Amphoteric compositions
    5.
    发明公开
    Amphoteric compositions 失效
    Amphotere Zusammensetzungen。

    公开(公告)号:EP0539714A1

    公开(公告)日:1993-05-05

    申请号:EP92116000.8

    申请日:1992-09-18

    CPC classification number: G03F7/164 C09D5/44 G03F7/032 G03F7/038 Y10S430/136

    Abstract: The invention provides radiation sensitive compositions that comprise an amphoteric polymer, the polymer comprising at least two distinct carrier groups so that the polymer is positively polarized or negatively polarized upon treatment with an acid or base, respectively, enabling the compositions to be electrodeposited either anaphoretically or cataphoretically. Employing this amphoteric polymer in a radiation sensitive composition also allows the use of either an acid or base solution to image and remove the deposited composition irrespective of whether the composition was applied cataphoretically or anaphoretically. The compositions of the invention are also suitably formulated as liquid coating compositions or used to form dry film resists.

    Abstract translation: 本发明提供了包含两性聚合物的辐射敏感组合物,所述聚合物包含至少两个不同的载体基团,使得分别在用酸或碱处理时聚合物被正极化或负极化,使组合物可以通过阴离子或电沉积 cataphoretically。 在辐射敏感组合物中使用这种两性聚合物还允许使用酸或碱溶液来成像和除去沉积的组合物,而不管组合物是用阴离子或阴离子涂覆的。 本发明的组合物也适当地配制成液体涂料组合物或用于形成干膜抗蚀剂。

    Method of controlling photoresist film thickness and stability of an electrodeposition bath
    7.
    发明公开
    Method of controlling photoresist film thickness and stability of an electrodeposition bath 失效
    一种用于控制电沉积浴的光致抗蚀剂膜厚度和稳定性的方法。

    公开(公告)号:EP0449022A2

    公开(公告)日:1991-10-02

    申请号:EP91103687.9

    申请日:1991-03-11

    Abstract: It has been discovered that both water soluble or partially water soluble and water insoluble agents lower the operating temperature of electrodepositable photoresist compositions and substantially increase both lifetime stability and temperature stability of the bath.
    These additives, because of their low volatility and their partition coefficients, essentially remain in the emulsion system and are removed upon codeposition with the photoresist where they act to improve film quality and control thickness.

    Abstract translation: 已经发现没有这两个水溶性或部分水溶性和不溶于水的药物降低电沉积光致抗蚀剂能够组合物的工作温度和大幅提高使用寿命都稳定性和浴的温度稳定性。 这些添加剂,因为它们的挥发性低,它们的分配系数的,本质上保持在乳液体系并且在与光致抗蚀剂在那里它们起作用以提高膜质量和厚度的控制码位置被除去。

    Method of controlling photoresist film thickness and stability of an electrodeposition bath
    9.
    发明公开
    Method of controlling photoresist film thickness and stability of an electrodeposition bath 失效
    控制光电薄膜厚度和电沉积温度稳定性的方法

    公开(公告)号:EP0449022A3

    公开(公告)日:1992-03-11

    申请号:EP91103687.9

    申请日:1991-03-11

    Abstract: It has been discovered that both water soluble or partially water soluble and water insoluble agents lower the operating temperature of electrodepositable photoresist compositions and substantially increase both lifetime stability and temperature stability of the bath. These additives, because of their low volatility and their partition coefficients, essentially remain in the emulsion system and are removed upon codeposition with the photoresist where they act to improve film quality and control thickness.

    Abstract translation: 已经发现水溶性或部分水溶性和水不溶性试剂都降低了可电沉积光致抗蚀剂组合物的操作温度,并且基本上提高了浴的寿命稳定性和温度稳定性。 这些添加剂由于它们的低挥发性和分配系数而基本上保留在乳液体系中,并且在与光致抗蚀剂共沉积时除去,其中它们用于提高膜质量和控制厚度。

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