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公开(公告)号：EP0704967B1
公开(公告)日：2001-08-08
申请号：EP95306381.5
申请日：1995-09-12
IPC分类号： H03H9/145
CPC分类号： H03H9/02543 , H03H9/14505
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公开(公告)号：EP0704966B1
公开(公告)日：2001-08-08
申请号：EP95306380.7
申请日：1995-09-12
IPC分类号： H03H9/145
CPC分类号： H03H9/14505 , H03H9/02543
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公开(公告)号：EP0704966A3
公开(公告)日：1997-08-27
申请号：EP95306380.7
申请日：1995-09-12
IPC分类号： H03H9/145
CPC分类号： H03H9/14505 , H03H9/02543
摘要： A surface acoustic wave device including a substrate made of a lithium tetraborate single crystal (Li₂B₄O₇) whose cut and propagating direction are determined such that Euler cut angles (ψ, θ, φ) are ψ=+5°∼-5°, θ=9°∼29° and 32°∼86° and φ=85°∼95°, and an electrode structure formed on a surface of the substrate to realize a natural single-phase unidirectional transducer property together with an anisotropy of said substrate. A lithium tetraborate substrate having cut angles of (0°, 51°, 90°) shows an ideal NSPUDT and a lithium tetraborate substrate having cut angles of (0°, 78°, 90°) reveals a zero temperature coefficient of delay. A directionality reversed electrode structure or a directionality corrected electrode structure may be advantageously used.
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4.发明公开
公开(公告)号：EP0865156A3
公开(公告)日：1999-10-27
申请号：EP98301913.4
申请日：1998-03-13
IPC分类号： H03H9/02
CPC分类号： H03H9/0259
摘要： A surface acoustic wave device including a substrate and an electrode structure formed on the substrate, said substrate being made of an X-cut Langasite single crystal, a rotation Y-cut Langasite single crystal or a double rotation Y-cut Langasite single crystal. When the X-cut Langasite crystal having a large reflection coefficient is used, the electrode structure is formed to constitute a surface acoustic wave resonator. When the rotation Y-cut Langasite crystal having a large electromechanical coupling coefficient and a small reflection coefficient is used, the electrode structure is formed to constitute a surface acoustic wave filter. When the double rotation Y-cut Langasite crystal having an NSPUDT property is used, the electrode structure is formed to constitute a surface acoustic wave filter having a low insertion loss and an excellent phase property.
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公开(公告)号：EP0704967A3
公开(公告)日：1997-08-27
申请号：EP95306381.5
申请日：1995-09-12
IPC分类号： H03H9/145
CPC分类号： H03H9/02543 , H03H9/14505
摘要： A surface acoustic wave device including a piezoelectric substrate (21) having NSPUDT behaviour and a directionality reversed electrode structure including positive electrode (23a), negative electrode (23b) and floating electrode (23c). Positive and negative electrode fingers each having a width of λ/8 are arranged interdigitally at a pitch of λ and floating electrode fingers having a width of 3 λ/8 are arranged between successive positive and negative fingers with an edge distance of λ/8. A directivity due to NSPUDT behavior of the substrate can be reversed. Positive and negative electrode fingers are arranged interdigitally at a pitch of λ and between successive positive and negative electrode fingers are arranged floating electrode fingers having a reflecting coefficient different from that of the positive and negative electrodes.
摘要翻译： 一种声表面波器件，包括具有NSPUDT行为的压电基片（21）和包括正电极（23a），负电极（23b）和浮动电极（23c）的方向反转电极结构。 每个具有λ/ 8宽度的正和负电极指状物以间距λ交叉排列，宽度为3λ/ 8的浮动电极指状物排列在具有λ/ 8边缘距离的连续正和负指状物之间。 由于衬底的NSPUDT行为导致的方向性可以颠倒。 正负电极指以间距λ交叉排列，并且在连续的正负电极指之间布置具有与正电极和负电极不同的反射系数的浮动电极指。
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公开(公告)号：EP0704966A2
公开(公告)日：1996-04-03
申请号：EP95306380.7
申请日：1995-09-12
IPC分类号： H03H9/145
CPC分类号： H03H9/14505 , H03H9/02543
摘要： A surface acoustic wave device including a substrate made of a lithium tetraborate single crystal (Li₂B₄O₇) whose cut and propagating direction are determined such that Euler cut angles (ψ, θ, φ) are ψ=+5°∼-5°, θ=9°∼29° and 32°∼86° and φ=85°∼95°, and an electrode structure formed on a surface of the substrate to realize a natural single-phase unidirectional transducer property together with an anisotropy of said substrate. A lithium tetraborate substrate having cut angles of (0°, 51°, 90°) shows an ideal NSPUDT and a lithium tetraborate substrate having cut angles of (0°, 78°, 90°) reveals a zero temperature coefficient of delay. A directionality reversed electrode structure or a directionality corrected electrode structure may be advantageously used.
