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1.METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL COMPONENT, AND A MICROELECTROMECHANICAL COMPONENT 有权
标题翻译: 用于生产微电机部件和微机电组件公开(公告)号:EP1951611A4
公开(公告)日:2014-01-22
申请号:EP06808048
申请日:2006-11-21
发明人: KUISMA HEIKKI , NIEMISTOE JIRI
IPC分类号: B81C1/00 , B81B20060101 , B81B7/02 , B81C99/00 , G01C17/38 , G01C19/56 , G01C19/5783 , G01C25/00 , G01L9/00 , G01P3/00 , G01P15/18
CPC分类号: B81C1/0023 , B81B7/02 , B81B2207/012 , B81B2207/015 , B81C2203/0792 , G01C19/56 , G01C19/5783 , G01L9/0042 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , H01L2224/16145 , H01L2224/1703 , H01L2224/32245 , H01L2224/48 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48247 , H01L2224/48465 , H01L2224/73204 , H01L2224/73265 , H01L2924/10253 , H01L2924/1461 , H01L2924/181 , H01L2924/3011 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2924/00012