A METHOD FOR DETERMINING THE SPECTRAL SCALE OF A SPECTROMETER AND APPARATUS
    1.
    发明公开
    A METHOD FOR DETERMINING THE SPECTRAL SCALE OF A SPECTROMETER AND APPARATUS 审中-公开
    方法用于频谱光谱仪和设备的确定比额表

    公开(公告)号:EP3161436A1

    公开(公告)日:2017-05-03

    申请号:EP15811041.1

    申请日:2015-06-29

    摘要: A method for determining spectral calibration data (λcal(Sd), Sd,cal(λ)) of a Fabry-Perot interferometer (100) comprises: - forming a plurality of filtered spectral peaks (P'1, P'2) by filtering input light (LB1) with a Fabry-Perot etalon (50) such that a first filtered peak (Ρ'1) corresponds to a first transmittance peak (P1) of the etalon (50), and such that a second filtered peak (P'2) corresponds to a second transmittance peak (P2) of the etalon (50), - using the Fabry-Perot interferometer (100) for measuring a spectral intensity distribution (M(Sd)) of the filtered spectral peaks (Ρ'1, P'2), wherein the spectral intensity distribution (M(Sd)) is measured by varying the mirror gap (dFP) of the Fabry-Perot interferometer (100), and by providing a control signal (Sd) indicative of the mirror gap (dFP), and - determining the spectral calibration data (λcal(Sd), Sd,cal(λ)) by matching the measured spectral intensity distribution (M(Sd)) with the spectral transmittance (ΤΕ(λ)) of the etalon (50).

    摘要翻译: 一种用于确定性采矿光谱校准数据的方法(λcal(SD),SD,CAL(λ))法布里 - 珀罗干涉仪(100)的步骤包括: - 通过过滤形成过滤谱峰的多个(P'1,P'2) 输入光(LB1)配有一个法布里 - 珀罗标准具(50)检测做了第一滤波峰(Ρ'1)对应于标准具(50)的第一透射率峰(P1),并且这样做了第二经滤波的峰值(P “2)对应于第二峰的透射率(标准具的P2)(50), - 使用用于测量的光谱强度分布(M(SD法布里 - 珀罗干涉仪(100))的滤波谱峰)(Ρ'1 ,P'2)worin光谱强度分布(M(SD))通过改变法布里 - 珀罗干涉仪(100)的镜间隙(DFP)测量,并且通过提供控制信号(SD)表示反射镜的 间隙(DFP),以及 - 确定性采矿光谱校正数据(λcal(SD),SD,CAL(λ))通过匹配所测量的光谱强度分布(M(SD))与光谱透射率(ΤΕ(λ)) 的标准具(50)。

    OPTICAL MEASUREMENT SYSTEM
    2.
    发明公开
    OPTICAL MEASUREMENT SYSTEM 审中-公开
    光学测量系统

    公开(公告)号:EP3215816A1

    公开(公告)日:2017-09-13

    申请号:EP15801885.3

    申请日:2015-11-05

    IPC分类号: G01J3/02 G01J3/26

    摘要: The present invention concerns an optical measurement system comprising an electrically tunable Peltier element, a detector for detecting radiation from a radiation source in a measurement area, the detector being in thermal connection with the Peltier element, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, the Fabry-Perot interferometer being in thermal connection with the Peltier element, and control electronics circuitry configured to control the Peltier element, the interferometer, and the detector. The present invention further concerns a method for analyzing the spectrum of an object.

    摘要翻译: 本发明涉及包括电可调珀耳帖元件(11),用于检测来自测量区域(26)中的辐射源(25)的辐射的检测器(23)的光学测量系统(1),检测器(23) 在与珀耳帖元件(11)热连接的情况下,在检测器(23)之前放置在辐射(16)的路径中的电可调法布里珀罗干涉仪(10),法布里珀罗干涉仪(10)处于热 与珀耳帖元件(11)的连接以及配置成控制珀耳帖元件(11),干涉仪(10)和检测器(23)的控制电子电路。 本发明还涉及用于分析对象的光谱的方法。

    OPTICAL MEASUREMENT METHOD AND SYSTEM
    4.
    发明公开
    OPTICAL MEASUREMENT METHOD AND SYSTEM 审中-公开
    光学测量方法和系统

    公开(公告)号:EP3215817A1

    公开(公告)日:2017-09-13

    申请号:EP15857959.9

    申请日:2015-11-04

    摘要: The present invention concerns a method for an optical measurement method including the following steps: illuminating an object by light, receiving light from the illuminated object to a tunable Fabry-Perot interferometer, changing mirror gap of the Fabry-Perot interferometer, and detecting the signal passed through the mirror gap of the Fabry-Perot interferometer at different gap lengths. In accordance with the invention the detection is performed at different lengths of times at different gap lengths.

    摘要翻译: 本发明涉及一种用于光学测量方法的方法,其包括以下步骤:通过光照射物体(OBJ1),从被照明物体(OBJ1)接收光(LB1)到可调法布里珀罗干涉仪(100),改变镜子 法布里 - 珀罗干涉仪(100)的间隙(dFP),并以不同间隙长度(dFP)检测通过法布里 - 珀罗干涉仪的镜面间隙(dFP)的信号(LB3)。 根据本发明,在不同的间隙长度(dFP)下以不同的时间长度进行检测。