摘要:
There is disclosed an ion-scattering spectrometer comprising an ion source (2), a first control electrode (3) for controlling an ion beam emitted by the ion source (2), a detector (4) for detecting scattered particles, and a second control electrode (5) for controlling the ion beam, which is directed from the ion source (2) toward a sample (S), as well as the scattered particles, are arranged on the same axis (X) along with the sample (S). The ion beam directed from the ion source (2) toward the sample (S), and the scattered particles, which are scattered from the sample (S) and are directed toward the detector (4), are caused to converge. The proposed spectrometer attains improved micro-structural analysis of the sample surface and raised ion detection efficiency.
摘要:
There is disclosed an ion-scattering spectrometer comprising an ion source (2), a first control electrode (3) for controlling an ion beam emitted by the ion source (2), a detector (4) for detecting scattered particles, and a second control electrode (5) for controlling the ion beam, which is directed from the ion source (2) toward a sample (S), as well as the scattered particles, are arranged on the same axis (X) along with the sample (S). The ion beam directed from the ion source (2) toward the sample (S), and the scattered particles, which are scattered from the sample (S) and are directed toward the detector (4), are caused to converge. The proposed spectrometer attains improved micro-structural analysis of the sample surface and raised ion detection efficiency.
摘要:
Conventionally, the magnetic field generator was arranged perpendicularly to the axis of the electron beam. The magnetic field generator (4) of this invention is arranged so as to produce an asymmetric magnetic field.
摘要:
A surface analyzer for analyzing the atomic composition of the surface of sample. An ion source generates a proton beam. A magnet directs the proton beam through an accelerating device toward the sample for collision therewith. Protons that are scattered at an angle of 180° pass through the accelerating device in the reverse direction and are decelerated. The magnet directs the protons as a parallel beam to a position detecting device that indicates the position at which the proton beam strikes and energy loss of the protons can be determined.
摘要:
A surface analyzer for analyzing the atomic composition of the surface of sample. An ion source generates a proton beam. A magnet directs the proton beam through an accelerating device toward the sample for collision therewith. Protons that are scattered at an angle of 180° pass through the accelerating device in the reverse direction and are decelerated. The magnet directs the protons as a parallel beam to a position detecting device that indicates the position at which the proton beam strikes and energy loss of the protons can be determined.
摘要:
Conventionally, the magnetic field generator was arranged perpendicularly to the axis of the electron beam. The magnetic field generator (4) of this invention is arranged so as to produce an asymmetric magnetic field.