公开(公告)号：EP0564881B1

公开(公告)日：1998-08-05

申请号：EP93104635.3

申请日：1993-03-22

申请人： MOTOROLA, INC.

发明人： Hickernell, Thomas ,  Penunuri, David

IPC分类号： H03H9/145 ,  H03H9/64

CPC分类号： H03H9/14505 ,  H03H9/02779 ,  H03H9/02913 ,  H03H9/02921

公开(公告)号：EP0475139A2

公开(公告)日：1992-03-18

申请号：EP91114035.8

申请日：1991-08-22

申请人： MOTOROLA, INC.

发明人： Cho, Fred Yi-Tung ,  Penunuri, David ,  Falkner, Robert Frank Jr.

IPC分类号： H03H3/08

CPC分类号： H03H3/08

摘要： A passivation layer (110) of dielectric material disposed on the top surface of the SAW device (10) prevents the metallized transducer pattern (30, 40) on the piezoelectric substrate (20) from being exposed to chemical attack. This layer (110) also provides for improved metal acousto-migration resistance through the well-known mechanism of grain boundary pinning. The piezoelectric SAW device substrate (20) includes a dielectric layer (110) which is disposed along the surface over the transducer (30, 40) metallization. The piezoelectric substrate (20) includes metallized regions (120) on top of the dielectric layer (110) which is disposed over the substrate (20) surface and the SAW transducers (30, 40) thereon. These metallized regions (120) form capacitors to the transducer busses (131, 136, 141, 146) and capacitively couple electrical input and output signals to the transducers (30, 40) from external electronic apparatus (90, 95).

摘要翻译： 设置在SAW器件（10）的顶表面上的介电材料制成的钝化层（110）暴露于化学侵蚀防止了在压电基板（20）的金属化图案换能器（30，40）。 ThisLayer（110）因此，提供了通过晶界钉扎的公知的机构改进的金属声耐迁移性。 压电SAW器件衬底（20）包括沿着所述表面在所述换能器（30，40）的金属化布置在介电层（110）所有。 压电基板（20）包括设置在所述基片（20）表面和SAW传感器（30，40）在其上的上介电层的顶部上的金属化区（120）（110）所有。 这些金属化区（120）形式的电容器到换能器总线（131，136，141，146）和电容性耦合的电输入和输出信号从外部电子设备（90，95）的换能器（30，40）。

公开(公告)号：EP0760556A1

公开(公告)日：1997-03-05

申请号：EP96113177.8

申请日：1996-08-16

申请人： MOTOROLA, INC.

发明人： Penunuri, David ,  Hickernell, Thomas Slocum ,  Cho, Frederick Yi-Tung

IPC分类号： H03H9/64

CPC分类号： H03H9/6436 ,  H03H9/1452

摘要： An acoustic wave filter (200, 300) having a substrate for supporting propagation of acoustic waves, and first (220, 315), second (235, 330) and third (210, 310) acoustic wave transducers disposed on the substrate. The first acoustic wave transducer (220, 315) includes at least one bus bar (221, 316) electrically coupled to a first electrical port (205, 305) of the acoustic wave filter (200, 300). The second acoustic wave transducer (235, 330) is disposed on the substrate in line with the first acoustic wave transducer (220, 315) and is acoustically coupled thereto. The second acoustic wave transducer (235, 330) includes at least one bus bar (236', 331) electrically coupled to a second electrical port (240, 345) of the acoustic wave filter (200, 300). The third acoustic wave transducer (210, 310) includes at least one bus bar (211, 311') electrically coupled to the first electrical port (205, 305). The third acoustic wave transducer (210, 310) is acoustically decoupled from either the first (220, 315) or second (235, 330) acoustic wave transducers.

