METHOD FOR FABRICATING POLARIZATION REVERSAL STRUCTURE AND POLARIZATION REVERSAL STRUCTURE
    2.
    发明公开
    METHOD FOR FABRICATING POLARIZATION REVERSAL STRUCTURE AND POLARIZATION REVERSAL STRUCTURE 有权
    制造方法的极化反转结构和极化反转构造

    公开(公告)号:EP1801644A4

    公开(公告)日:2009-07-01

    申请号:EP05793453

    申请日:2005-10-11

    IPC分类号: G02F1/37

    CPC分类号: G02F1/3558

    摘要: When polarization reversal parts are fabricated by a voltage application method, the variation in width of the polarization reversal parts is suppressed by reducing damage in the vicinity of the forward end of a comb electrode. A polarization reversal structure is fabricated by a voltage application method using a comb electrode having a plurality of electrode parts and power supply parts provided on one surface of a ferroelectric single crystal substrate divided into unit regions. The electrode parts (5) correspond to respective polarization reversal parts of the polarization reversal structure. Each electrode part (5) comprises a plurality of arrays of low-resistance pieces (12a-12e, 13a-13e, 14a-14e, 15a-15e, 16a-16e) arranged toward a direction F perpendicular to the longitudinal direction E of the electrode part (5) and spaced apart from each other.

    TERAHERTZ-WAVE DETECTION ELEMENT, PRODUCTION METHOD THEREFOR, JOINED BODY, AND OBSERVATION DEVICE
    4.
    发明公开
    TERAHERTZ-WAVE DETECTION ELEMENT, PRODUCTION METHOD THEREFOR, JOINED BODY, AND OBSERVATION DEVICE 审中-公开
    TERAHERTZWELLEN-DETEKTIONSELEMENT,HERSTELLUNGSVERFAHRENDAFÜR,VERBUNDENERKÖRPERUND BEOBACHTUNGSVORRICHTUNG

    公开(公告)号:EP2902755A4

    公开(公告)日:2016-06-15

    申请号:EP13838455

    申请日:2013-09-19

    IPC分类号: G01J1/02 B32B37/12 G01N21/35

    摘要: The present invention stably provides a terahertz-wave detection element in which the occurrence of warping and a crack is suitably suppressed. The terahertz-wave detection element can detect a spatial intensity distribution that an incident terahertz wave has. The terahertz-wave detection element includes: an electro-optic crystal layer of a thickness 1 µm to 10 µm consisting of an electro-optic crystal in which a refractive index at an incident position of the terahertz wave changes in accordance with incident intensity; a supporting substrate that supports the electro-optic crystal layer; a resin layer of a thickness 1nm to 50nm that joins the electro-optic crystal layer and the supporting substrate together; and a total reflection layer formed on a surface of the electro-optic crystal, consisting of a first dielectric multilayer film and having a thickness equal to or larger than 1 µm. The terahertz-wave detection element is configured to detect a spatial-characteristics distribution which is generated in probe light irradiated to the electro-optic crystal layer in superposition with the terahertz wave and which corresponds to a spatial distribution of a refractive index generated in the electro-optic crystal layer by the incidence of the terahertz wave, thereby to detect the spatial intensity distribution of the incident terahertz wave. A ratio of a thickness of the resin layer to a thickness of the total reflection layer is set equal to or smaller than 1/3.

    摘要翻译: 本发明稳定地提供了适当地抑制发生翘曲和裂纹的太赫兹波检测元件。 太赫兹波检测元件可以检测入射的太赫兹波具有的空间强度分布。 太赫兹波检测元件包括:由电光晶体组成的厚度为1μm至10μm的电光晶体层,其中太赫兹入射位置处的折射率根据入射强度而变化; 支撑电光晶体层的支撑基板; 将电光晶体层和支撑基板连接在一起的厚度为1nm〜50nm的树脂层; 以及形成在电光晶体的表面上的由第一电介质多层膜构成并具有等于或大于1μm的厚度的全反射层。 太赫波检测元件被配置为检测在与太赫兹波叠加的照射到电光晶体层的探测光中产生的空间特性分布,并且其对应于在电光中产生的折射率的空间分布 - 通过太赫兹波的入射光子晶体层,从而检测入射的太赫兹波的空间强度分布。 将树脂层的厚度与全反射层的厚度的比率设定为1/3以下。

    PRODUCTION METHOD FOR POLARIZATION INVERSION UNIT AND OPTICAL DEVICE
    5.
    发明公开
    PRODUCTION METHOD FOR POLARIZATION INVERSION UNIT AND OPTICAL DEVICE 有权
    HERSTELLUNGSVERFAHRENFÜREINE POLARISATIONSHREINHEIT UND OPTISCHE EINRICHTUNG

    公开(公告)号:EP1657590A4

    公开(公告)日:2006-09-20

    申请号:EP04748298

    申请日:2004-08-05

    CPC分类号: G02F1/3558 G02F1/3775

    摘要: A polarization inversion unit produced by providing a comb-shaped electrode (3) on one main surface (2a) of a single-zoned ferroelectric single-crystal substrate (2) and a uniform electrode (4) on the other main surface (2b) side and by applying a voltage between the comb-shaped electrode (3) and the uniform electrode (4). A base substrate having a substrate body (5), a first conductive film (6) provided on one main surface (5a) of the substrate body and a second conductive film (7) provided on the other main surface (5b) is layered on the substrate (2). Whereupon, the uniform electrode (4) and the first conductive film (6) are electrically conducted and a voltage is applied between the comb-shaped electrode (3) and the second conductive film (7) to thereby form a polarization inversion unit on the substrate (2).

