/01 , G02F2203/18
摘要: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than nxd and not more than nxd+”s from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as As.
-
公开(公告)号:EP3611549A1
公开(公告)日:2020-02-19
申请号:EP18783927.9
申请日:2018-04-10
发明人: MATSUMOTO, Naoya
摘要: A microscope apparatus 1A includes SLMs 33, 36 each having a modulation plane, an objective lens 12 disposed on an optical path between the modulation plane and an object B, and a computer 43 for controlling the SLMs 33, 36 on the basis of a modulation pattern including a correction pattern for correcting aberration caused by a refractive index interface of the object B. The computer 43 determines a position of the correction pattern in the modulation pattern on the basis of inclination information of the refractive index interface with respect to a plane perpendicular to an optical axis of the objective lens 12. Thus, an aberration correction method and an optical apparatus capable of easily performing aberration correction within a short time even when the refractive index interface of the object is inclined with respect to the optical axis are realized.
-
公开(公告)号:EP3138654B1
公开(公告)日:2018-03-14
申请号:EP16185966.5
申请日:2009-08-24
IPC分类号: B23K26/00 , B23K26/06 , B23K26/067 , B23K26/073 , G02F1/061 , B41M5/26 , B23K26/03 , B23K26/064
CPC分类号: G02B5/32 , B23K26/032 , B23K26/064 , B23K26/0643 , B23K26/066 , G03H1/2294 , G03H2001/0094 , G03H2210/452 , G03H2225/32 , G03H2240/51
摘要: A laser processing device 1 includes a laser light source 10, a spatial light modulator 20, a control section 22, and a condensing optical system 30. The spatial light modulator 20 is input with a laser light output from the laser light source 10, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section 22 causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position existing in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. On the other hand, the control section 22 causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold X.
-
公开(公告)号:EP3138654A1
公开(公告)日:2017-03-08
申请号:EP16185966.5
申请日:2009-08-24
IPC分类号: B23K26/00 , B23K26/06 , B23K26/067 , B23K26/073 , G02F1/061 , B41M5/26 , B23K26/03 , B23K26/064
CPC分类号: G02B5/32 , B23K26/032 , B23K26/064 , B23K26/0643 , B23K26/066 , G03H1/2294 , G03H2001/0094 , G03H2210/452 , G03H2225/32 , G03H2240/51
摘要: A laser processing device 1 includes a laser light source 10, a spatial light modulator 20, a control section 22, and a condensing optical system 30. The spatial light modulator 20 is input with a laser light output from the laser light source 10, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section 22 causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position existing in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. On the other hand, the control section 22 causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold X.
-
-
-
-
-
-
-