摘要翻译： 具有用于支撑声波传播的基板的声波滤波器（200,300）和设置在基板上的第一（220,315），第二（235,330）和第三（210,310）声波换能器。 第一声​​波换能器（220,315）包括电耦合到声波滤波器（200,300）的第一电气端口（205,305）的至少一个汇流条（221,316）。 第二声波换能器（235,330）设置在与第一声波换能器（220,315）一致的衬底上，并与其声学耦合。 第二声波换能器（235,330）包括电耦合到声波滤波器（200,300）的第二电端口（240,345）的至少一个汇流条（236'，331）。 第三声波换能器（210,310）包括电耦合到第一电气端口（205,305）的至少一个汇流条（211,311'）。 第三声波换能器（210,310）与第一声波换能器（220,315）或第二声波换能器（235,330）的声学去耦合。

公开(公告)号：EP0612146A3

公开(公告)日：1995-09-20

申请号：EP93120756.7

申请日：1993-12-23

申请人： MOTOROLA, INC.

发明人： Penunuri, David

IPC分类号： H03H9/145

CPC分类号： H03H9/14597

摘要： A filter device (301,501,501,601) comprises an acoustic wave propagating substrate having an effective coupling coefficient k² and having a first filter (310,310',320,320',330,340,340',340'',...,510,620) and a second filter (350,360,360',360'',...,370,370',380,380',520,630) disposed on the acoustic wave propagating substrate. The first filter (310,310',320,320',330,340,340',340'',...,510,620) comprises a first electro-acoustic transducer (310,310',320,320') and a first acousto-electric transducer (330,340,340',340'',...), both disposed on the acoustic wave propagating substrate. The first acousto-electric (330,340,340',340'',...) transducer comprises N₁ many electrode pairs, wherein N₁ ≧ C/k². C is a constant having a value in the range from 1 to 2. The first electro-acoustic transducer (310,310',320,320') is acoustically coupled to the first acousto-electric transducer (330,340,340',340'',...). The second filter (350,360,360',360'',...,370,370',380,380',520,630) comprises a second electro-acoustic transducer (350,360,360',360'',...) and a second acousto-electric transducer (370,370',380,380'), both disposed on the acoustic wave propagating substrate. The second electro-acoustic transducer (350,360,360',360'',...) is electrically coupled to the first acousto-electric transducer (330,340,340',340'',...). The second electro-acoustic transducer (350,360,360',360'',...) comprises N₂ many electrode pairs, wherein N₂

摘要翻译： 该方法包括提供具有有效耦合系数k2的声波传播衬底，在声波传播衬底上设置第一电声换能器，以及在声波传播衬底上设置具有长度M1的第一声电换能器， 其中具有N1个电极对的第一声电传感器。 N1> = C / k2，C是具有在1至2范围内的值的常数。第一声电换能器声耦合到第一电声换能器。 该方法还包括在声波传播基板上设置第二声电换能器，并且在声波传播基板上布置具有长度M2的第二电声换能器，其中M2大于M1。 第二电声换能器与第一声电换能器电耦合并共阻抗匹配。 第二电声换能器中有N2个电极对，其中N2N1。 第二电声换能器声耦合到第二声电换能器。

公开(公告)号：EP0450928A2

公开(公告)日：1991-10-09

申请号：EP91302902.1

申请日：1991-04-03

申请人： MOTOROLA, INC.

发明人： Malocha, Donald Chester ,  Penunuri, David

IPC分类号： H03H9/02

CPC分类号： H03H9/02842

摘要： A SAW transducer (10) eliminates mechanical energy reflections by using one-quarter wavelength electrodes (12, 14, 15, 16,17) spaced at predetermined intervals. Dummy electrodes (14, 15) are shifted one-quarter wavelength to cancel energy reflections in the active electrodes (12, 13, 17). A pair of dummy electrodes (14, 15) is required for each active set (17, 12, 13) of electrodes (the active set comprises one positive (12) and two negative electrodes (17, 13).

