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1.发明公开WET DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND METHOD FOR USE THEREOF 审中-公开NASS可显影底部抗反射涂层组合物及其使用方法
公开(公告)号：EP2013659A4
公开(公告)日：2011-12-07
申请号：EP07760816
申请日：2007-04-18
Applicant: IBM
Inventor： CHEN KUANG-JUNG , KHOJASTEH MAHMOUD , KWONG RANEE WAI-LING , LAWSON MARGARET C , LI WENJIE , PATEL KAUSHAL S , VARANASI PUSHKARA R
IPC: G03F7/09 , C08F220/28
CPC classification number: G03F7/091 , C08F220/28 , C08F222/40 , C08F232/08 , Y10S430/151
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公开(公告)号：EP2510538A4
公开(公告)日：2014-03-26
申请号：EP10836729
申请日：2010-12-10
Applicant: ADVANCED TECH MATERIALS , IBM
Inventor： AFZALI-ARDAKANI ALI , BAUM THOMAS H , BOGGS KARL E , COOPER EMANUEL I , CYWAR DOUGLAS , KERN MATTHEW , KHOJASTEH MAHMOUD , TOTIR GEORGE GABRIEL , NUNES RONALD W
IPC: H01L21/311 , G03F7/42
CPC classification number: H01L21/31133 , G03F7/423
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3.发明公开LOW REFRACTIVE INDEX POLYMERS AS UNDERLAYERS FOR SILICON-CONTAINING PHOTORESISTS 审中-公开具有低折射率层的一种硅基光致抗蚀剂聚合物
公开(公告)号：EP1825325A4
公开(公告)日：2010-05-26
申请号：EP05857596
申请日：2005-11-30
Applicant: IBM
Inventor： HUANG WU-SONG , BURNS SEAN , KHOJASTEH MAHMOUD
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