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    Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method
    1.
    发明公开
    Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method 有权
    透镜与这样的透镜和制造方法的带电粒子多子束带电粒子束曝光设备

    公开(公告)号：EP2434522A1

    公开(公告)日：2012-03-28

    申请号：EP11195133.1

    申请日：2003-07-08

    申请人： Canon Kabushiki Kaisha ,  Hitachi Ltd.

    发明人： Ono, Haruhito ,  Nagae, Kenichi ,  Takakuwa, Masaki ,  Nakayama, Yoshinori ,  Muto, Harunobu

    IPC分类号： H01J37/317 ,  H01J37/12 ,  B82Y10/00

    CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/1205

    摘要： There is provided a multi-charged beam lens constituted by stacking, via fiber chips (212) serving as insulator members along the optical path of a charged beam, a plurality of electrodes (201a-201c) having a charged beam passing region (202) where a plurality of charged beam apertures are formed. The electrodes have shield apertures (203) between the charged beam passing region and the fiber chips. A conductive shield (204) extends through the shield apertures without contacting the electrodes, and cuts off a straight path which connects the charged beam passing region (202) and the fiber chips (212) serving as insulator members. This prevents the influence of charge-up of the insulator members on an electron beam in the multi-charged beam lens.

    摘要翻译： 提供了一种通过层叠构成的多带电束透镜，通过作为绝缘体构件沿着带电束的光路光纤芯片（212），电极（201A-201C），其具有带电束通过区域的多个（202） 其中带电束孔径的形成有多个。 电极具有防护孔（203）的带电束通过区域和纤维芯片之间。 导电屏蔽（204）通过屏蔽延伸没有孔接触电极上，并切断连接所述带电束通过区域（202）和作为绝缘体构件的纤维片（212）的直的路径。 这防止了绝缘构件的上充电的电子束在多带电束透镜的影响。

    Charged-particle beam lens
    2.
    发明公开
    Charged-particle beam lens 有权
    LinsefüreinenLadungsträgerstrahl

    公开(公告)号：EP1383158A2

    公开(公告)日：2004-01-21

    申请号：EP03254334.0

    申请日：2003-07-08

    申请人： CANON KABUSHIKI KAISHA ,  Hitachi, Ltd.

    发明人： Ono, Haruhito, c/o Canon Kabushiki Kaisha ,  Nagae, Kenichi, Canon Kabushiki Kaisha ,  Takakuwa, Masaki ,  Nakayama, Yoshinori ,  Muto, Harunobu

    IPC分类号： H01J37/317

    CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/1205

    摘要： There is provided a multi-charged beam lens constituted by stacking, via fiber chips (212) serving as insulator members along the optical path of a charged beam, a plurality of electrodes (201a-201c) having a charged beam passing region (202) where a plurality of charged beam apertures are formed. The electrodes have shield apertures (203) between the charged beam passing region and the fiber chips. A conductive shield (204) extends through the shield apertures without contacting the electrodes, and cuts off a straight path which connects the charged beam passing region (202) and the fiber chips (212) serving as insulator members. This prevents the influence of charge-up of the insulator members on an electron beam in the multi-charged beam lens.

    摘要翻译： 提供了一种多带电波束透镜，其通过沿着带电光束的光路用作绝缘体构件的光纤芯片（212）堆叠，具有带电光束通过区域（202）的多个电极（201a-201c） 其中形成多个带电束孔。 电极在带电光束通过区域和光纤芯片之间具有屏蔽孔（203）。 导电屏蔽（204）在不接触电极的情况下延伸穿过屏蔽孔，并且切断连接充电光束通过区域（202）和用作绝缘体构件的光纤芯片（212）的直线路径。 这防止了多电荷束透镜中绝缘体构件对电子束的充电的影响。