A SEMICONDUCTOR DEVICE COMPRISING A GRAPHENE-BASED CONTACT SWITCH FOR COOLING

    公开(公告)号:EP4369390A1

    公开(公告)日:2024-05-15

    申请号:EP22207205.0

    申请日:2022-11-14

    Inventor: Muller, Philippe

    Abstract: The disclosure relates to the cooling of a semiconductor device. The semiconductor device comprises an active section, an interposer section arranged on the active section, and one or more nanoelectromechanical systems or microelectromechanical systems contact switches arranged between the interposer section and the active section, wherein the interposer section comprises one or more vias, wherein each contact switch of the one or more contact switches comprises a graphene membrane, and wherein each contact switch of the one or more contact switches is configured to be switched between a first switching state, in which the graphene membrane of the contact switch is thermally connected to a respective via of the one or more vias of the interposer section and a second switching stage, in which the graphene membrane of the contact switch is thermally disconnected from the respective via of the one or more vias of the interposer section.

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