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    OPTICAL DEVICE FOR MEASURING THE POSITION OF AN OBJECT
    1.
    发明公开
    OPTICAL DEVICE FOR MEASURING THE POSITION OF AN OBJECT 审中-公开

    公开(公告)号：EP3505641A1

    公开(公告)日：2019-07-03

    申请号：EP18210281.4

    申请日：2016-12-16

    申请人： Paris Sciences et Lettres - Quartier Latin ,  Centre National de la Recherche Scientifique - CNRS ,  Université Pierre et Marie Curie - Paris 6 (UPMC) ,  Université Paris Diderot Paris 7

    发明人： CROQUETTE, Vincent ,  ALLEMAND, Jean-François ,  VIEILLE, Thibault

    IPC分类号： C12Q1/68 ,  G02B21/00 ,  G02B21/10 ,  G01B11/00

    摘要： The invention relates to an optical device (1) for measuring the position of an object (B) along a first axis (z), the object (B) being subjected to light radiations emitted by a light source (2, 21, 22), the optical device (1) comprising:
    - an imaging system (5) comprising an objective for collecting light radiations diffused by the object (B), the imaging system (5) having an optical axis (O) extending parallel to the first axis (z),
    - a transmission mask (8) having at least a first pair of apertures (81, 83) and a second pair of apertures (82, 84), the first pair of apertures and second pair of apertures being spaced from each other along a second axis (x), perpendicular to the first axis (z), the transmission mask dividing the radiation diffused by the object (B) into two first beams passing through the first pair of apertures (81, 83) and two second beams passing through the second pair of apertures (82, 84), while blocking a part of the radiations (R3) emitted by the light source which is not diffused by the object,
    - a detector (6) adapted for generating an image including a first spot (S1) and a second spot (S2) representative of the first part (R1) and second part (R2) of the radiations impacting the detector plane (61),
    wherein variation of the position of the object (B) relative to the object plane of the imaging system (5) along the first axis (z) spatial phase shifting of first interference patterns and of the second interference pattern relative to each other.

    OPTICAL DEVICE FOR MEASURING THE POSITION OF AN OBJECT
    5.
    发明公开
    OPTICAL DEVICE FOR MEASURING THE POSITION OF AN OBJECT 有权
    用于测量物体位置的光学装置

    公开(公告)号：EP3181703A1

    公开(公告)日：2017-06-21

    申请号：EP16204727.8

    申请日：2016-12-16

    申请人： Paris Sciences et Lettres - Quartier Latin ,  Centre National de la Recherche Scientifique (CNRS) ,  Université Pierre et Marie Curie (Paris 6) ,  Université Paris Diderot - Paris 7

    发明人： CROQUETTE, Vincent ,  ALLEMAND, Jean-François ,  VIEILLE, Thibault

    IPC分类号： C12Q1/68 ,  G02B21/00 ,  G02B21/10 ,  G01B11/00

    CPC分类号： G02B21/365 ,  C12Q1/6816 ,  G01B11/002 ,  G02B5/005 ,  G02B5/04 ,  G02B21/0032 ,  G02B21/0052 ,  G02B21/02 ,  G02B21/086 ,  G02B21/10 ,  G02B21/18 ,  G02B21/241 ,  G02B21/361 ,  G06T7/70 ,  H04N5/2256

    摘要： The invention relates to an optical device (1) for measuring the position of an object (B) along a first axis (z), the object (B) being subjected to light radiations emitted by a light source (2, 21, 22), the optical device (1) comprising:
    - an imaging system (5) comprising an objective for collecting light radiations diffused by the object (B), the imaging system (5) having an optical axis (O) extending parallel to the first axis (z),
    - a transmission mask (8) having at least a first aperture (81, 83) and a second aperture (82, 84), the first aperture and second aperture being spaced from each other along a second axis (x), perpendicular to the first axis (z), the transmission mask (8) being arranged so as to let a first part of the radiations (R1) and a second part of the radiations (R2) which are diffused by the object (B) pass through the first aperture and the second aperture respectively, while blocking a part of the radiations (R3) emitted by the light source which is not diffused by the object, and
    - a detector (6) adapted for generating an image including a first spot (S1) and a second spot (S2) representative of the first part (R1) and second part (R2) of the radiations impacting the detector plane (61),
    wherein variation of the position of the object (B) relative to the object plane of the imaging system (5) along the first axis (z) causes variation of a position of the first spot (S1) and of the second spot (S2) relative to each other along the second axis (x).

    摘要翻译： 本发明涉及一种用于测量物体（B）沿第一轴（z）的位置的光学装置（1），物体（B）受到由光源（2,21,22）发射的光辐射， ，所述光学装置（1）包括： - 成像系统（5），其包括用于收集由所述物体（B）扩散的光辐射的物镜，所述成像系统（5）具有平行于所述第一轴线 （z）， - 具有至少第一孔径（81,83）和第二孔径（82,84）的透射掩模（8），所述第一孔径和第二孔径沿着第二轴线（x）彼此间隔开， ，垂直于所述第一轴线（z），所述透射掩模（8）布置成使得由所述物体（B）扩散的所述辐射（R1）的第一部分和所述辐射（R2）的第二部分， 分别通过第一孔径和第二孔径，同时阻挡由不是漫射的光源发射的一部分辐射（R3） 以及 - 检测器（6），适于生成包括代表影响所述第一部分（R1）和第二部分（R2）的辐射的第一点（S1）和第二点（S2）的图像， 其中，所述物体（B）相对于所述成像系统（5）的物平面沿着所述第一轴（z）的位置的变化引起所述第一光斑（S1）的位置和所述第一光点 第二点（S2）沿着第二轴（x）相对于彼此。