    摘要翻译: 通过在单分区强电介质单晶衬底(2)的一个主表面(2a)上和在另一个主表面(2b)上的均匀电极(4)上提供梳形电极(3) 并在梳形电极(3)和均匀电极(4)之间施加电压。 具有基板主体(5),设置在基板主体的一个主表面(5a)上的第一导电膜(6)和设置在另一主表面(5b)上的第二导电膜(7)的基础基板层叠 衬底(2)。 于是,均匀电极(4)和第一导电膜(6)导电,并且在梳状电极(3)和第二导电膜(7)之间施加电压,从而在第二导电膜(7)上形成极化反转单元 衬底(2)。

    TERAHERTZ-WAVE DETECTION ELEMENT, PRODUCTION METHOD THEREFOR, JOINED BODY, AND OBSERVATION DEVICE
    6.
    发明公开
    TERAHERTZ-WAVE DETECTION ELEMENT, PRODUCTION METHOD THEREFOR, JOINED BODY, AND OBSERVATION DEVICE 审中-公开
    节气门检测元件,其制造方法,复合体和观察装置

    公开(公告)号:EP2899514A4

    公开(公告)日:2016-05-18

    申请号:EP13838218

    申请日:2013-09-19

    IPC分类号: G01J1/02 G01N21/35 G02F1/03

    摘要: The present invention provides a terahertz-wave detection element with high spatial resolution and suitably suppressing a crack occurrence. A method of manufacturing a terahertz-wave detection element capable of detecting a spatial intensity distribution that an incident terahertz wave has includes: an oxide formation step of forming an oxide layer on one main surface of a first substrate consisting of an electro-optic crystal in which a refractive index at an incident position of a terahertz wave changes in accordance with incident intensity of the terahertz wave; a joining step of joining the one main surface of the first substrate and a second substrate by an adhesive consisting of a thermosetting resin; a polishing step of thinning the first substrate of a joined body obtained by the joining step, to a thickness equal to or larger than 1 µm and equal to or smaller than 30 µm by polishing the first substrate; and a segmentation step of obtaining a large number of terahertz-wave detection elements by cutting the joined body into pieces of a predetermined element size. In the oxide formation step, the oxide layer is formed such that the first substrate becomes convex to a side of the one main surface by causing a tensile stress to act on the first substrate.

    OPTICALLY FUNCTIONAL DEVICE
    7.
    发明公开
    OPTICALLY FUNCTIONAL DEVICE 审中-公开
    光学功能器件

    公开(公告)号:EP1795946A4

    公开(公告)日:2010-12-15

    申请号:EP05790189

    申请日:2005-09-28

    IPC分类号: G02F1/035 G02F1/05 G02F1/225

    CPC分类号: G02F1/035 G02F1/0508

    摘要: An optical functional device comprises a dielectric substrate 5, a ferroelectric thin layer 10 provided on the dielectric substrate 5 and comprising a material having electro-optical effect and an electrode 3A, 3B provided on the ferroelectric thin layer 10. A part of the ferroelectric thin layer 10 functions as a core 9 of the optical wave guide and the dielectric substrate functions as a clad for the optical waveguide. The optical waveguide 9 constitutes a multi-mode waveguide in the direction "D" of depth of the ferroelectric thin layer.

    OPTICAL WAVEGUIDE DEVICE
    9.
    发明公开
    OPTICAL WAVEGUIDE DEVICE 审中-公开
    光波导器件

    公开(公告)号:EP1953585A4

    公开(公告)日:2009-06-17

    申请号:EP06833096

    申请日:2006-11-15

    IPC分类号: G02F1/035 G02B6/12

    摘要: In an optical waveguide device having an optical waveguide returned at the end portion of an optical waveguide substrate, the modulation bandwidth is widened. An optical waveguide device (1A) is provided with a substrate main body (2) composed of an electro-optical material; an optical waveguide (6); and modulating electrodes (3, 4, 5) for applying a voltage to the optical waveguide (6). The optical waveguide (6) is provided with first main sections (6e, 6f); first curved section (7A); first returning sections (6g, 6h) arranged between the first curved section (7A) and a returning point (8); second main sections (6m, 6n); a second curved section (7B); and second returning sections (6j, 6k) arranged between the second curved section (7B) and the returning point (8). At least a part of a signal electrode is arranged in a returning area covering from the first curved section (7A) and the second curved section (7B) to the returning point (8).