摘要:
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; ; and a loader 60 for transferring the object to the stage system through the loading chambers.
摘要:
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; ; and a loader 60 for transferring the object to the stage system through the loading chambers.
摘要:
The flux density Bct is applied at the center area of the electrode. The flux density Bct is adjusted within the range A of 0.75 to 0.9 times greater than the axial flux density Bcr which gives the lowest arc voltage between the electrodes against each breaking current. The axial flux density monotonously increases from the center to the circumferential area of the electrode. Here, the radial position where the axial flux density Bcr which gives the lowest arc voltage Vmin is adjusted within the region B of 20% to 40% of the radius of the electrode. The axial flux density is made monotonously increase in an outer area from the region B and give the maximum value Bp in a circumferential area equal to or beyond 70% of the radius of the electrode. The maximum value Bp is adjusted within the range C of 1.4 to 2.4 times greater than the flux density Bct given at the electrode center. Further, the circumferential distribution of flux density passing the radial position where the axial flux density gives the maximum value is made fluctuate high and low. The circumferential distribution of flux density is adjusted to give at least two peaks on the circle. Here, the greatest value Bmax and the smallest value Bmin in the circumferential distribution of flux density are adjusted within the range of 1.4 to 2.4 times greater than the axial flux density Bct of the electrode center.
摘要:
Disclosed is an electrode arrangement of a vacuum circuit breaker for making and breaking electrical connection. The electrode arrangement has: a pair of contact members which are adopted for making contact to and release from each other by relatively moving to and from each other along a predetermined direction; a pair of electrically conductive bars being connected to the above pair of contact members, respectively, for providing electric conduction to the contact members; and a magnetizing device with a magnetic body for generating magnetic field parallel to the predetermined direction between the contact members. The magnetic body is composed of an iron alloy comprising 0.02 to 1.5 % by weight of carbon and iron. The iron alloy may further contain at least one of manganese and silicon.
摘要:
An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; ; and a loader 60 for transferring the object to the stage system through the loading chambers.
摘要:
The flux density Bct is applied at the center area of the electrode. The flux density Bct is adjusted within the range A of 0.75 to 0.9 times greater than the axial flux density Bcr which gives the lowest arc voltage between the electrodes against each breaking current. The axial flux density monotonously increases from the center to the circumferential area of the electrode. Here, the radial position where the axial flux density Bcr which gives the lowest arc voltage Vmin is adjusted within the region B of 20% to 40% of the radius of the electrode. The axial flux density is made monotonously increase in an outer area from the region B and give the maximum value Bp in a circumferential area equal to or beyond 70% of the radius of the electrode. The maximum value Bp is adjusted within the range C of 1.4 to 2.4 times greater than the flux density Bct given at the electrode center. Further, the circumferential distribution of flux density passing the radial position where the axial flux density gives the maximum value is made fluctuate high and low. The circumferential distribution of flux density is adjusted to give at least two peaks on the circle. Here, the greatest value Bmax and the smallest value Bmin in the circumferential distribution of flux density are adjusted within the range of 1.4 to 2.4 times greater than the axial flux density Bct of the electrode center.
摘要:
Disclosed is an electrode arrangement of a vacuum circuit breaker for making and breaking electrical connection. The electrode arrangement has: a pair of contact members which are adopted for making contact to and release from each other by relatively moving to and from each other along a predetermined direction; a pair of electrically conductive bars being connected to the above pair of contact members, respectively, for providing electric conduction to the contact members; and a magnetizing device with a magnetic body for generating magnetic field parallel to the predetermined direction between the contact members. The magnetic body is composed of an iron alloy comprising 0.02 to 1.5 % by weight of carbon and iron. The iron alloy may further contain at least one of manganese and silicon.