摘要:
A multilayer wiring board and a method for manufacturing the same are disclosed. The wiring board comprises an insulating substrate (1) having a first (3) and second conductor layers (4) formed on major surfaces of the insulating substrate, a blind hole (6) formed through the first conductor layer (3) and the insulating substrate (1) to expose the second conductor layer (4) at the bottom of the blind hole (6), and a connecting conductor (7) provided to cover the exposed surface of the second conductor layer (4) wall portion of the blind hole and the first conductor layer (3). Since the connecting conductor (7) and the second conductor (4) are made in surface contact, connection reliability is very much improved. The blind hole (6) is made by blasting a fine abrasive powder beam to selectively remove the insulating substrate (1). The end of selective removal can be easily controlled by the difference of working speed against the insulating substrate and the conductor layer to successfully expose the second conductor layer at the bottom of the blind hole.
摘要:
A multilayer wiring board is constructed of insulating substrates (2 1 to 2 3 ) and circuit patterns (3 0 to 3 3 ) formed thereon. The circuit patterns in different layers are electrically connected with each other by way of blind holes (61,52) and/or a through hole selectively extending through the circuit patterns and the insulating substrates. The blind holes and/or the through hole have different diameters depending on the depths of the blind holes and/or the through hole in such a manner that the larger the depth, the larger the diameter. A manufacturing method for such a multilayer wiring board includes the steps of forming a mask on one surface of the multilayer substrate, the mask having a plurality of apertures registered with the blind holes and/or the through hole to be formed later, the apertures having different diameters depending on the depths of the blind holes and/or the through hole in such a manner that the larger the depth, the larger the diameter; etching a portion of the multilayer substrate corresponding to the smallest aperture with use of an abrasive powder having a particle size smaller than the diameter of the smallest aperture; and gradually etching portions of the multilayer substrate corresponding to the other apertures with use of abrasive powders having particle sizes smaller than the diameters of the other apertures, respectively; whereby the blind holes having the respectively desired depths and/or the through hole are formed in the multilayer substrate.