MANUFACTURING METHOD OF A MAGNETIC TUNNEL JUNCTION ELEMENT USING TWO MASKS
    3.
    发明公开
    MANUFACTURING METHOD OF A MAGNETIC TUNNEL JUNCTION ELEMENT USING TWO MASKS 有权
    由两个掩模来制造磁性隧道结元件的方法

    公开(公告)号:EP2277211A1

    公开(公告)日:2011-01-26

    申请号:EP09732874.4

    申请日:2009-04-15

    IPC分类号: H01L43/08 H01L43/12

    摘要: A method for forming a magnetic tunnel junction (MTJ) for magnetic random access memory (MRAM) using two masks includes depositing over an interlevel dielectric layer (36) containing an exposed first interconnect metallization, (37) a first electrode, (30) a fixed magnetization layer, (32) a tunneling barrier layer, (12) a free magnetization layer (11) and a second electrode (6). An MTJ structure including the tunnel barrier layer, free layer and second electrode is defined above the first interconnect metallization by a first mask. A first passivation layer (40) encapsulates the MTJ structure, leaving the second electrode exposed. A third electrode (15) is deposited in contact with the second electrode. A second mask is used to pattern a larger structure including the third electrode, the first passivation layer, the fixed magnetization layer and the first electrode. A second dielectric passivation layer (8) covers the etched plurality of layers, the first interlevel dielectric layer and the first interconnect metallization.