摘要:
When polarization reversal parts are fabricated by a voltage application method, the variation in width of the polarization reversal parts is suppressed by reducing damage in the vicinity of the forward end of a comb electrode. A polarization reversal structure is fabricated by a voltage application method using a comb electrode having a plurality of electrode parts and power supply parts provided on one surface of a ferroelectric single crystal substrate divided into unit regions. The electrode parts (5) correspond to respective polarization reversal parts of the polarization reversal structure. Each electrode part (5) comprises a plurality of arrays of low-resistance pieces (12a-12e, 13a-13e, 14a-14e, 15a-15e, 16a-16e) arranged toward a direction F perpendicular to the longitudinal direction E of the electrode part (5) and spaced apart from each other.
摘要:
The present invention stably provides a terahertz-wave detection element in which the occurrence of warping and a crack is suitably suppressed. The terahertz-wave detection element can detect a spatial intensity distribution that an incident terahertz wave has. The terahertz-wave detection element includes: an electro-optic crystal layer of a thickness 1 µm to 10 µm consisting of an electro-optic crystal in which a refractive index at an incident position of the terahertz wave changes in accordance with incident intensity; a supporting substrate that supports the electro-optic crystal layer; a resin layer of a thickness 1nm to 50nm that joins the electro-optic crystal layer and the supporting substrate together; and a total reflection layer formed on a surface of the electro-optic crystal, consisting of a first dielectric multilayer film and having a thickness equal to or larger than 1 µm. The terahertz-wave detection element is configured to detect a spatial-characteristics distribution which is generated in probe light irradiated to the electro-optic crystal layer in superposition with the terahertz wave and which corresponds to a spatial distribution of a refractive index generated in the electro-optic crystal layer by the incidence of the terahertz wave, thereby to detect the spatial intensity distribution of the incident terahertz wave. A ratio of a thickness of the resin layer to a thickness of the total reflection layer is set equal to or smaller than 1/3.
摘要:
A polarization inversion unit produced by providing a comb-shaped electrode (3) on one main surface (2a) of a single-zoned ferroelectric single-crystal substrate (2) and a uniform electrode (4) on the other main surface (2b) side and by applying a voltage between the comb-shaped electrode (3) and the uniform electrode (4). A base substrate having a substrate body (5), a first conductive film (6) provided on one main surface (5a) of the substrate body and a second conductive film (7) provided on the other main surface (5b) is layered on the substrate (2). Whereupon, the uniform electrode (4) and the first conductive film (6) are electrically conducted and a voltage is applied between the comb-shaped electrode (3) and the second conductive film (7) to thereby form a polarization inversion unit on the substrate (2).
摘要:
The present invention provides a terahertz-wave detection element with high spatial resolution and suitably suppressing a crack occurrence. A method of manufacturing a terahertz-wave detection element capable of detecting a spatial intensity distribution that an incident terahertz wave has includes: an oxide formation step of forming an oxide layer on one main surface of a first substrate consisting of an electro-optic crystal in which a refractive index at an incident position of a terahertz wave changes in accordance with incident intensity of the terahertz wave; a joining step of joining the one main surface of the first substrate and a second substrate by an adhesive consisting of a thermosetting resin; a polishing step of thinning the first substrate of a joined body obtained by the joining step, to a thickness equal to or larger than 1 µm and equal to or smaller than 30 µm by polishing the first substrate; and a segmentation step of obtaining a large number of terahertz-wave detection elements by cutting the joined body into pieces of a predetermined element size. In the oxide formation step, the oxide layer is formed such that the first substrate becomes convex to a side of the one main surface by causing a tensile stress to act on the first substrate.
摘要:
An optical functional device comprises a dielectric substrate 5, a ferroelectric thin layer 10 provided on the dielectric substrate 5 and comprising a material having electro-optical effect and an electrode 3A, 3B provided on the ferroelectric thin layer 10. A part of the ferroelectric thin layer 10 functions as a core 9 of the optical wave guide and the dielectric substrate functions as a clad for the optical waveguide. The optical waveguide 9 constitutes a multi-mode waveguide in the direction "D" of depth of the ferroelectric thin layer.
摘要:
In an optical waveguide device having an optical waveguide returned at the end portion of an optical waveguide substrate, the modulation bandwidth is widened. An optical waveguide device (1A) is provided with a substrate main body (2) composed of an electro-optical material; an optical waveguide (6); and modulating electrodes (3, 4, 5) for applying a voltage to the optical waveguide (6). The optical waveguide (6) is provided with first main sections (6e, 6f); first curved section (7A); first returning sections (6g, 6h) arranged between the first curved section (7A) and a returning point (8); second main sections (6m, 6n); a second curved section (7B); and second returning sections (6j, 6k) arranged between the second curved section (7B) and the returning point (8). At least a part of a signal electrode is arranged in a returning area covering from the first curved section (7A) and the second curved section (7B) to the returning point (8).