-
-
公开(公告)号：EP4014247A1
公开(公告)日：2022-06-22
申请号：EP20754652.4
申请日：2020-07-28
发明人： ROMANO, Lucia , STAMPANONI, Marco , JEFIMOVS, Konstantins , KAGIAS, Matias , COMAMALA, Joan Vila
IPC分类号： H01L21/306 , H01L21/67 , G02B5/18 , B81C1/00 , H01L21/308 , H01L31/028 , C09K13/08 , H01L31/18 , B82Y40/00
-
公开(公告)号：EP3780070A1
公开(公告)日：2021-02-17
申请号：EP19191781.4
申请日：2019-08-14
发明人： ROMANO, Lucia , JEFIMOVS, Konstantins , KAGIAS, Matias , COMAMALA, Joan Vila , STAMPANONI, Marco
IPC分类号： H01L21/306 , H01L21/67 , G02B5/18 , B81C1/00 , H01L21/308 , H01L31/028 , C09K13/08 , H01L31/18 , B82Y40/00
摘要： The present disclosure provides a method to fabricate high aspect ratio patterns in a semiconductor substrate that are elements of photonic devices by using a continuous metal mesh and etching in presence of air in a continuous flow and an etchant. In one approach, a stabilizing catalyst that involves the formation of a stable metal-semiconductor alloy allows to etch the substrate in vertical direction even in conditions of very low oxidant concentration (e.g. the oxidizer species being present in the air) without any external bias or magnetic field so to realize very high aspect ratio structures in the semiconductor substrate. The metal layer on the semiconductor substrate reacts with the oxidant contained in the air and catalyzes the semiconductor etching by the etchant. In one approach, the etchant is supplied by evaporating a water diluted HF solution. Air in continuous flow in proximity of the metal layer allows to maintain constant the oxidant concentration in proximity of the metal layer. This favors the mass transport of the reactant species and the etching by-products, thereby the process can continue for long time in order to form very high aspect ratio structures. Once the etched semiconductor structure is formed, the continuous air flow supports the reactant species diffusing through the etched semiconductor structure so to maintain a uniform etching rate of high aspect ratio structure. The continuous air flow supports the diffusion of the reaction by-products so to avoid the poisoning of the etching reaction. Structures with aspect ratios in the order of 10000:1 can be obtained with this method. The method has excellent capability of pattern transfer at the nanometer scale. Since the oxidant can be provided by the normal air, the system has particular advantage for implementation as it does not require any handling of hazardous and inflammable gases such as O 2 gas or instable chemicals, such as H 2 O 2 .
-
公开(公告)号：EP2400891B1
公开(公告)日：2017-07-19
申请号：EP10703260.9
申请日：2010-02-03
发明人： ZHU, Peiping , WU, Ziyu , STAMPANONI, Marco
CPC分类号： G01N23/04 , A61B6/00 , A61B6/4291 , A61B6/484
-
5.发明公开
公开(公告)号：EP3140641A1
公开(公告)日：2017-03-15
申请号：EP15707898.1
申请日：2015-02-25
CPC分类号： G01N23/083 , A61B6/4035 , A61B6/4208 , A61B6/4291 , A61B6/484 , G01N23/04 , G01N2223/303 , G21K1/025 , G21K1/067 , G21K2207/005
摘要： Among the existent X-ray phase-contrast modalities, grating interferometry appears as a very promising technique for commercial applications, since it is compatible with conventional X-ray tubes and is robust from a mechanical point of view. However, since applications such as medical imaging and homeland security demand covering a considerable field of view, the fabrication of large-area gratings, which is known to be challenging and expensive, would be needed. A scanning setup is a good solution for this issue, because it uses cheaper line instead of large-area 2D detectors and, therefore, would require smaller gratings. In such a setup, the phase-retrieval using the conventional phase-stepping approach would be very slow, so having a faster method to record the signals becomes fundamental. To tackle this problem, the present invention proposes a scanning-mode grating interferometer design, in which a grating is tilted to form Moiré fringes perpendicular to the grating lines. The sample is then translated along the fringes, so each line detector records a different phase step for each slice of the sample.