摘要翻译： SAW换能器（10）通过使用以预定间隔隔开的四分之一波长电极（12,14,15,16,17）来消除机械能反射。 虚拟电极（14,15）移动四分之一波长以消除有源电极（12,13,17）中的能量反射。 每个有源组（17,12,13）需要一对虚拟电极（14,15）（活动组包括一个正极（12）和两个负极（17,13）。

公开(公告)号：EP0758818A1

公开(公告)日：1997-02-19

申请号：EP96111994.8

申请日：1996-07-25

申请人： MOTOROLA, INC.

发明人： Penunuri, David

IPC分类号： H03H9/02

CPC分类号： H03H9/02559 ,  H03H3/08 ,  Y10T29/42

摘要： A piezoelectric substrate (120) and a method for preparing same. The method includes steps of (i) providing a boule of piezoelectric material, (ii) orienting the boule to Euler angles chosen to provide a boundary condition matched to a partially-metallized surface and (iii) sawing the boule into at least a first slice (120) having first and second surfaces, at least one of the first and second surfaces comprising a planar surface. The method desirably but not essentially further includes steps of (iv) polishing at least one of the first and second surfaces to provide a substantially planar polished surface, (v) disposing a layer of metal on the at least one of the first and second surfaces and (vi) patterning the layer of metal to provide at least one interdigitated pattern (105, 110) comprising an acoustic wave transducer (105, 110), the acoustic wave transducer (105, 110) providing the boundary condition matched to a partially-metallized surface.

摘要翻译： 压电基片（120）及其制备方法。 该方法包括以下步骤：（i）提供压电材料的原子块，（ii）将所述轴定向为欧拉角，所述欧拉角被选择以提供与部分金属化表面匹配的边界条件，以及（iii）将所述毛坯切割成至少第一切片 （120）具有第一和第二表面，所述第一和第二表面中的至少一个包括平坦表面。 该方法理想地但不是基本上进一步包括以下步骤：（iv）抛光第一和第二表面中的至少一个以提供基本上平面的抛光表面，（v）在第一和第二表面中的至少一个上设置金属层 提供至少一个包括声波换能器（105,110）的交错图案（105,110），所述声波换能器（105,110）提供与部分地耦合的边界条件匹配的边界条件， 金属化表面。

公开(公告)号：EP0545672A1

公开(公告)日：1993-06-09

申请号：EP92310969.8

申请日：1992-12-01

申请人： MOTOROLA, INC.

发明人： Cho, Frederick Y. ,  Hickernell, Thomas ,  Penunuri, David

IPC分类号： H03H9/64 ,  H03H9/145

CPC分类号： H03H9/0285 ,  H03H9/14505 ,  H03H9/1452 ,  H03H9/6433 ,  H03H9/6469

摘要： An acoustic wave filtering apparatus includes an acoustic wave propagating substrate (120) for supporting propagation of acoustic waves and a plurality of acoustic wave filters (217, 219) for filtering an electrical signal. Each of said plurality further comprises an input (201) for supplying electrical input signals, an input unidirectional acoustic wave transducer (203, 205, 250; 223, 225, 260) for converting electrical signal energy into acoustic energy, an output unidirectional acoustic wave transducer (210, 213, 255; 230, 233, 265) for converting acoustic signals to electrical signals, and an output (215) for combining and delivering electrical output signals to external electrical apparatus.

摘要翻译： 声波滤波装置包括用于支撑声波传播的声波传播基板（120）和用于滤波电信号的多个声波滤波器（217,219）。 所述多个还包括用于提供电输入信号的输入端（201），用于将电信号能量转换为声能的输入单向声波换能器（203,205,250; 223,225,260），输出单向声波 用于将声信号转换为电信号的换能器（210,213,255; 230,233,265），以及用于将电输出信号组合并输送到外部电气设备的输出端（215）。

公开(公告)号：EP0535554A1

公开(公告)日：1993-04-07

申请号：EP92116459.6

申请日：1992-09-25

申请人： MOTOROLA, INC.

发明人： Cho, Frederick Y. ,  Penunuri, David ,  Falkner, Robert Frank, Jr.

