摘要:
A first electrode layer 12, a first piezoelectric film layer 13, a second electrode layer 14, a second piezoelectric film layer 15, and a third electrode layer 16 are layered in that order on a substrate 11; these are constrained so as not to expand or contract in a thickness direction and a piezoelectric transducer is constructed thereby. A plurality of gate lines 201 and 202, a plurality of data lines 203 and 204 intersecting with the gate lines, and thin film transistors 205 and 207, disposed at the intersections of the abovementioned gate lines and data lines, are established; one source-drain of the abovementioned thin film transistors is connected to the abovementioned data lines; another source-drain of the abovementioned thin film transistors is connected to the input sides of the abovementioned thin film piezoelectric transducers 208 through 210; the output sides of the abovementioned thin film piezoelectric transducers are connected to the electrodes of electrophoretic ink display elements; and an electrophoretic ink display apparatus is constructed thereby.
摘要:
A highly reliable liquid jet head having excellent properties, comprising a silicon substrate, a tantalum layer having a thickness of 1,100 angstroms or more formed on the substrate, and a piezoelectric device provided on the tantalum layer, containing a layer of titanium oxide or of an oxide of titanium alloy between the tantalum layer and the electrode, or between the electrode and the piezoelectric film is obtained without suffering the formation of cavities in the silicon dioxide layer or the exfoliation between the electrode an a layer adjacent thereto.
摘要:
A printer head for ink jet recording is disclosed, comprising a single-crystal silicon substrate (101) pierced with holes, a zirconium oxide layer (103) which is brought into direct contact with the surface of the silicon substrate (101) or a silicon oxide layer on the surface of the silicon substrate (101) so as to cover one end of the holes in the silicon substrate (101), a lower electrode (104) provided on the zirconium oxide layer (103), a piezoelectric layer (105) provided on the lower electrode (104), and an upper electrode (106) provided on the piezoelectric layer (105). A process for the preparation of the above printer head for ink jet recording is also disclosed. The printer head for ink jet recording can support a piezoelectric substance having a high piezoelectricity, can exhibit a high head drive durability and can be produced in a high yield.
摘要:
An electrophoretic ink display apparatus comprises a plurality of electrophoretic ink display elements (211) that comprise a plurality of capsules wherein the color changes due to the movement of charged particles within the capsules (107). The electrophoretic ink display apparatus further comprises a plurality of gate lines (201), a plurality of data lines (203) intersecting with the gate lines (201), and thin film transistors (205) (205) disposed at the intersections of said gate lines (201) and data lines (203). One source-drain of said thin film transistors (205) is connected to a data line, another source-drain of said thin film transistor is connected to the input side of said piezoelectric transducer (208); and the output side of said piezoelectric transducer (208) is connected to the electrode of the electrophoretic ink display element (211).
摘要:
A method of forming an oxide-ceramics film capable of controlling the amount of oxygen in the film and with little oxygen deficiency. At least one or more of the steps among a step of forming an amorphous film, a step of heating the amorphous film for crystallization, and a step of these heat processings to be conducted thereafter include a step of processing under an atmosphere including moisture.
摘要:
A highly reliable liquid jet head having excellent properties, comprising a silicon substrate, a tantalum layer having a thickness of 1,100 angstroms or more formed on the substrate, and a piezoelectric device provided on the tantalum layer, containing a layer of titanium oxide or of an oxide of titanium alloy between the tantalum layer and the electrode, or between the electrode and the piezoelectric film is obtained without suffering the formation of cavities in the silicon dioxide layer or the exfoliation between the electrode an a layer adjacent thereto.