摘要翻译： 包括由四硼酸锂单晶（Li 2 B 4 O 7）制成的基片的表面声波装置，其切割和传播方向被确定为使得欧拉切角（ψ，θ，φ）为ψ= + 5°〜-5°，θ= 9°〜29°和32°〜86°和φ= 85°〜95°的电极结构，以及在所述基底的表面上形成的电极结构，以实现与所述基底的各向异性一起的天然单相单向换能特性。 具有（0°，51°，90°）切割角的四硼酸锂衬底显示出理想的NSPUDT，并且具有（0°，78°，90°）切割角的四硼酸锂衬底显示零延迟温度系数。 可以有利地使用方向性反转电极结构或方向性校正电极结构。
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7.发明公开Surface acoustic wave device comprising langasite single crystal substrate 失效AkustischeOberflächenwellenanordnungmit monokristallinem Langasitsubstrat
公开(公告)号：EP0865156A2
公开(公告)日：1998-09-16
申请号：EP98301913.4
申请日：1998-03-13
IPC分类号： H03H9/02
CPC分类号： H03H9/0259
摘要： A surface acoustic wave device including a substrate and an electrode structure formed on the substrate, said substrate being made of an X-cut Langasite single crystal, a rotation Y-cut Langasite single crystal or a double rotation Y-cut Langasite single crystal. When the X-cut Langasite crystal having a large reflection coefficient is used, the electrode structure is formed to constitute a surface acoustic wave resonator. When the rotation Y-cut Langasite crystal having a large electromechanical coupling coefficient and a small reflection coefficient is used, the electrode structure is formed to constitute a surface acoustic wave filter. When the double rotation Y-cut Langasite crystal having an NSPUDT property is used, the electrode structure is formed to constitute a surface acoustic wave filter having a low insertion loss and an excellent phase property.
摘要翻译： 一种表面声波装置，包括基板和形成在基板上的电极结构的表面声波装置，所述基板由X切割斜长石单晶，旋转Y切割斜长石单晶或双旋转Y切割朗氏石单晶制成。 当使用具有大反射系数的X切割朗氏硅酸盐晶体时，形成电极结构以构成表面声波谐振器。 当使用具有大的机电耦合系数和小的反射系数的旋转Y切割朗氏硅酸盐晶体时，形成电极结构以构成表面声波滤波器。 当使用具有NSPUDT特性的双旋转Y型朗氏硅酸盐晶体时，形成电极结构以构成具有低插入损耗和优异的相位特性的表面声波滤波器。
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公开(公告)号：EP0704967A2
公开(公告)日：1996-04-03
申请号：EP95306381.5
申请日：1995-09-12
IPC分类号： H03H9/145
CPC分类号： H03H9/02543 , H03H9/14505
摘要： A surface acoustic wave device including a piezoelectric substrate (21) having NSPUDT behaviour and a directionality reversed electrode structure including positive electrode (23a), negative electrode (23b) and floating electrode (23c). Positive and negative electrode fingers each having a width of λ/8 are arranged interdigitally at a pitch of λ and floating electrode fingers having a width of 3 λ/8 are arranged between successive positive and negative fingers with an edge distance of λ/8. A directivity due to NSPUDT behavior of the substrate can be reversed. Positive and negative electrode fingers are arranged interdigitally at a pitch of λ and between successive positive and negative electrode fingers are arranged floating electrode fingers having a reflecting coefficient different from that of the positive and negative electrodes.
摘要翻译： 包括具有NSPUDT特性的压电基板（21）和包括正极（23a），负极（23b）和浮动电极（23c）的方向性反转电极结构的表面声波装置。 每个具有λ/ 8宽度的正电极指和负电极指以十字形排列，并且具有3λ/ 8宽度的浮动电极指，布置在连续的正极和负极之间，边缘距离为λ/ 8。 由于衬底的NSPUDT行为引起的方向性可以颠倒。 正和负电极指以十字指数配置，并且在连续的正极和负极指之间布置浮置电极指，其反射系数不同于正极和负极的反射系数。
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9.发明授权METHOD OF FORMING A GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE FOR EPITAXIAL LATERAL OVERGROWTH (ELO) 有权制造方法的半导体衬底由III族 - 氮化物外延横向增长（ELO）
公开(公告)号：EP1267393B1
公开(公告)日：2016-04-13
申请号：EP02012993.8
申请日：2002-06-12
申请人： NGK Insulators, Ltd.
CPC分类号： C30B29/406 , C30B25/02 , C30B25/18 , C30B29/403 , H01L21/0237 , H01L21/0242 , H01L21/02458 , H01L21/02502 , H01L21/0254 , H01L21/0262 , H01L21/02639 , H01L21/02647
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10.发明授权A method for fabricating a III-V nitride film and an apparatus for fabricating the same 有权所述III-V族氮化物膜的制造方法以及制造装置
公开(公告)号：EP1207215B1
公开(公告)日：2013-07-24
申请号：EP01127023.8
申请日：2001-11-14
申请人： NGK Insulators, Ltd.
CPC分类号： C23C16/301 , C23C16/4404 , C30B25/02 , C30B29/403
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