IPC分类号： H03H9/05 ,  H03H9/02

CPC分类号： H03H9/1071 ,  H03H9/02874 ,  H03H9/0585 ,  Y10T29/42

摘要： A surface acoustic wave (SAW) device package (10) for reducing insertion loss and direct RF feedthrough of the SAW device (14). The package (10) provides for extensive shielding of each of the input (32) and output (20, 23) pads. The inputs (32) and outputs (20, 23) to the SAW device (14) are separated by maintaining the inputs (32) on one surface (13) of the substrate (14) and the outputs (20, 23) on the opposite surface of the substrate (14). The SAW crystal substrate (14) including the SAW devices (15, 36, 17) is bonded (48) to the package substrate (12) and hermetically sealed via a low-temperature glass seal (35) or solder-type sealing (45, 60), for example.

摘要翻译： 一种用于减少SAW器件（14）的插入损耗和直接RF馈通的表面声波（SAW）器件封装（10）。 封装（10）为每个输入（32）和输出（20,23）焊盘提供广泛的屏蔽。 通过将基板（14）的一个表面（13）上的输入（32）和在基板（14）上的输出（20,23）上的输入（32）保持到SAW器件（14）的输入（32）和输出（20,23） 衬底（14）的相对表面。 包括SAW器件（15,36,17）的SAW晶体衬底（14）被接合（48）到封装衬底（12）并通过低温玻璃密封件（35）或焊料密封（45 ，60）。

公开(公告)号：EP0762644A1

公开(公告)日：1997-03-12

申请号：EP96114286.6

申请日：1996-09-06

申请人： MOTOROLA, INC.

发明人： Penunuri, David ,  Hickernell, Thomas Slocum

IPC分类号： H03H9/64

CPC分类号： H03H9/6483 ,  Y10T29/42

摘要： A method and apparatus for a ladder filter (300, 400) incorporating same. The filter (100, 300, 400, 1803, 1807, 1815, 1823, 1829) includes a substrate and a first series resonator (305, 403) disposed on the substrate and electrically coupled in series between the first electrical port (301, 401) and a first node. The first series resonator (305, 403) includes a first series acoustic reflector (303), a first series gap, a first series transducer (304, 403), a second series gap and a second series acoustic reflector (306) collectively disposed in an in-line configuration along a principal axis (8, 9) of the substrate. The filter (300, 400) also includes a first shunt resonator (310, 404) disposed on the substrate and electrically coupled in shunt between the first node and ground. The first shunt transducer (312) and the first series transducer (304) have different periodicities not equal to periodicities of the first (303) and second series acoustic reflectors (306) and the first (311) and second (313) shunt acoustic reflectors.

摘要翻译： 一种用于梯形滤波器（300，400）包含相同的方法和装置。 所述过滤器（100，300，400，1803，1807，1815，1823，1829）包括布置在基板和电连接第一电端口（301之间串联耦合的一个基板和第一串联谐振器（305，403），401 ）和第一节点。 第一串联谐振器（305，403）包括：第一串联声反射器（303），第一串联间隙，第一串联换能器（304，403），第二串联间隙和第二系列声学反射器（306）中集中地设置 沿主轴线基板直列配置（8,9）的。 该过滤器（300，400），因此包括设置在衬底上并电耦合在所述第一节点和接地之间的分流的第一并联谐振器（310，404）。 第一分流换能器（312）和所述第一串联换能器（304）具有不同的周期不等于第一（303）的周期性和第二串联声反射器（306）和第一（311）和第二（313）分流的声学反射器 ，

公开(公告)号：EP0530547B1

公开(公告)日：1997-03-05

申请号：EP92113615.6

申请日：1992-08-10

申请人： MOTOROLA, INC.

发明人： Hickernell, Thomas ,  Penunuri, David ,  Cho, Frederick Y.

IPC分类号： H03H9/02 ,  H03H9/64

CPC分类号： H03H9/02637 ,  H03H9/02653