METHOD FOR THE MANUFACTURE OF SUPPORTED THIN LAYERS OF NON-EVAPORABLE GETTER MATERIAL AND GETTER DEVICES THEREBY MANUFACTURED
    6.
    发明公开
    METHOD FOR THE MANUFACTURE OF SUPPORTED THIN LAYERS OF NON-EVAPORABLE GETTER MATERIAL AND GETTER DEVICES THEREBY MANUFACTURED 失效
    用于生产不挥发消气材料佩戴薄层并通过这一过程产生的吸气

    公开(公告)号:EP0856193A1

    公开(公告)日:1998-08-05

    申请号:EP97935741.0

    申请日:1997-07-21

    IPC分类号: B01J20 H01J7 H01J9

    CPC分类号: H01J7/183

    摘要: A method is disclosed for the manufacture of a supported thin layer of getter material, comprising: preparing at least one suspension of NEG material particles, with a particle size lower than about 150 νm, in a dispersing medium having an aqueous, alcoholic or hydroalcoholic base, containing a weight percentage of organic compounds, having a boiling temperature higher than 250 °C, which is lower than 1 %, wherein the ratio of the NEG material weight to the weight of dispersing medium is comprised between 4:1 and 1:1; depositing at least one layer of NEG material suspension onto a metal carrier by serigraphic technique; drying the thus obtained deposit by allowing the volatile components to evaporate; and sintering in a vacuum oven the dried deposit at a temperature comprised between 800 and 1000 °C and operating under vacuum, covering the deposit by means of a material not suffering from physical or chemical alterations under vacuum at any process temperature. It is also disclosed a getter device obtained according to such a method.