Ion-scattering spectrometer
    2.
    发明公开
    Ion-scattering spectrometer 失效
    离子散射光谱仪

    公开(公告)号:EP0488067A3

    公开(公告)日:1992-10-07

    申请号:EP91119921.4

    申请日:1991-11-22

    摘要: There is disclosed an ion-scattering spectrometer comprising an ion source (2), a first control electrode (3) for controlling an ion beam emitted by the ion source (2), a detector (4) for detecting scattered particles, and a second control electrode (5) for controlling the ion beam, which is directed from the ion source (2) toward a sample (S), as well as the scattered particles, are arranged on the same axis (X) along with the sample (S). The ion beam directed from the ion source (2) toward the sample (S), and the scattered particles, which are scattered from the sample (S) and are directed toward the detector (4), are caused to converge. The proposed spectrometer attains improved micro-structural analysis of the sample surface and raised ion detection efficiency.

    Ion-scattering spectrometer
    3.
    发明公开
    Ion-scattering spectrometer 失效
    Ionenstreuungsspektrometer。

    公开(公告)号:EP0488067A2

    公开(公告)日:1992-06-03

    申请号:EP91119921.4

    申请日:1991-11-22

    摘要: There is disclosed an ion-scattering spectrometer comprising an ion source (2), a first control electrode (3) for controlling an ion beam emitted by the ion source (2), a detector (4) for detecting scattered particles, and a second control electrode (5) for controlling the ion beam, which is directed from the ion source (2) toward a sample (S), as well as the scattered particles, are arranged on the same axis (X) along with the sample (S). The ion beam directed from the ion source (2) toward the sample (S), and the scattered particles, which are scattered from the sample (S) and are directed toward the detector (4), are caused to converge.
    The proposed spectrometer attains improved micro-structural analysis of the sample surface and raised ion detection efficiency.

    摘要翻译: 公开了一种离子散射光谱仪,包括离子源(2),用于控制由离子源(2)发射的离子束的第一控制电极(3),用于检测散射的颗粒的检测器(4) 用于控制从离子源(2)朝向样品(S)的离子束以及散射颗粒的控制电极(5)与样品(S)一起被布置在同一轴线(X)上 )。 从离子源(2)向样品(S)引导的离子束和从样品(S)散射并被引导到检测器(4)的散射颗粒被聚集。 提出的光谱仪可以改善样品表面的微观结构分析,提高离子检测效率。

    Ion scattering spectrometer
    7.
    发明公开
    Ion scattering spectrometer 失效
    离子散射光谱仪

    公开(公告)号:EP0501257A3

    公开(公告)日:1992-09-23

    申请号:EP92102485.7

    申请日:1992-02-14

    发明人: Hayashi, Shigeki

    摘要: A surface analyzer for analyzing the atomic composition of the surface of sample. An ion source generates a proton beam. A magnet directs the proton beam through an accelerating device toward the sample for collision therewith. Protons that are scattered at an angle of 180° pass through the accelerating device in the reverse direction and are decelerated. The magnet directs the protons as a parallel beam to a position detecting device that indicates the position at which the proton beam strikes and energy loss of the protons can be determined.

    Ion scattering spectrometer
    8.
    发明公开
    Ion scattering spectrometer 失效
    Rückstreuionenspektrometer。

    公开(公告)号:EP0501257A2

    公开(公告)日:1992-09-02

    申请号:EP92102485.7

    申请日:1992-02-14

    发明人: Hayashi, Shigeki

    摘要: A surface analyzer for analyzing the atomic composition of the surface of sample. An ion source generates a proton beam. A magnet directs the proton beam through an accelerating device toward the sample for collision therewith. Protons that are scattered at an angle of 180° pass through the accelerating device in the reverse direction and are decelerated. The magnet directs the protons as a parallel beam to a position detecting device that indicates the position at which the proton beam strikes and energy loss of the protons can be determined.

    摘要翻译: 在同轴撞击碰撞离子散射光谱仪(CAICISS)中,将由一对电极13和磁体20构成的维恩滤波器放置在离子的飞行路径中。 维恩滤波器用作(a)用于间歇地切割照射到样品17上的离子束的斩波器,以及(b)仅将具有预定质量和电荷的离子引导到孔16并将其它离子或非离子化 从而防止具有不同质量或电荷的非离子化原子或杂质离子照射样品17.在另一CAICISS中,离子源11的轴线A设置成离子离子的轴线B倾斜 光束照射到样品14上,并且只有具有预定质量和电荷的离子通过一对偏转电极13从轴线A偏转到轴线B.图像