公开(公告)号：EP1258918A4

公开(公告)日：2006-12-06

申请号：EP01901396

申请日：2001-01-17

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI ,  TOGOE KENICHIRO

IPC分类号： B23Q3/15 ,  B23Q3/154 ,  B25J15/06 ,  H01L21/683 ,  H01L21/68

CPC分类号： B23Q3/154 ,  H01L21/6833

摘要： An electrostatic chuck member having a high adsorption force and superior in response performance (release property) when application of voltage is stopped, comprising an undercoat in the form of a metallic layer on at least one surface of a base member, a lower insulation layer of Al2O3 ceramics on the undercoat, a metallic electrode layer on the insulation layer, an upper insulation layer, which is a topcoat, of Al2O3 ceramics on the electrode layer.

公开(公告)号：EP3239348A4

公开(公告)日：2017-12-20

申请号：EP15873174

申请日：2015-12-24

申请人： TOCALO CO LTD ,  NSK LTD

发明人： TAKEUCHI JUNICHI ,  OKADA YUJI ,  NAGAI MASAYA ,  YAMADA MANABU ,  NAKATA NAOZUMI

IPC分类号： C23C4/10 ,  F16C33/62 ,  F16C33/64 ,  H01B3/12 ,  H02K5/173

CPC分类号： C23C4/10 ,  C08K2201/005 ,  F16C33/62 ,  F16C33/64 ,  F16C2202/24 ,  F16C2206/44 ,  F16C2223/42

摘要： The present invention is an insulated bearing that is provided with an outer ring and an inner ring, at least one of which is made of metal, and multiple rolling elements that roll freely between said outer ring and said inner ring, and in which the outer ring and/or the inner ring is coated with an insulating film. In the insulated bearing, the insulating film is a mixture in which an additive of silicon carbide and/or aluminum nitride is dispersed in a base material obtained from aluminum oxide, and the content of said additive is 1-40 mass% of the total amount of the mixture.

公开(公告)号：EP1156130A4

公开(公告)日：2005-07-20

申请号：EP00979084

申请日：2000-12-04

申请人： TOCALO CO LTD ,  TOKYO ELECTRON LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI ,  HAMAGUCHI TATSUYA ,  NAGAYAMA NOBUYUKI ,  MITSUHASHI KOUJI

IPC分类号： H01L21/302 ,  B01J19/02 ,  C23C4/00 ,  C23C4/02 ,  C23C4/10 ,  C23C14/00 ,  C23C16/06 ,  H01J37/32 ,  H01L21/3065 ,  H01L21/31

CPC分类号： H01J37/32477 ,  B01J19/02 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/024 ,  B01J2219/0263 ,  B01J2219/0286 ,  B01J2219/0894 ,  C09D1/00 ,  C23C4/00 ,  C23C4/02 ,  C23C4/11 ,  Y10T428/12458 ,  Y10T428/12479 ,  Y10T428/12549 ,  Y10T428/12618 ,  Y10T428/24999

摘要： It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.

公开(公告)号：EP0762491A3

公开(公告)日：1998-07-29

申请号：EP96306130

申请日：1996-08-22

申请人： TOCALO CO LTD

发明人： HARADA YOSHIO ,  TAKEUCHI JUNICHI

IPC分类号： B23Q3/15 ,  C01G23/04 ,  C23C4/10 ,  H01L21/203 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/683 ,  H02N13/00 ,  H01L21/68

CPC分类号： B23Q3/15 ,  H01L21/6833 ,  Y10T279/23

摘要： An electrostatic chuck member comprises a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al
2 O
3 ·TiO
2 based spray-coated layer containing a Ti
n O
2n-1 (n=1-9) type compound, and has a large volume resistivity and a less scattering thereof and a stable quality.