摘要翻译： 在现有的X射线相位对比模式中，光栅干涉测量法作为商业应用中非常有前途的技术出现，因为它与常规X射线管兼容并且从机械角度来看是稳健的。 然而，由于诸如医学成像和国土安全需求等应用覆盖相当大的视野，因此将需要制造大面积光栅，其被认为是具有挑战性且昂贵的。 扫描设置对于这个问题是一个很好的解决方案，因为它使用更便宜的线而不是大面积的2D检测器，因此需要更小的光栅。 在这样的设置中，使用传统相位步进方法的相位检索将非常缓慢，因此具有用于记录信号的更快方法变得基本。 为了解决这个问题，本发明提出一种扫描模式光栅干涉仪设计，其中光栅倾斜以形成垂直于光栅线的莫尔条纹。 然后将样品沿着条纹平移，因此每条线检测器为样品的每个切片记录不同的相位步长。
-
公开(公告)号：EP3517939A1
公开(公告)日：2019-07-31
申请号：EP18153643.4
申请日：2018-01-26
IPC分类号： G01N23/20 , A61B6/00 , G01N23/201 , G21K1/06 , G01N23/041
摘要： X-ray scattering imaging can provide complementary information about the unresolved microstructures of a sample. The scattering signal can be accessed with various methods based on coherent illumination, which span from self-imaging to speckle scanning. The directional sensitivity of the existing methods is limited to a few directions on the imaging plane and it requires the scanning of the optical components, or the rotation of either the sample or the imaging setup, if the full range of possible scattering directions is desired. Recently such an invention has been presented. However, the method requires a very high resolution and is only applicable to imaging setups where this is possible, such as synchrotron facilities. The present invention discloses a new arrangement that allows the simultaneous acquisition of the scattering images in all possible directions in a single shot without the need of high resolution or highly coherence sources. This is achieved by a specialized optical element and means of recording the generated fringe with sufficient spatial resolution.
-
7.发明授权
公开(公告)号：EP3140641B1
公开(公告)日：2018-01-31
申请号：EP15707898.1
申请日：2015-02-25
CPC分类号： G01N23/083 , A61B6/4035 , A61B6/4208 , A61B6/4291 , A61B6/484 , G01N23/04 , G01N2223/303 , G21K1/025 , G21K1/067 , G21K2207/005
摘要： Among the existent X-ray phase-contrast modalities, grating interferometry appears as a very promising technique for commercial applications, since it is compatible with conventional X-ray tubes and is robust from a mechanical point of view. However, since applications such as medical imaging and homeland security demand covering a considerable field of view, the fabrication of large-area gratings, which is known to be challenging and expensive, would be needed. A scanning setup is a good solution for this issue, because it uses cheaper line instead of large-area 2D detectors and, therefore, would require smaller gratings. In such a setup, the phase-retrieval using the conventional phase-stepping approach would be very slow, so having a faster method to record the signals becomes fundamental. To tackle this problem, the present invention proposes a scanning-mode grating interferometer design, in which a grating is tilted to form Moiré fringes perpendicular to the grating lines. The sample is then translated along the fringes, so each line detector records a different phase step for each slice of the sample.
-
8.发明公开IMAGE FUSION SCHEME FOR DIFFERENTIAL PHASE CONTRAST IMAGING 有权BILDFUSIONSSCHEMAFÜRDIFFERENZIELLE PHASENKONTRASTBILDGEBUNG
公开(公告)号：EP3005289A1
公开(公告)日：2016-04-13
申请号：EP14743990.5
申请日：2014-05-28
发明人： STAMPANONI, Marco , WANG, Zhentian
CPC分类号： G06T7/0012 , A61B6/481 , A61B6/483 , A61B6/484 , A61B6/502 , A61B6/5235 , A61B6/5258 , G06K9/52 , G06T5/50 , G06T7/60 , G06T7/73 , G06T11/003 , G06T11/60 , G06T2207/10072 , G06T2207/10116 , G06T2207/20052 , G06T2207/20064 , G06T2207/20221 , G06T2207/30068
摘要： The latest progresses in breast imaging using differential phase contrast techniques pose the question of how to fuse multiple information sources, yielded by absorption, differential phase, and scattering signals, into a single, informative image for clinical diagnosis. It is proposed to use an image fusion scheme based on a multiple-resolution framework. The three signals are first transformed into multiple bands presenting information at different frequencies and then a two-step processing follows: (1) intra-band processing enhances the local signal-to-noise ratio using a novel noise estimation method and context modeling; and (2) inter-band processing weights each band by considering their characteristics and contributions, and suppressing the global noise level. The fused image, looking similar to a conventional mammogram but with significantly enhanced detail features, is reconstructed by inverse transform. The fused image is compatible with clinical settings and enables the radiologists to use their years of diagnosis experiences in mammography.
