公开(公告)号：EP2583300A4

公开(公告)日：2015-09-02

申请号：EP11796320

申请日：2011-06-14

申请人： KLA TENCOR CORP

发明人： HILL ANDREW V ,  MANASSEN AMNON ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SELIGSON JOEL ,  SVIZHER ALEXANDER ,  WANG DAVID Y ,  ROTTER LAWRENCE D ,  DE VEER JOHANNES D

IPC分类号： G01N21/47 ,  G03F7/20

CPC分类号： G02B27/141 ,  G01N21/474 ,  G01N21/4788 ,  G01N2021/4792 ,  G02B27/145 ,  G03F7/70633

摘要： Systems and methods for discrete polarization scatterometry are provided.

公开(公告)号：EP2724361A4

公开(公告)日：2015-03-18

申请号：EP12803940

申请日：2012-06-07

申请人： KLA TENCOR CORP

发明人： MANASSEN AMNON ,  SELIGSON JOEL ,  SAPIENS NOAM

IPC分类号： H01L21/027 ,  G01J1/42 ,  G02B26/06 ,  G02B26/08 ,  G02B27/00

CPC分类号： G01J1/4257 ,  G02B21/0016 ,  G02B21/082 ,  G02B21/365 ,  G02B26/0833 ,  G03F7/70633

摘要： An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.

公开(公告)号：EP2474027A4

公开(公告)日：2013-03-20

申请号：EP10814430

申请日：2010-09-01

申请人： KLA TENCOR CORP

发明人： KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SVIZHER ALEXANDER ,  SELIGSON JOEL ,  HILL ANDREW ,  BACHAR OHAD ,  MANASSEN AMNON ,  CHUANG YUNG-HO ALEX ,  SELA ILAN ,  MARKOWITZ MOSHE ,  NEGRI DARIA ,  ROTEM EFRAIM

IPC分类号： G01N21/956

CPC分类号： G01N21/47 ,  G01B11/02 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/105 ,  G03F7/70625 ,  G03F7/70633

摘要： Various metrology systems and methods are provided.