摘要翻译： 使用差分相位对比技术在乳腺成像中的最新进展提出了如何将由吸收，差分相位和散射信号产生的多个信息源融合成用于临床诊断的单个信息图像的问题。 提出了基于多分辨率框架的图像融合方案。 首先将三个信号转换成呈现不同频率信息的多个频带，然后进行两步处理：（1）使用新颖的噪声估计方法和上下文建模，带内处理增强了本地信噪比; 和（2）通过考虑其特征和贡献，并且抑制全局噪声水平，频带间处理对每个频带进行加权。 通过逆变换重建融合图像，看起来类似于常规乳房X线照片但具有显着增强的细节特征。 融合图像与临床设置兼容，使放射科医师能够在乳腺X线照相术中使用他们多年的诊断经验。
-
9.发明公开A SYSTEM FOR NON-INVASIVELY CLASSIFICATION OF DIFFERENT TYPES OF MICRO-CALCIFICATIONS IN HUMAN TISSUE 有权系统ZUR NICHTINVASIVEN KLASSIFIZIERUNG VON VERSCHIEDENEN TYPEN VON MIKROKALK在MENSCHLICHEM GEWEBE
公开(公告)号：EP2817781A1
公开(公告)日：2014-12-31
申请号：EP13704402.0
申请日：2013-02-07
发明人： STAMPANONI, Marco , WANG, Zhentian
CPC分类号： A61B6/502 , A61B6/4035 , A61B6/4291 , A61B6/483 , A61B6/484 , A61B6/5217 , G06T7/0012 , G06T7/174 , G06T11/005 , G06T2207/10081 , G06T2207/10116 , G06T2207/20212 , G06T2207/30068 , G06T2211/40
摘要： The present invention proposes a noninvasive method to distinguish two types of (micro)-calcification by x-ray imaging in mammography. Two major types of (micro)- calcification are found and confirmed by histopathology and they are correlated to benign and malignant breast lesions. Distinguishing them noninvasively will significantly improve early breast cancer diagnosis. This invention is based on the fact that these two types of (micro)- calcifications show opposite absorption and small-angle scattering signals in x-ray imaging. The imaging system, which can record these two signals of the breast tissue simultaneously (for instance, an x-ray grating interferometer), can be used to uniquely determine the micro- calcification type. The suggested invention is expected to be used in mammography to improve early breast cancer diagnosis, increase diagnosis accuracy and decrease the biopsy rate.
摘要翻译： 非侵入性方法在乳房X线照相术中通过x射线成像区分两种类型的微钙化。 通过组织病理学发现并证实了两种主要的微钙化，并且它们与良性和恶性乳腺病变相关。 区分他们非侵略性将显着改善早期乳腺癌的诊断。 这是基于这两种类型的微钙化在X射线成像中显示相反的吸收和小角度散射信号的事实。 可以同时使用X射线光栅干涉仪同时记录乳房组织的这两个信号的成像系统来唯一地确定微钙化类型。 这有望用于乳房X线照相术以改善早期乳腺癌诊断，提高诊断准确性并降低活检率。
-
10.发明公开LOW DOSE SINGLE STEP GRATING BASED X-RAY PHASE CONTRAST IMAGING 有权NIEDRIGDOSIERTE EINZELSCHRITT-RÖNTGEN-PHASENKONTRASTDARSTELLUNG AUF GRATING-BASIS
公开(公告)号：EP2400891A1
公开(公告)日：2012-01-04
申请号：EP10703260.9
申请日：2010-02-03
发明人： ZHU, Peiping , WU, Ziyu , STAMPANONI, Marco
CPC分类号： G01N23/04 , A61B6/00 , A61B6/4291 , A61B6/484
摘要： Phase sensitive X-ray imaging methods can provide substantially increased contrast over conventional absorption based imaging, and therefore new and otherwise inaccessible information. The use of gratings as optical elements in hard X-ray phase imaging overcomes some of the problems that have impaired the wider use of phase contrast in X-ray radiography and tomography. So far, to separate the phase information from other contributions detected with a grating interferometer, a phase-stepping approach has been considered, which implies the acquisition of multiple radiographic projections. Here, an innovative, highly sensitive X-ray tomographic phase contrast imaging approach is presented based on grating interferometry, which extracts the phase contrast signal without the need of phase stepping. Compared to the existing phase step approach, the main advantage of this new method dubbed "reverse projection" is the significantly reduced delivered dose, without degradation of the image quality. The new technique sets the pre-requisites for future fast and low dose phase contrast imaging methods, fundamental for imaging biological specimens and in-vivo studies.
摘要翻译： 相对于常规的基于吸收的成像技术，相敏X射线成像方法提供了显着增加的对比度，因此提供了新的或其他不可接近的信息。 在硬X射线相位成像中使用光栅作为光学元件克服了在X射线摄影和断层摄影中损害更广泛地使用相位对比度的一些问题。 为了将相位信息与用光栅干涉仪检测到的其他贡献分离，已经考虑了相位步进方法，这意味着获取多个射线照相投影。 在这里，基于光栅干涉法提出了一种创新的，高灵敏度的X射线断层扫描相位成像方法，其提取相位差信号而不需要相位步进。 与现有的相步法相比，这种被称为“反向投影”的新方法的主要优点是显着降低了递送剂量，而不会降低图像质量。
-
-
-
-
-
-
-
-
-
搜索结果
24 条记录 (耗时 0.015 秒)
